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Inficon UL1000 Fab Manuals
Manuals and User Guides for Inficon UL1000 Fab. We have
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Inficon UL1000 Fab manual available for free PDF download: Technical Handbook
Inficon UL1000 Fab Technical Handbook (119 pages)
Helium Leak Detector
Brand:
Inficon
| Category:
Measuring Instruments
| Size: 1 MB
Table of Contents
Trigger Level
2
Table of Contents
3
1 General Information
7
Notes on the Use of this Handbook
7
Safety Symbols
7
Indications
8
Symbols of Vacuum Technology
8
Definiton of Terms
8
Support from INFICON Service
10
Service Centers
11
Introduction
13
Purpose
13
Technical Data
15
Physical Data
15
Electrical Data
15
Other Data
16
Ambient Conditions
16
Unpacking
16
Supplied Equipment
17
Accessories and Options
18
Sniffer Line SL200
18
Toolbox
18
Helium Bottle Holder
18
ESD Mat
18
RC1000 Remote Control
19
Test Chamber TC1000
20
2 Installation
21
Transportation
21
Working Location
23
Electrical Connections
25
Mains Power
25
Connections for the Data Acquisition Systems
27
Accessories
28
Digital out
28
Digital in
29
Recorder
30
Rs232
31
Remote Control
31
Vaccum Connections
32
Inlet Port
32
Exhaust
32
Vent
32
Purge-Connection (UL1000 Fab) / Gas Ballast (UL1000)
32
Default Parameters
33
3 First Operation Check
34
Needed Equipment
34
Description of the Initial Operation
34
Start up and Measure
34
Internal Calibration
37
Verification
37
4 Description and Working Principle
38
Introduction
38
Components of the UL1000 and UL1000 Fab
38
Vacuum System
39
Control Panel
40
LC Display
41
START Button
41
STOP Button
41
ZERO Button
41
MENU Button
43
Soft Keys
43
Numerical Entries
43
Working Modes
45
Vacuum Mode
45
Sniffer Mode
47
Auto Leak Test Mode
47
5 Operation of the UL1000 and UL1000 Fab
48
Display
48
The Screen in Run-Up Mode
48
Display in Stand-By Mode
49
Purging
49
The Screen in Measurement Mode
49
Call for Calibration
49
Speaker Volume
50
Status Line in the Display
50
Numerical Display Mode
51
Trend Mode
51
6 Description of the Menu
52
Main Menu
52
View
54
Scale Linear/Logarithmic
55
Display-Range Auto/Manual
55
Time Axis
56
Contrast
56
Background in Stand-By
57
Decimal Places
57
Lower Display Limit
58
Mode
58
Auto Leak Test
59
Trigger & Alarms
61
Trigger Level 1
61
Volume
62
Trigger Level 2
62
Units
63
Alarm Delay
63
Audio Alarm Type
64
Pinpoint
64
Leak Rate Prop
64
Setpoint
65
Trigger Alarm
65
Calibration
65
Settings
66
Vacuum Settings
67
Automatic Purge (UL1000 Fab Only)
67
Vent Delay
67
Vacuum Ranges
68
Leak Rate Internal Test Leak
69
Machine Factor
69
Auto Leak Test Adjustments
69
Zero & Background
73
Background Suppression
73
Zero
73
Mass
74
Interfaces
75
Control Location
75
RS232 Protocol
76
Recorder Output
77
Scaling Recorder Output
78
Miscellaneous
79
Time&Date
79
Language
79
Leak Rate Filter
80
Mains Frequency
80
Service Interval Exhaust Filter
80
Service Message Exhaust Filter
81
Parameter Save / Load
81
Load Parameter Set
81
Save Parameter Set
82
Monitoring Functions
82
Information
85
Service
85
Access Control
86
Access to CAL Function
86
Access to Trigger&Alarme Menu
87
Change Device PIN
87
Change Menu-PIN
87
7 Calibration
88
Introduction
88
The Calibration Routines
88
Internal Calibration
89
Automatic Internal Calibration
89
Manual Internal Calibration
89
External Calibration
89
Factor of Calibration - Range of Values
93
8 Error and Warning Messages
94
Hints
94
List of Errors & Warnings
95
9 Maintenance Work
99
General Information
99
Maintenance or Service at INFICON
100
Key to the Maintenance Plan
100
Maintenance Plan
101
Maintenance Groups
102
1500 Hours Maintenance
102
8000 Hours Maintenance
103
Notes Refering the Maintenance of the Splitflow 80
104
Description of the Maintenance Work
104
Opening the Instrument for Maintenance Purposes
105
Checking and Replacing the Filter Insert
106
Replacing the Exhaust Silencer
108
Checking/Emptying the Exhaust Filter
109
Replacing the Filter Insert
109
Monitoring the Oil Level of the D16 B and Topping up the Oil
111
Oil Change for the D16B
112
Scroll Pumps (UL1000 and UL1000 Fab Only)
114
Appendix
115
A Diagram
115
Index
116
C Declaration of Conformity
118
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