Brooks GF135 Mass Flow Controller Manuals

Manuals and User Guides for Brooks GF135 Mass Flow Controller. We have 2 Brooks GF135 Mass Flow Controller manuals available for free PDF download: Installation And Operation Manual, Installation & Operation Manual

Brooks Instrument GF135 Installation & Operation Manual (63 pages)

Metal Sealed, Thermal Mass Flow Controllers & Meters

Brand: Brooks Instrument | Category: Controller | Size: 7 MB

Table of Contents
3
Section 1 General Information

5
Section 2 Installation

24
Section 3 Operation General

43
- Theory of Operation for Flow Measurement
  43
- GF100 Series Operating Principles
  45
Section 4 Maintenance & Troubleshooting Overview

46
- Maintenance
  46
- Troubleshooting
  48
- Troubleshooting Checklist
  48
- Environmental Factors
  48
  - GF100 Series Troubleshooting Guide
    49
Section 5 Product Description Code Overview

53
Appendix A: GF100 Series Gas Table Overview

61
- GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50
  61
- GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50
  61
Appendix B: GF100 Series Patents Overview

62
- GF100 Series Patents
  62

Brooks GF135 Installation And Operation Manual (68 pages)

RS485 L-Protocol Supplemental Manual for Mass Flow Controllers and Meters

Brand: Brooks | Category: Controller | Size: 0 MB

Table of Contents
3
1 Introduction

5
- Purpose
  5
- Scope
  5
2 Background

7
- Topology
  7
- Communication Parameters
  7
- Message Format
  8
3 Message Protocol Details

11
- Query for MAC ID
  11
- Digital Mode Selection
  13
- Query Present Control Mode
  14
- Freeze Follow
  16
- New Setpoint
  17
- Ramp Time
  18
- Filtered Setpoint
  21
- Indicated Flow
  23
- Valve Drive Current
  25
- Calibrated Instance (Process Gas) Selection
  27
- Query for Calibration Instance (Process Gas) Selection
  28
- Query for Available Calibration Instance
  30
- Auto Zero Enable/Disable
  32
- Requested Zero Enable
  33
- Query for Requested Zero Status
  34
- Query for Sensor Current Zero
  36
- Query for Sensor Reference Zero
  38
- Set Sensor Reference Zero
  40
- Set Default Control Mode
  41
- Query Default Control Mode
  42
- Query for Inlet Pressure (GF125 Only)
  44
- Query for Temperature
  46
4 Software Design Requirement

49
- Normal Transaction Scenarios
  49
  - Read Transaction Scenario
    49
  - Write Transaction Scenario
    50
- Abnormal Transaction Scenarios
  50
  - Read Transaction Scenario
    50
    
    Packet Error
    50
    
    Read Error
    51
  - Write Transaction Scenario
    52
    
    Packet Error
    52
    
    Write Error
    52
- Protocol Timing
  53
- Message Sequence between Master Controller and a MFC Slave Controller
  54
- MFC New Setpoint Conversion
  55
- Sensor Zero Filter
  55
  - Requested Zero
    56
  - Auto Zero
    56
- Calibration Instances
  57
- Analog / Digital Mode
  57
5 Advanced Diagnostics (GF135 Only)

59
- New Communication Protocol Overview
  59
  - Objectives and Problem Statement
    59
  - Protocol Description
    59
- Specific Requirements
  60
  - Introduction
    60
  - Advanced Protocol
    60
  - New Attributes
    60
- Tool - Device Communication
  63
6 Appendix: Tool - Device Communication

65

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More Brooks Manuals

Brooks GF135 Mass Flow Controller Manuals

Brooks Instrument GF135 Installation & Operation Manual (63 pages)

Table of Contents

Section 1 General Information

Section 2 Installation

Section 3 Operation General

Section 4 Maintenance & Troubleshooting Overview

Section 5 Product Description Code Overview

Appendix A: GF100 Series Gas Table Overview

Appendix B: GF100 Series Patents Overview

Brooks GF135 Installation And Operation Manual (68 pages)

Table of Contents

1 Introduction

2 Background

3 Message Protocol Details

4 Software Design Requirement

5 Advanced Diagnostics (GF135 Only)

6 Appendix: Tool - Device Communication

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