Figure 2-2 Facility Low Impedance Grounding Requirements - ferrotec Temescal CV-6SLX User Manual

2.5 Grounding Requirements

Figure 2-2 Facility Low Impedance Grounding Requirements

The installation of twin rods of copper-clad steel is preferred. However, if the equipment is to
be installed on the upper floors of a building, the system can be grounded by connecting the
vacuum chamber to the steel structure of the building. Where copper straps are attached to
frame members, the copper must be bolted to clean, bare patches of metal. The length of
copper strap connected to the source tray must be securely bolted to a clean site on that part.
Do not rely on water pipes to establish the system ground connection. Multiple
plumbing joints, each with tape and/or sealing compounds, make such a ground
unreliable.
CV-6SLX User Manual
CAUTION
Do not use braided wire for any ground connections.
CAUTION
2-4
Section 2: Installation
0101-8242-0, Rev. C