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1.3. Basic Specifications
1.3. Basic Specifications
Table 1-3:
AGV3D Series Specifications
Optical Specifications
Compatible Wavelength
Aperture
Input Beam Diameter (1/e
Beam Displacement
Dynamic Performance
Tracking Error
Peak Acceleration
Continuous Acceleration
Maximum Positioning
Speed
Processing Speed
Stability
(4)
Long-Term Drift
Thermal Drift
NOTE: All angles are optical unless otherwise noted. All specifications are per axis unless noted.
(1) Contact Aerotech to inquire about additional wavelengths.
(2) As measured at the focusing apparatus.
(3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over
continuous velocity portion of the move.
(4) After an initial three hour warm-up, expect an ambient temperature variation of < ±0.5°.
(5) Without -AC air cooling option.
(6) Air specifications: Nitrogen must be 99.99% pure and filtered to 0.25 μm. Compressed air must be filtered to 0.25 μm,
dry to 0º F dew point and oil free.
(7) The working distance is measured from the bottom surface of the scan head.
20
(1)
2
)
Galvo Scanners
(2)
Z-Focus
Galvo Scanners
(2)
Z-Focus
Galvo Scanners
Z-Focus
Galvo Scanners
(3)
Z-Focus
Galvo Scanners
Z-Focus
Galvo Scanners
Z-Focus
AGV3D-20
343 nm, 355 nm, 515 nm, 532 nm, 1030 nm, 1064 nm,
1550 nm, 9.3 µm, 10.6 µm
20 mm
8 mm
23.2 mm
0 µsec
2
500,000 rad/s
150 m/s
2
130,000 rad/s
50 m/s
300 rad/s
40 m/s at 100x100 mm FOV
400 m/s 1000x1000 mm
FOV
1000 mm/s
3.8 m/s at 160 mm working distance
30 m/s at 500 mm working distance
100 m/s at 1000 mm working distance
50 rad/s
at 100x100 mm FOV: 6.5 m/s
at 1000x1000 mm FOV: 65 m/s
500 mm/s
1.9 m/s at 160 mm working distance
15 m/s at 500 mm working distance
50 m/s at 1000 mm working distance
10 µrad / 12 h
0.5 μm / 12 h
10 µrad / °C
2.5 μm / °C
AGV3D Hardware Manual
AGV3D-30
30 mm
12 mm
35.7 mm
2
350,000 rad/s
2
2
120,000 rad/s
2
125 rad/s
17 m/s at 100x100 mm FOV
170 m/s at 1000x1000 mm
FOV
(2)
(2)
www.aerotech.com
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