EBARA MMD Series Instruction Manual page 50

SECTION ILLUSTRATIVE
L L L L 0 0 0 0 0 0 0 0 1 1 / / E E B B – – R R e e v v G G - - 1 1 0 0 / / 2 2 0 0 1 1 7 7 I I T T A A / / G G B B / / F F
14
R R