Table 5-10 Filament Current Out Of Regulation; Table 5-11 Hvps Arc/Out Of Regulation Led Flashes Excessively - ferrotec Temescal CV-6SLX User Manual

Section 5: Troubleshooting
4. If the symptom is not in evidence during Step 3, troubleshoot the HV path and emitter assembly, following the instructions
in the e-gun manual. If the symptom persists during Step 3, reconnect the HV output cable to J101, switch the power
supply back on, and proceed with the troubleshooting steps described below.
5. Fault conditions whose investigation
requires removal of HVPS top cover.
Before performing any of the procedures described on this page, perform the
procedure described in section 5.4.1.
Symptom: When gun and HV are switched on, filament current ramps up and goes out of regulation
Possible Causes
1. Faulty or loose connections.
2. Short in HV path
3. Emitter damaged
4. Fault conditions whose investigation
requires removal of FPS top cover.

Table 5-11 HVPS ARC/OUT OF REGULATION LED Flashes Excessively

Condition indicated: Subthreshold arcing is occurring and/or HV is intermittently out of regulation
NOTE: A problem exists only if arcing is excessive for the material or process in question
Symptoms:
HVPS front panel: The ARC/OUT OF REGULATION LED flashes excessively. The HV OUT OF REGULATION
•
LED turns yellow for 2 seconds each time the ARC/OUT OF REGULATION LED flashes
For additional information about this fault mode, see Ishikawa Diagram #6 in Appendix A.
Possible Cause
1. Emitter damaged
2. Faulty or loose connections.
3. HV feedthrough shorted
4. Chamber Pressure too high
5. System improperly grounded for HV.
6. Incorrect or fluctuating line voltage
7. Fault conditions whose investigation
requires removal of HVPS top cover.
0101-8242-0, Rev. C
5. Contact Temescal Field Service
DANGER: HIGH VOLTAGE

Table 5-10 Filament Current Out Of Regulation

1. Make sure that all HV and FPS connections are correctly and securely made.
2. Check emitter, feethroughs, and cables for signs of shorts.
3. Follow instructions in gun manual to troubleshoot emitter issues.
4. Contact Temescal Field Service
1. Follow instructions in gun manual to troubleshoot emitter issues.
2. Make sure that all HV and FPS connections are correctly and securely made.
3. Check copper bus bars and HV feedthroughs for shorts, coatings, cracks or
arc marks
4. Chamber pressure should be less than 1 x 10
5. Follow grounding instructions provided in e-gun manual.
6. Confirm input line voltage
7. Contact Temescal Field Service.
.
Procedure
.
Procedure
5-21
5.4 Troubleshooting Procedures
-5
mTorr.
CV-6SLX User Manual