INFICON
Table of Contents
1 About these instructions ................................................................................................................................... 8
1.1 Target groups ........................................................................................................................................... 8
1.2 Warnings................................................................................................................................................... 8
1.3 Definition of terms..................................................................................................................................... 8
2 Safety ............................................................................................................................................................. 11
2.1 Intended use ........................................................................................................................................... 11
2.2 Owner requirements ............................................................................................................................... 12
2.3 Duties of the operator ............................................................................................................................. 12
2.4 Dangers .................................................................................................................................................. 12
3 Shipment, Transport, Storage ........................................................................................................................ 14
4 Description...................................................................................................................................................... 16
4.1 Function .................................................................................................................................................. 16
4.2 Operation modes .................................................................................................................................... 16
4.3 Device setup ........................................................................................................................................... 18
4.3.1 Overall device ............................................................................................................................. 18
4.3.2 Control unit.................................................................................................................................. 21
4.3.2.1
START button .................................................................................................................... 22
4.3.2.2
STOP button ...................................................................................................................... 22
4.3.2.3
ZERO button ...................................................................................................................... 23
4.3.2.4
4.3.2.5
Meaning of the status LED................................................................................................. 24
4.3.2.6
4.3.3 Vacuum connections................................................................................................................... 27
4.3.3.1
Inlet .................................................................................................................................... 27
4.3.3.2
Exhaust .............................................................................................................................. 27
4.3.3.3
Purge gas connection ........................................................................................................ 28
4.3.3.4
Venting connection............................................................................................................. 28
4.3.5 Markings on the device ............................................................................................................... 29
UL3000-Fab-Operating-instructions-iina73en1-08-(1910)
Table of Contents
iii
Need help?
Do you have a question about the ULTRATEST UL3000 Fab and is the answer not in the manual?