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Summary of Contents for Edwards nHT10
- Page 1 edwardsvacuum.com Diffusion Pumps INSTRUCTION MANUAL B31430880_C Original instructions...
- Page 2 Copyright notice ©Edwards Limited 2020. All rights reserved. Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
- Page 3 Declaration of Conformity Edwards Ltd, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK The following product: Vapour Diffusion Pumps: nHT10: B31130400 / B31130460 / B31132400 / B31132460 nHT16: B31230400 / B31230460 / B31232400 / B31232460 nHT20: B31430400 / B31430460 / B31432400 / B31432460...
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Page 4: Table Of Contents
7.3.1 Air inrush..........44 B31430880_C Page 3 10/2020 - ©Edwards Limited... - Page 5 14. Service..........76 14.1 Return the equipment or components for service ....76 B31430880_C Page 4 10/2020 - ©Edwards Limited...
- Page 6 Figure 7: Pumping speed overview for nHT10........
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Page 7: Safety And Compliance
Information about properties or instructions for an action which, if ignored, will cause damage to the pump or the system. We reserve the right to change the design and the stated data. The illustrations are not binding. Keep the instructions for future use. B31430880_C Page 6 10/2020 - ©Edwards Limited... -
Page 8: Safety Symbols
Warning - Use protective equipment Use appropriate protective equipment for the task. Warning - Risk of explosion There is a risk of explosion when you do the task. Warning - Toxic material The material is toxic. B31430880_C Page 7 10/2020 - ©Edwards Limited... -
Page 9: Important Safety Information
CAUTION: EXPOSURE TO VACUUM Risk of injury. Do not operate the pump system with open inlet and outlet ports. During installation connect the system mechanically via the inlets and outlets before making the electrical connections. B31430880_C Page 8 10/2020 - ©Edwards Limited... -
Page 10: Electrical Hazards
Connect a second protective earthing conductor. There are hazardous voltages present on the mains cables (danger to life). Before you do maintenance or service work on the product, turn off the mains supply. B31430880_C Page 9 10/2020 - ©Edwards Limited... -
Page 11: Thermal Hazards
Only open fluid drain port or fill port if the pump is cooled down to room temperature and is vented. Let cooling water pipes cool down before removing and then shut off the feed line. Wear suitable protective equipment. B31430880_C Page 10 10/2020 - ©Edwards Limited... -
Page 12: Danger Through Substances And Materials
Wear appropriate protective clothing (gloves, goggles, respiratory protection, personal protective equipment). Avoid body contact with plant oil, process residues and contaminated surfaces. Perform maintenance in clean, dry and well ventilated rooms. B31430880_C Page 11 10/2020 - ©Edwards Limited... - Page 13 Wear appropriate protective clothing (gloves, goggles, respiratory protection, personal protective equipment). Avoid body contact with plant oil, process residues and contaminated surfaces. Perform maintenance in clean, dry and well ventilated rooms. B31430880_C Page 12 10/2020 - ©Edwards Limited...
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Page 14: Description
To protect the heating element, a thermostat sensor is attached to one of the heater cartridges. When installed, it protrudes above the fluid. It must be used to turn off the pumps heaters as soon as the bimetallic switch temperature reaches the preset trip point. B31430880_C Page 13 10/2020 - ©Edwards Limited... -
Page 15: Figure 1 Overview Of Nht Diffusion Pump
5. Inlet connection flange 6. Cold cap baffle 6. Cold cap baffle 7. Pump body 7. Pump body 8. Electrical terminal box 8. Electrical terminal box 9. Heater cover plate 9. Heater cover plate B31430880_C Page 14 10/2020 - ©Edwards Limited... -
Page 16: Supplied Equipment
Centring ring seal for ISO pumps. ▪ Outlet seal O-ring for ANSI pumps The inlet and outlet vacuum flanges are covered with shipping flanges. The inside of the pump is cleaned and evacuated before shipment. B31430880_C Page 15 10/2020 - ©Edwards Limited... -
Page 17: Technical Data
B31430880_C - Technical data 4. Technical data 4.1 Dimension drawings Figure 2 nHT10 Dimensions B31430880_C Page 16 10/2020 - ©Edwards Limited... -
Page 18: Figure 3 Nht16 Dimensions
B31430880_C - Technical data Figure 3 nHT16 Dimensions B31430880_C Page 17 10/2020 - ©Edwards Limited... -
Page 19: Figure 4 Nht20 Dimensions
B31430880_C - Technical data Figure 4 nHT20 Dimensions B31430880_C Page 18 10/2020 - ©Edwards Limited... -
Page 20: Figure 5 Nht32 Dimensions
B31430880_C - Technical data Figure 5 nHT32 Dimensions B31430880_C Page 19 10/2020 - ©Edwards Limited... -
Page 21: Pumping Speed Curves
B31430880_C - Technical data Figure 6 nHT35 Dimensions 4.2 Pumping speed curves Figure 7 Pumping speed overview for nHT10 1. Pumping speed 1. Pumping speed 2. Throughput 2. Throughput B31430880_C Page 20 10/2020 - ©Edwards Limited... -
Page 22: Figure 8 Pumping Speed Overview For Nht16
Figure 8 Pumping speed overview for nHT16 1. Pumping speed 1. Pumping speed 2. Throughput 2. Throughput Figure 9 Pumping speed overview for nHT20 1. Pumping speed 1. Pumping speed 2. Throughput 2. Throughput B31430880_C Page 21 10/2020 - ©Edwards Limited... -
Page 23: Figure 10 Pumping Speed Overview For Nht32
Figure 10 Pumping speed overview for nHT32 1. Pumping speed 1. Pumping speed 2. Throughput 2. Throughput Figure 11 Pumping speed overview for nHT35 1. Pumping speed 1. Pumping speed 2. Throughput 2. Throughput B31430880_C Page 22 10/2020 - ©Edwards Limited... - Page 24 10.8 21.6 Heating cartridges Warm up period < 15 < 25 Coolant (minimum) ▪ for the pump† ▪ for the cold cap baffle Number of cooling circuits (including cold cap baffle) Coolant connection B31430880_C Page 23 10/2020 - ©Edwards Limited...
- Page 25 * Measured as per DIN 28 427 using Edwards 704 normal as the pump fluid. § Measured as per DIN 28 427 using Edwards 704 normal as the pump fluid. When using Edwards 704 pump fluid and FPM (fluoroelastomer) gaskets, the pumps with water cooled baffles will achieve pressures below 1 x 10 mbar following suitable bake-out procedures.
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Page 26: Ordering Information
B31130400 B31132400 B31230400 B31232400 B31430400 B31432400 B31630400 B31632400 B31530400 B31532400 PN/Y 460V/50/60Hz /3 ph B31130460 B31132460 B31230460 B31232460 B31430460 B31432460 B31630460 B31632460 B31530460 B31532460 PN/Y Water flow monitor 500006623 Thermostatic safety 12284 switch Pump fluid (See Table: Pump fluid technical data) B31430880_C Page 25 10/2020 - ©Edwards Limited... -
Page 27: Centre Of Gravity Overview
Specific gravity at 25 °C 1.06 - 1.07 1.09 - 1.1 Table 5 Pump fluid ordering information Silicone oils Edwards 704 Edwards 705 500 ml H02400060 H02400070 Pump fluid/oils 1 kg H02400061 H02400071 5 kg H02400062 B31430880_C Page 26 10/2020 - ©Edwards Limited... - Page 28 It also has extremely low back-streaming properties. Edwards 705 Silicone oil, has an extremely low vapour Possible pressure and back-streaming rate. It exhibits extreme chemical, thermal, oxidation, hy- drolysis and radiation resistance. B31430880_C Page 27 10/2020 - ©Edwards Limited...
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Page 29: Transport And Storage
To vent the pump, pull the closure plug out of the hose nozzle in the outlet shipping flange. Note: The ambient temperature range must not be greater than -20 °C to +70 °C during transport and storing. B31430880_C Page 28 10/2020 - ©Edwards Limited... -
Page 30: Storage
Maintain the pump in storage so that it is dry and not exposed to frost. The cooling coils need to be blown out and must be dry. Keep the pump in the upright position when stored. B31430880_C Page 29 10/2020 - ©Edwards Limited... -
Page 31: Installation
Connect the pump to prevent accidental operation after a monitoring component (thermostat, overheating protection switch, coolant flow monitor) has been tripped. All the pump's interior surfaces must be carefully cleaned before filling the pump with a different oil compound. B31430880_C Page 30 10/2020 - ©Edwards Limited... -
Page 32: Figure 13 Connection Elements
5. Coolant inlet and outlet for cold cap baffle baffle 6. Inlet connection flange 6. Inlet connection flange 7. Electrical terminal box 7. Electrical terminal box 8. Heater cover plate 8. Heater cover plate B31430880_C Page 31 10/2020 - ©Edwards Limited... -
Page 33: Inlet Connection
Connect the backing line with the centring ring, O-ring and outer ring at the outlet port. Refer to Figure: Connection elements. Note: The shipping flange (blank flange) and claws may be used only for shipping purposes. They are not correct for mounting the pumps in systems. B31430880_C Page 32 10/2020 - ©Edwards Limited... -
Page 34: Coolant Connection
We recommend compliance with the following limit values: Appearance Clear, free of oils and greases Suspended matter < 250 mg/l Particle size < 150 µm Electrical conductivity < 700 µS/cm B31430880_C Page 33 10/2020 - ©Edwards Limited... -
Page 35: Electrical Connection
(±10%), 3-phase, 50/60 Hz, or a 460 V (±10%), 3-phase, 50/60 Hz power source. A 400 V pump can be re-configured to 230 V 3‑phase 50/60 Hz operation by using the alternative Delta configuration shown in Terminal box layouts on page 35. B31430880_C Page 34 10/2020 - ©Edwards Limited... -
Page 36: Terminal Box Layouts
50 A nHT35 50 A 6.5.1 Terminal box layouts Figure 14 nHT10 terminal box layout A. Standard Star configuration as supplied A. Standard Star configuration as supplied B. Alternative Delta configuration for 400 V B. Alternative Delta configuration for 400 V... -
Page 37: Figure 15 Nht16 Terminal Box Layout
230 V, 3~, 50/60 Hz 1. Red power jumpers 1. Red power jumpers 2. Blue jumpers 2. Blue jumpers 3. Grey jumpers (supplied with terminal 3. Grey jumpers (supplied with terminal box) box) B31430880_C Page 36 10/2020 - ©Edwards Limited... -
Page 38: Thermal Safety Switch
Use terminals 1 and 2 at the switch for the connection. Note: Connect the thermal safety switch so that the pump cannot re-start spontaneously until the system has cooled down again, if tripped. B31430880_C Page 37 10/2020 - ©Edwards Limited... -
Page 39: Connecting Monitoring Components (Optional)
(customer supplied). Connect one phase of the power supply relay through the thermal protection switch. Use four cap screws, M3 x 6 to mount the thermal protection switch. B31430880_C Page 38 10/2020 - ©Edwards Limited... -
Page 40: Pump Fluid
(for example, from mineral oil to silicone oil). The nHT pumps are shipped without pump fluid. We recommend to use either Edwards 704 or 705 silicone oil. These compounds are suitable because of their high thermal and chemical stability. -
Page 41: Figure 18 Schematic For A Diffusion-Type Vacuum Pump System
High vacuum valve Backing valve Roughing valve Backing valve (optional for holding pump) Baffle Inlet baffle Air admittance valve High vacuum measurement point Fore vacuum measurement point Fore vacuum measurement point (vacuum chamber customer) B31430880_C Page 40 10/2020 - ©Edwards Limited... -
Page 42: Operation
Temperature Temperature valves V2 + V4 are closed, nHT remains evacuated < 100 °C < 100 °C Backing pumps P1, P2, (P3) are switched-off Valve V4 closes Valve V2 closes End of process B31430880_C Page 41 10/2020 - ©Edwards Limited... -
Page 43: Start-Up
Make sure that the high vacuum valve is opened slowly to reduce flow disturbances within the pump as well as oil loss. Note: Check the heater cartridges after long periods of system downtimes (after one year at the latest) or if the pump is in storage. B31430880_C Page 42 10/2020 - ©Edwards Limited... -
Page 44: Operate
Operate the pump only in the installed condition. During operation, pumps must not be opened or vented. The operator must conduct process dependent considerations regarding risks with the general starting and stopping, operation, and automatic restarts after system power failures. B31430880_C Page 43 10/2020 - ©Edwards Limited... -
Page 45: Air Inrush
We recommend to interlock the high vacuum valve V1 and the backing valve V2 to prevent venting the hot diffusion pump when it is ready for operation. B31430880_C Page 44 10/2020 - ©Edwards Limited... -
Page 46: Regular Checks
Turn off the cooling water supply after the pump has cooled down to < 100 °C. The pump operation with closed high vacuum and fore vacuum side and simultaneously switched off cooling water supply is a dangerous condition and must be prevented (for example, by an interlock circuit). B31430880_C Page 45 10/2020 - ©Edwards Limited... -
Page 47: Disconnect The Pump From The System
Turn off/shut down on page 45. Isolate the pump from the power supply and remove the electrical connection terminals. Disconnect the coolant system and use compressed air to blow out the piping network. B31430880_C Page 46 10/2020 - ©Edwards Limited... - Page 48 76 , if you return a pump to An electrical safety test EN 60204 must be done if the pump or electrical parts were replaced. The compliance with the corresponding technical documents (PE conductor continuity, functional tests) must be checked. B31430880_C Page 47 10/2020 - ©Edwards Limited...
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Page 49: Maintenance
If the pump has to be vented frequently or is operated with a vacuum chamber that is vented regularly (batch operation), then we recommend keeping the fluid at the maximum level. B31430880_C Page 48 10/2020 - ©Edwards Limited... -
Page 50: Top-Up Pump Fluid
Open the fluid fill port and fill in the pump fluid ensuring not to fill over the maximum mark. We recommend that you replace the fluid fill port seal. Close the fluid fill port. B31430880_C Page 49 10/2020 - ©Edwards Limited... -
Page 51: Figure 20 Checking The Level Of The Pump Fluid
2. Oil fill level sight glass 2. Oil fill level sight glass 3. Maximum mark 3. Maximum mark 4. Pump fluid drain port 4. Pump fluid drain port 5. Minimum mark 5. Minimum mark B31430880_C Page 50 10/2020 - ©Edwards Limited... -
Page 52: Exchange The Pump Fluid
Unscrew the cap, loosen the nut of the main axis, and lift out the interior assembly. Grasp the interior assembly at the first stage and lift it out of the pump body. B31430880_C Page 51 10/2020 - ©Edwards Limited... - Page 53 Make sure of correct positioning of the two insulating washers and the spacer between the cold cap baffle and the nozzle assembly. Close the pump fluid drain port and reinstall the pump in the system. Do a leak test. B31430880_C Page 52 10/2020 - ©Edwards Limited...
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Page 54: Clean The Cooling Coils
8 hours at 180 °C. Check the heater cartridges annually (metered resistance: 49 to 55 Ω). Depending on the load, we recommend to un-install the heater cartridges and apply never seize spray onto B31430880_C Page 53 10/2020 - ©Edwards Limited... - Page 55 Insert the new heater cartridge with its new gasket and tighten the fixing flange (12 Nm). Reconnect the heater electrical connections. Fill the pump fluid according to the quantity given in Technical data on page 16. Before recommissioning the pump, do an electrical safety check. B31430880_C Page 54 10/2020 - ©Edwards Limited...
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Page 56: Fault Finding
Replace the defective heating cartridge. Fault Insufficient cooling, pump runs too hot Cause Coolant circuits connected incorrectly. Remedy Connect the coolant circuits as described in Coolant connection on page 33. Cause Insufficient coolant pressure. B31430880_C Page 55 10/2020 - ©Edwards Limited... - Page 57 Pump is not suspended vertically/standing flat and level. Remedy Connect the pump correctly. Fault High pump fluid loss Cause Gas throughput too high. Remedy Check the process. Cause High vacuum valve leaky. Remedy Clean or repair the valve. B31430880_C Page 56 10/2020 - ©Edwards Limited...
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Page 58: Storage
Store the pump in an upright position. When storing the pump for longer periods or in environments with high humidity, enclose the pump in a foil bag, including a desiccant bag, to protect it against corrosion and ageing of the heater cartridges. B31430880_C Page 57 10/2020 - ©Edwards Limited... -
Page 59: Waste Disposal
European, national and local regulations concerning the disposal of waste need to be observed. The waste must only be handled and disposed of through an approved waste disposal vendor. B31430880_C Page 58 10/2020 - ©Edwards Limited... -
Page 60: Spares And Accessories
B31430880_C - Spares and accessories 12. Spares and accessories Figure 22 Overall view of the nHT20 ANSI Note: All other models are similar. B31430880_C Page 59 10/2020 - ©Edwards Limited... - Page 61 O-ring 475 x 8; NBR ; PK1 E6530298 16" ANSI inlet seal O-ring 560 x 8; FPM ; PK1 H02123773 20" ANSI inlet seal O-ring 200 x 5; FPM ; PK5 H02123779 6" ANSI outlet seal B31430880_C Page 60 10/2020 - ©Edwards Limited...
- Page 62 ISO sealing ring AL/CR ; PK1 B31532750 Optional 1000 ISO-F inlet seal Silicone O-ring pack EK6526563 Optional silicone Drain, Fill and sight glass seals Spare cold cap assy nHT10 E6529962 Spare cold cap assy nHT16 E6530632 Extended cold cap nHT16 B61233100 Accessory...
- Page 63 Spare cold cap insulating washers kit B61000701 nHT16 / nHT20 Spare cold cap insulating washers kit B61000704 nHT32 / nHT35 Spare backing baffle nHT10 E6521085 Spare backing baffle nHT16 E6521088 Spare backing baffle nHT20 B31430711 Spare backing baffle nHT32 / nHT35...
- Page 64 Spare terminal box complete nHT32 B31630714 Spare terminal box complete nHT35 B31530714 Spare terminal block 6 way PK3 B61000703 Seals kit / Clean and overhaul nHT10 B31130715 Seals kit / Clean and overhaul nHT16 B31230715 Seals kit / Clean and overhaul nHT20 B31430715...
- Page 65 Energy efficient controller (EEC) B61001100 Accessory Cable 10 m for EEC nHT32/35 B61001120 Accessory Cable 10 m for EEC nHT20 B61001121 Accessory Cable 10 m for EEC nHT10/16 B61001022 Accessory nHT10 ANSI inlet valve B61130100 Accessory nHT10 ISO inlet valve B61132100 Accessory...
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Page 66: Terminal And Circuit Diagrams
▪ External voltage/potential free Orange contacts ▪ Protective earth Green/Yellow All wires not signed in the: ▪ Main circuit 1.5 mm² AWG 16 ▪ Control circuit 1.0 mm² AWG 18 Core type to be used Standard B31430880_C Page 65 10/2020 - ©Edwards Limited... -
Page 67: Figure 23 Nht10 Circuit Diagram (1 Of 2)
B31430880_C - Terminal and circuit diagrams Figure 23 nHT10 Circuit diagram (1 of 2) B31430880_C Page 66 10/2020 - ©Edwards Limited... -
Page 68: Figure 24 Nht10 Circuit Diagram (2 Of 2)
B31430880_C - Terminal and circuit diagrams Figure 24 nHT10 Circuit diagram (2 of 2) B31430880_C Page 67 10/2020 - ©Edwards Limited... -
Page 69: Figure 25 Nht16 Circuit Diagram (1 Of 2)
B31430880_C - Terminal and circuit diagrams Figure 25 nHT16 Circuit diagram (1 of 2) -2R3 1.2KW -2R2 1.2KW -2R1 1.2KW -1R3 1.2KW -1R2 1.2KW Bi-metal -1R1 1.2KW PT100 B31430880_C Page 68 10/2020 - ©Edwards Limited... -
Page 70: Figure 26 Nht16 Circuit Diagram (2 Of 2)
B31430880_C - Terminal and circuit diagrams Figure 26 nHT16 Circuit diagram (2 of 2) B31430880_C Page 69 10/2020 - ©Edwards Limited... -
Page 71: Figure 27 Nht20 Circuit Diagram (1 Of 3)
B31430880_C - Terminal and circuit diagrams Figure 27 nHT20 Circuit diagram (1 of 3) -3R3 1.2KW -3R2 1.2KW -3R1 1.2KW -2R3 1.2KW -2R2 1.2KW -2R1 1.2KW -1R3 1.2KW -1R2 1.2KW Bi-metal -1R1 1.2KW PT100 B31430880_C Page 70 10/2020 - ©Edwards Limited... -
Page 72: Figure 28 Nht20 Circuit Diagram (2 Of 3)
Figure 28 nHT20 Circuit diagram (2 of 3) +PUT01 Pump body 10.8 KW nHT Pump Cover plate left Cover plate right -W19 -W20 -W21 Mounting plate Terminal box GNYE 6 mm² Gland plate M6 PE GNYE 6 mm² 5.8/PE B31430880_C Page 71 10/2020 - ©Edwards Limited... -
Page 73: Figure 29 Nht20 Circuit Diagram (3 Of 3)
B31430880_C - Terminal and circuit diagrams Figure 29 nHT20 Circuit diagram (3 of 3) B31430880_C Page 72 10/2020 - ©Edwards Limited... -
Page 74: Figure 30 Nht32/35 Circuit Diagram (1 Of 3)
Figure 30 nHT32/35 Circuit diagram (1 of 3) -3R3 1.2KW -3R2 1.2KW -3R1 1.2KW -2R3 1.2KW -2R2 1.2KW -2R1 1.2KW -1R3 1.2KW -1R2 1.2KW Bi-metal -1R1 1.2KW BK 6 mm² BK 6 mm² BK 6 mm² B31430880_C Page 73 10/2020 - ©Edwards Limited... -
Page 75: Figure 31 Nht32/35 Circuit Diagram (2 Of 3)
Figure 31 nHT32/35 Circuit diagram (2 of 3) -6R3 1.2KW PT-100 -6R2 1.2KW Bi metal -6R1 1.2KW -5R3 1.2KW -5R2 1.2KW -5R1 1.2KW -4R3 1.2KW -4R2 1.2KW -4R1 1.2KW +PUT01 21.6 KW nHT Pump Terminal box B31430880_C Page 74 10/2020 - ©Edwards Limited... -
Page 76: Figure 32 Nht32/35 Circuit Diagram (3 Of 3)
B31430880_C - Terminal and circuit diagrams Figure 32 nHT32/35 Circuit diagram (3 of 3) B31430880_C Page 75 10/2020 - ©Edwards Limited... -
Page 77: Service
HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to us. NOTICE: If we do not receive a completed HS2 form, your equipment cannot be serviced. B31430880_C Page 76 10/2020 - ©Edwards Limited... - Page 78 B31430880_C - Service B31430880_C Page 77 10/2020 - ©Edwards Limited...
- Page 79 edwardsvacuum.com...
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