MKS Stabil-Ion 370 Series Controller Manuals

Manuals and User Guides for MKS Stabil-Ion 370 Series Controller. We have 1 MKS Stabil-Ion 370 Series Controller manual available for free PDF download: Instruction Manual

MKS Stabil-Ion 370 Series Instruction Manual

MKS Stabil-Ion 370 Series Instruction Manual (122 pages)

Vacuum Measurement

Brand: MKS | Category: Controller | Size: 1 MB

Table of Contents

Table of Contents
5
Safety

9
Chapter 1 System Components

15
Chapter 2 Initial Setup Procedures

21
- Control Unit Option Module Setup
  21
  - Top Cover Removal
    22
  - Convectron Pressure Units Setup
    23
  - Process Control Setup
    24
    
    Ion Gauge Assignment for Process Control
    25
    
    Relay Polarity Setting
    26
    
    Process Control Tips
    27
    
    Computer Interface Setup
    28
    
    Selecting the Byte Format
    28
    
    Handshaking
    30
    
    Address
    32
    
    Computer Interface Setup
    32
    
    Response Delay for the RS-485 Interface
    32
    
    Selecting the Byte Format for RS-485 Communications
    33
    
    Replacing Control Unit Cover
    34
  - Power Supply Setup
    34
Chapter 3 Installation

37
Chapter 4 Preparing the Stabil-Ion System for Operation

59
Chapter 5 Operation of a Stabil-Ion System

99
Chapter 6 Theory of Operation and Specifications

101
- Stabil-Ion Gauge Theory of Operation
  101
Chapter 7 Service and Maintenance

105
- Service Guidelines
  105
- Damage Requiring Service
  106
- Fault Relay
  108
- Electrometer Minimum Calibration Adjustment
  109
- Troubleshooting the Convectron Gauge Module
  110
- Convectron Gauge Test Procedure
  110
- Cleaning Contaminated Convectron Gauges
  111
- Troubleshooting the Electrometer Module
  111
- Overpressure Shutdown
  112
- Turn-OFF History
  113
- Troubleshooting the Process Control Module
  114
- Troubleshooting
  114
- Troubleshooting
  115
- Field Installation of Modules
  115
- Troubleshooting Flow Charts
  116
Index

119

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