Inficon UL3000 Fab PLUS Operating Instructions Manual
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Inficon UL3000 Fab PLUS Operating Instructions Manual

Inficon UL3000 Fab PLUS Operating Instructions Manual

Helium leak detector with ultratest sensor technology
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Translation of the original operating instructions
UL3000 Fab, UL3000 Fab PLUS
Helium Leak Detector with ULTRATEST
Catalog No.
550-200, 550-250
From software version
1.51 (Operating unit)
™
Sensor Technology
iina73en1-09-(2109)

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  • Page 1 Translation of the original operating instructions UL3000 Fab, UL3000 Fab PLUS ™ Helium Leak Detector with ULTRATEST Sensor Technology Catalog No. 550-200, 550-250 From software version iina73en1-09-(2109) 1.51 (Operating unit)
  • Page 2 INFICON GmbH Bonner Strasse 498 50968 Cologne, Germany...

  • Page 3: Table Of Contents

    INFICON Table of Contents Table of Contents 1 About this manual............................. 8 1.1 Target groups ............................ 8 1.2 Warnings.............................. 8 1.3 Definition of terms............................. 8 2 Safety ................................ 11 2.1 Intended use ............................ 11 2.2 Duties of the operator .......................... 13 2.3 Owner requirements .......................... 13 2.4 Dangers .............................. 14 3 Scope of delivery, transport, storage...................... 15...
  • Page 4 Table of Contents INFICON 5.1 Setup .............................. 39 5.2 Connect the supplied accessories ...................... 43 5.3 Fastening bracket for sniffer line SL3000 (accessory, optional) ............. 49 5.4 Connecting to the power supply system .................... 50 5.5 Checking the operation of the device ..................... 50 6 Operation................................ 52 6.1 Basic settings............................ 52...
  • Page 5 6.6.6 Call the energy data information .................... 86 6.6.7 Call information on the HYDRO•S (UL3000 Fab PLUS only) .............  87 6.6.8 Call information on the SL3000 Sniffer line (UL3000 Fab PLUS only) ........ 87 6.7 Log................................ 87 6.7.1 Call the error and warning log.....................  87 6.7.2 Call calibration log........................
  • Page 6 Table of Contents INFICON 6.7.3 Call maintenance log ........................ 87 6.7.4 Call result log .......................... 87 6.8 Device settings ............................ 88 6.8.1 Viewing and customizing individual parameters .................  88 6.8.2 Saving and managing sets of parameters ..................  88 6.8.3 Exporting or importing sets of parameters ..................  89 6.9 Updating the software.......................... 89...
  • Page 7 INFICON Table of Contents 10.2.2 Configuring analog outputs .......................  129 10.2.3 Configure digital inputs ...................... 131 10.2.4 Configuring digital outputs ...................... 132 10.2.5 Setting up the I/O module protocol ...................  134 10.3 Bus module............................ 134 10.3.1 Creating a connection between the device and the bus module .......... 135 10.3.2 Setting a bus module address ....................

  • Page 8: About This Manual

    1 | About this manual INFICON 1 About this manual This document applies to the software version stated on the title page. Product names may occur in the document, which are added for identification purposes only and belong to the respective owner of the rights.
  • Page 9 INFICON About this manual | 1 Automatic tuning / mass setting This function adjusts the mass spectrometer so that a maximum leak rate indicator is achieved. In order to detect a maximum ion current with the ion detector, the control computer adjusts the voltage for accelerating the ions within the selected mass range accordingly.
  • Page 10 1 | About this manual INFICON Minimum detectable leak rate The minimum detectable leak rate which can be detected by the leak detector under ideal conditions (< 5 x 10 mbar l/s). MASSIVE After selecting the vacuum range "MASSIVE" gross leaks can now be measured from atmospheric pressure.

  • Page 11: Safety

    INFICON Safety | 2 2 Safety 2.1 Intended use The device is a leak detector for detecting and measuring leaks in test objects. The device is suitable for leak detection using the vacuum method and the sniffer method. • Operate the device only according to this instruction manual.
  • Page 12 2 | Safety INFICON • Operation without exhaust pipe in poorly ventilated rooms, depending on the type of gases used Note: This device is not intended to be used in living areas. 12 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

  • Page 13: Duties Of The Operator

    INFICON Safety | 2 2.2 Duties of the operator • Read, observe, and follow the information in this manual and in the work instructions provided by the owner. This concerns in particular the safety and warning instructions. • Always observe the complete operating instructions for all work.

  • Page 14: Dangers

    2 | Safety INFICON 2.4 Dangers The measuring instrument was built according to the state-of-the-art and the recognized safety regulations. Nevertheless, improper use may result in risk to life and limb on the part of the user or third parties, or damage to the unit or other property may occur.

  • Page 15: Scope Of Delivery, Transport, Storage

    Wrench T25 (UL3000 Fab PLUS only) Bracket for corrugated tube (UL3000 Fab PLUS only) Edge protection for holder (UL3000 Fab PLUS only) Self-tapping screws (UL3000 Fab PLUS only) In addition, 2 keys to open the jim-crow under the handle. ► Check the delivery contents after receiving the product to ensure it is complete.
  • Page 16 3 | Scope of delivery, transport, storage INFICON WARNING Risk of injury due to improper transport of a gas cylinder on the mobile leak detector ► When mounting the bottle holder on the leak detector, follow the sequence of action steps as described in the separate mounting instructions.
  • Page 17 INFICON Scope of delivery, transport, storage | 3 CAUTION Risk of injury due to limited parking brakes Without properly functioning parking brakes, unintentional movements of the device and injuries may occur. ► To ensure proper functioning of the parking brakes, remove the adhesive strips from the wheels.

  • Page 18: Description

    (which is sprayed over the specimen) can penetrate into the specimen if there is a leak. Helium can be detected in the leak detector using a mass spectrometer. HYDRO•S (only UL3000 Fab PLUS) With the operation mode "Vacuum" there is the possibility to use, HYDRO•S.

  • Page 19: Operation Mode "Sniffing

    To be able to inspect test objects under overpressure with a sniffer line you can connect the sniffer SL200. If you have a UL3000 Fab PLUS, you can also connect the SL3000 sniffer line instead of the SL200 sniffer line.

  • Page 20: Operation Mode "Auto Leak Test

    4 | Description INFICON End standby via a button on the sniffer probe Acknowledge calibration via a button on the sniffer probe 4.2.3 Operation mode “Auto Leak Test” In this mode, you can perform tests on hermetically sealed components with automated processing.

  • Page 21: Device Setup

    INFICON Description | 4 4.3 Device setup 4.3.1 Overall device Fig. 1: Front view UL3000-Fab-Operating-instructions-iina73en1-09-(2109) 21 / 152...
  • Page 22 4 | Description INFICON Fig. 2: Front view with open flap. 22 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)
  • Page 23 INFICON Description | 4 Fig. 3: Back view. The picture shows standard accessories and optional accessories. UL3000-Fab-Operating-instructions-iina73en1-09-(2109) 23 / 152...

  • Page 24: Control Unit

    4 | Description INFICON 4.3.2 Control unit Fig. 4: Control unit - front view The control unit consists of a touchscreen and a control panel with the buttons START, Stop and ZERO (background suppression) on the housing. See also "Assembly of the touchscreen [} 28]", see also "START button [} 25]".

  • Page 25: Start Button

    INFICON Description | 4 Fig. 5: Control unit - rear view HDMI interface • For connection to the HDMI interface of a touch monitor, maximum cable length 3 m. See also "Use external monitor [} 91]". 2 / 3 USB 2.0 Interfaces •...

  • Page 26: Stop Button

    4 | Description INFICON • If you press the START button on the control panel during measurement, the maximum leak rate display is updated. Function Touchscreen Control panel Starting START button Display maximum leak rate Cannot be operated Press the START button via touchscreen again.

  • Page 27: Meaning Of The Button Leds

    INFICON Description | 4 The actual measured leak rate is considered to be a background signal. Depending on the selected variant of operation mode the background signal is hidden until the display limit of the respective vacuum range is reached.

  • Page 28: Meaning Of The Status Led

    4 | Description INFICON 4.3.2.5 Meaning of the status LED The status LED is located on the back of the instrument inside of the connector block for the equipment and control signals, see also "Connections for accessories and control signals [} 32]”.
  • Page 29 Diagnosis Volume Navigation button HYDRO•S Information Measuring mode (UL3000 Fab PLUS) Navigation buttons The buttons can appear in five different colors: • Gray: Function is disabled • Dark blue: Function can be activated • Light blue: Function is active • Red: Error is active (navigation button diagnosis) •...

  • Page 30: Vacuum Connections

    4 | Description INFICON Call up help for the current function Confirm entry or selection Load Save Edit Copy Delete WLAN Next page Previous page Table 2: Function buttons Other symbols Authorization “User“ Authorization “Operator“ Authorization “Supervisor“ View the time or set the time See also "Overview of Rights Groups [} 52]".

  • Page 31: Exhaust

    INFICON Description | 4 4.3.3.2 Exhaust WARNING Danger of poisoning due to harmful gases Depending on the connected container and the gas contained therein, harmful gases can get into the ambient air via the exhaust filter of the leak detector.

  • Page 32: Connections For Accessories And Control Signals

    Connection exclusively for service, maximum*) cable length 3 m (shielded) Connection for mains cable To the power supply of the UL3000 Fab / UL3000 Fab Plus Venting connection For hoses with an outside diameter of 14 mm, see also “Venting connection [} 31]“...

  • Page 33: Markings On The Device

    Description | 4 4.3.5 Markings on the device Device cannot be scrapped with the normal domestic waste. 4.4 Technical specifications Mechanical data UL3000 Fab, UL3000 Fab PLUS Dimensions (L × W × H) 1050 mm × 472 mm × 990 mm Weight 118 kg...
  • Page 34 4 | Description INFICON Physical data UL3000 Fab, UL3000 Fab PLUS Minimum detectable leak rate, vacuum 5·10 mbar l/s mode Response time, blind-flanged < 1 s Maximum inlet pressure (Vacuum range Ambient pressure MASSIVE) Helium pumping speed (Vacuum range 4l/s ULTRA) Air pumping speed at the inlet...

  • Page 35: Factory Settings

    INFICON Description | 4 4.5 Factory settings Leak rate setpoint 1 1 x10 mbar l/s Leak rate setpoint 2 1 x10 mbar l/s Leak rate setpoint 3 1 x10 mbar l/s Leak rate setpoint 4 1 x10 mbar l/s Automatic purge...
  • Page 36 4 | Description INFICON Digital input pin 10 (IO1000) No function Machine factor vacuum mass 2 Machine factor vacuum mass 3 Machine factor vacuum mass 4 Leak rate filter I•CAL Cathode Cathode 1 auto (can only be changed by service) Lower pressure limit SL200 capillary 0.1 mbar...
  • Page 37 Analog Display background at standby Raise lower leak rate limit Minimum volume Note on the exhaust hose connection Activated HYDRO•S (only UL3000 Fab PLUS) Deactivated SL3000 in combination with UL3000 Fab PLUS only Sniffer line light alarm configuration Flashing Sniffer line light brightness...
  • Page 38 4 | Description INFICON Diagram type Line chart Line chart Scaling Logarithmic Decades Autoscale Lower diagram limit 1 × 10 Time axis 30 s Bar chart Scaling Logarithmic Decades Autoscale Lower diagram limit 1 × 10 Circle chart Decades Autoscale Lower diagram limit 1 ×...

  • Page 39: Installation

    INFICON Installation | 5 5 Installation 5.1 Setup DANGER Danger due to electric shock The mains cable connected at both ends may be damaged or the wall socket may be torn out if the leak detector is moved and the mains cable is tensioned as a result.
  • Page 40 5 | Installation INFICON WARNING Fire hazard due to overload, short circuit and overheating ► Observe the permissible ambient conditions. ► Ensure sufficient ventilation, especially on the ventilation slots on the left and right of the device: There should be free space in the front, to the rear and sides of the unit of at least 10 cm.
  • Page 41 INFICON Installation | 5 CAUTION Danger of bruising extremities Feet can be rolled over and crushed. ► Keep feet away from the rollers. ► Do not pull the device. ► Hold the device by the provided handle only and slide it.
  • Page 42 5 | Installation INFICON Observe the information on transporting the device, see also “Shipment, Transport, Storage“. Procedure • So that measurement results are not falsified, use in an area that has a constant ambient temperature if possible. • For proper functioning of wheels and brakes, remove the adhesive strips from the wheels.

  • Page 43: Connect The Supplied Accessories

    INFICON Installation | 5 5.2 Connect the supplied accessories Install the “Hook for power line and sniffer line” Scope of delivery (amount): Hook (4), screw M6 x 12 (4), lock washer S6 (4) Required tools (supplied): Wrench T30 • In order to be able to fix the mains cable and, if necessary, a sniffer line on the device, mount the hooks on the device as shown.
  • Page 44 5 | Installation INFICON Fig. 8: Hook at the instrument or at the optional bottle holder. 44 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)
  • Page 45 INFICON Installation | 5 Install the “Power line strain relief” Amount: Strain relief screw M6 x 12 lock washer S6 Required tools (supplied) Wrench T30 • To avoid the risk of tripping mount the “strain relief power supply” at the device.
  • Page 46 5 | Installation INFICON Install the "Bracket for corrugated tube” (UL3000 Fab PLUS only) Scope of delivery (amount): Holder complete (1x), screws M6 x 12 (3x), lock washer S6 (3x), self-tapping screws (2x) Required tools (supplied): Wrench T25 and T30 For fixing a corrugated hose between the inlet flange of the device and the test chamber or test object respectively.
  • Page 47 INFICON Installation | 5 Fig. 9: The bracket for corrugated tube is mounted. WARNING Shortening of the corrugated hose during evacuation A corrugated hose connected to the inlet is shortened during evacuation. ► Mount the corrugated hose in such a way that it cannot endanger the stability of the device or flake off when it is shortened.
  • Page 48 5 | Installation INFICON WARNING Danger of poisoning due to harmful gases Depending on the connected container and the gas contained therein, harmful gases can get into the ambient air via the exhaust filter of the leak detector. ► Make sure you have protection measure to prevent inhaling hazardous gases.

  • Page 49: Fastening Bracket For Sniffer Line Sl3000 (Accessory, Optional)

    INFICON Installation | 5 5.3 Fastening bracket for sniffer line SL3000 (accessory, optional) WARNING Risk of injury due to sniffer tip When stumbling, for example over lines, the sniffer tip can cause serious injuries, especially in eye contact. ► To avoid injury from the sniffer tip, align the sniffer tip in the bracket so that it points away from the operator.

  • Page 50: Connecting To The Power Supply System

    5 | Installation INFICON 5.4 Connecting to the power supply system WARNING Danger due to electric shock Improperly grounded or fused products may be dangerous to life in case of a fault. The use of the device is not permitted without a connected protective ground conductor.
  • Page 51 INFICON Installation | 5 ð After switching on pieces of status information are shown on the touchscreen about the speed of the turbo molecular pump, the foreline pressure, the emission and the active cathode. The start process takes about 3 minutes and is completed with a short acoustic signal.

  • Page 52: Operation

    6 | Operation INFICON 6 Operation 6.1 Basic settings You are able to save the actual settings of the device at any time, so that you can use them at a later time, see also "Saving and managing sets of parameters [} 88]".

  • Page 53: Select, Modify, Create User Profile

    INFICON Operation | 6 Supervisor Members of the group Supervisor have all the rights of groups User and Operator. Moreover, they can • Create/modify/delete operators, • Create/modify/delete supervisors, • Perform software updates, • Modify date/time. 6.1.3.2 Select, modify, create user profile ü...

  • Page 54: Modify Personal Settings

    6 | Operation INFICON Mueller Mueller Name User Group German Language User profile If the "PIN" field is not filled in or you want to change the content, enter a 4-digit PIN. To assign the required rights to the user, select a group. Via select between the groups User, Operator and Supervisor.

  • Page 55: Switch Off Automatic Login

    INFICON Operation | 6 6.1.4 Switch off Automatic Login Factory setting Login: Supervisor PIN: 1111 Language: English As per factory settings, after switching on the device the user "Supervisor" automatically logs in and the measurement screen is called. This default user also has the permissions of the group "Supervisor".

  • Page 56: Changing The Presentation Of The Line Graph

    6 | Operation INFICON To switch between the different diagram presentation press on the lower left of the measurement screen, see "Assembly of the touchscreen [} 28]”. You can select between the following presentations: • Line chart • Bar chart • Circle chart You can further configure the different diagram presentations.

  • Page 57: Changing The Presentation Of The Bar Graph

    INFICON Operation | 6 In the field "Time axis" select the length of the time axis "30", "60", "90", "120" or "240" seconds. If the option "Autoscale" is not active, select "Lower diagram limit" in the field the desired decade.

  • Page 58: Changing The Presentation Of The Circle Graph

    6 | Operation INFICON 6.1.6.3 Changing the presentation of the circle graph Fig. 12: Presentation of the circle graph ü Operator or Supervisor rights > Display > Circle chart If you want to fix the number of displayed decades in the pie chart, under "Decades“...
  • Page 59 INFICON Operation | 6 ð The internal background is created from the remaining gas, which has not yet been pumped out. Very clean systems show a background in the range of 1 x mbar l/s. Under normal conditions there is a background of 1 x 10 mbar l/s or 1x10 mbar l/s.

  • Page 60: Result Display Of The Auto Leak Test

    6 | Operation INFICON 6.1.7 Result display of the Auto Leak Test Supervisor 1 "Passed" or "Failed" as the result of the last test under "Part number". Test failed if the leak rate exceeds the setpoint. 2 Actual test time, within set limits, see “Set Auto Leak Test [} 68]“...

  • Page 61: Change Audio Settings

    INFICON Operation | 6 If necessary change the units of the "Leak rate unit vacuum", the "Leak rate unit sniff" and the "Pressure unit". ð The option “Equal to display “ is activated according to the factory settings so that the units for the interface can be shown exactly as the units of the device.

  • Page 62: Change The Protection Settings

    6 | Operation INFICON ð "Proportional leak rate": The frequency of the audible signal is proportional to the bar graph display or diagram height. The frequency range is 300Hz to 3300Hz. ð "PINPOINT": The sound of the acoustic signal changes its frequency within a specific range of leak rates.

  • Page 63: Set Maintenance Interval "Filter Sniffer Tip" Or "Air Filter

    INFICON Operation | 6 Note: The following setting does not apply if the vacuum range "Massive" is switched on. See also “Activate vacuum ranges [} 68]“: To change the maximum evacuation time after a gross leak is detected, enter the desired time in seconds under "Evacuation time gross leak".

  • Page 64: Activate Or Deactivate Maintenance Requests

    6 | Operation INFICON ð Enter a value of your choice in hours for the "Air filter" or press the adjacent "Default value" button (2500 hours). Save After performing a maintenance, you should reset the desired period until the next maintenance.

  • Page 65: Extending Or Reducing Operation Options

    INFICON Operation | 6 If the option "calibration request" is active, you will get a calibration request subsequently in the following cases: • The period of the device is longer than 30 minutes and the temperature deviation compared to the last calibration is larger than 5 Kelvin.

  • Page 66: Turn Notifications On Or Off

    6 | Operation INFICON Use Favorites: ► Press the icon with your permission and then the “Favorites” button or choose alternatively ► > User accounts > Favorites ð The Favorites window with 9 buttons is displayed. Assigned buttons can be used to quickly call up desired functions.

  • Page 67: Settings For The Measurements

    INFICON Operation | 6 6.2 Settings for the measurements 6.2.1 Select operation mode ü Operator or Supervisor rights > Operation mode Choose between “Vacuum”, “Sniff / SL200” or “Auto Leak Test”. For the UL3000 PLUS, "Sniff / SL3000" is also available.

  • Page 68: Activate Vacuum Ranges

    6 | Operation INFICON > Setpoints Adjust. Save 6.2.4 Activate vacuum ranges Vacuum ranges You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your measurements. All 4 areas can be activated at the same time. If several areas are activated, they switch automatically depending on the inlet pressure.

  • Page 69: Consider The Background Of The Test Chamber

    6.2.6.1 Set HYDRO•S (UL3000 Fab PLUS) In addition to the basic setting described here, the availability of HYDRO•S depends on additional requirements, such as the selected operation mode and the operating state, see “Use HYDRO•S (UL3000 Fab PLUS) [} 70]”. ü Supervisor rights >...

  • Page 70: Use Hydro•S (Ul3000 Fab Plus)

    “Calibrating [} 78]”. 6.2.6.2 Use HYDRO•S (UL3000 Fab PLUS) HYDRO•S manual ü HYDRO•S is set to “Manual”, see “Set HYDRO•S (UL3000 Fab PLUS) [} 69]”. ü Gas type helium (mass 4) is selected, see Select gas [} 67]. ü Operation mode “Vacuum” is active.

  • Page 71: Set External Calibration Leak

    INFICON Operation | 6 The machine factor can also be used to correct the leak rate display with respect to the air equivalence. The machine factor for this correction is 0.37. ü Operator or Supervisor rights ü The operation mode "Vacuum" is set.

  • Page 72: Set And Use The Function Zero

    6 | Operation INFICON To restore the factory settings for air after a change by pressing a key, press the "Air default" button. ð All factory settings for air are set. ð If required, you can set the pressure limits individually. See also "Factory settings [} 35]".

  • Page 73: Vent, Purge, Regenerate

    INFICON Operation | 6 How do I switch the Briefly press the ZERO button on the control panel or the touchscreen ZERO function ON? How do I switch the Press the ZERO button on the control panel for more than 2 seconds or on the...
  • Page 74 6 | Operation INFICON ð Option activated: The inlet is ventilated only very slowly. This can be useful to avoid a strong flow in the test object, which could possibly entrain particles. ð Option deactivated: Factory setting Save Purge By activating the flushing function (with dry backing pumps), a small gas flow is let into the backing pump in the "standby"...

  • Page 75: Change Leak Rate Filter

    INFICON Operation | 6 ð You can start the regeneration in the opened window and stop it as desired or wait for the automatic deactivation of the regeneration after 60 minutes. 6.2.12 Change leak rate filter The leak rate filter “I•CAL” is preset. I•CAL ensures that the averaging time is optimally adapted to the leak rate range.

  • Page 76: Determine The Background Of The Inlet Area

    6 | Operation INFICON must not have been open during this time. If you want to make sure that a current internal ground is used in the following measuring operation, do not press START, until the background display in standby has changed from low opacity (grayed out) to normal opacity.

  • Page 77: Change Sl3000 Settings For Sound / Light (Ul3000 Fab Plus Only)

    INFICON Operation | 6 6.2.14 Change SL3000 settings for sound / light (UL3000 Fab PLUS only) You can set up how you are to be additionally informed on the display of the touchscreen concerning the measurements. The settings take effect with Setpoint 1.

  • Page 78: Calibrating

    6 | Operation INFICON 6.2.16 Calibrating In order to be able to measure leak rates correctly, the leak detector has to be adjusted at regular intervals by calibration. The mass spectrometer is adjusted automatically. You can perform the calibration using the device internal calibration leak or using an external calibration leak.

  • Page 79: Check Calibration

    INFICON Operation | 6 Follow the instructions on the screen. 6.2.16.3 Check calibration The calibration can also be checked without changing calibration factor. This tells you whether a new calibration is necessary. ü User rights ü The device is in "Standby" or "Measure" mode.

  • Page 80: Measuring

    Record the measured values if necessary, see "Switch on data recording and configure export [} 81]" and "Assembly of the touchscreen [} 28]". Switch the instrument off. See also 2 Use HYDRO•S (UL3000 Fab PLUS) [} 70] 2 Change general display settings [} 58] 80 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

  • Page 81: Measuring Helium Ambient Concentration (Ul3000 Fab Plus Only)

    INFICON Operation | 6 6.4 Measuring helium ambient concentration (UL3000 Fab PLUS only) The natural content of helium in the ambient air is about 5.2 ppm. You can examine the ambient air for an increased helium content (helium contamination) to determine the appropriate time for further measurements.

  • Page 82: Display Measurement Cycles

    6 | Operation INFICON > Setup > Data recording To record immediately after starting a measurement, activate the option "Enabled". Note: Data recording occurs during the measurements, i.e. while the measurement screen is displayed. See also "Display measurement cycles [} 82]".

  • Page 83: Export Measurement Data Via Network

    INFICON Operation | 6 ð Alternatively, you can edit "Free text 1" and "Free text 2" from the "Measurement cycles" window. Select an entry by tapping on it and press To change the displayed period in the detailed view on the chart, swipe to the right or left on the display.

  • Page 84: Measurement Data Database: Information

    6 | Operation INFICON When accessing via LAN, use the IP address found under > Device > Network. When accessing via WLAN, use the URL found under > Setup > Network > WLAN. Example 1: http://192.168.11.124:3000/md?f=csv_en&c=4&d=mr Returns measured values and metadata of the measurement cycle with ID 4 in the format “csv_en”.

  • Page 85: Information

    INFICON Operation | 6 If storage is needed for the recording and the maximum database size (in measurement values) has been exceeded, the oldest records are automatically deleted so that 5% of the specified capacity is freed for new data.

  • Page 86: Retrieve Information About The Device

    6 | Operation INFICON ► > Accessories > Bus module ð If a bus module is connected, you will find details. 6.6.4 Retrieve information about the device Diverse information on the device is shown: Software and serial numbers, network information and operating hours.

  • Page 87: Call Information On The Hydro•S (Ul3000 Fab Plus Only)

    INFICON Operation | 6 ► > Energy > Power 6.6.7 Call information on the HYDRO•S (UL3000 Fab PLUS only) The internal parameters for HYDRO•S are displayed. ► > HYDRO•S 6.6.8 Call information on the SL3000 Sniffer line (UL3000 Fab PLUS only) ►...

  • Page 88: Device Settings

    6 | Operation INFICON 6.8 Device settings 6.8.1 Viewing and customizing individual parameters You are able to get a quick overview of the actual settings of the device and you can make modifications, if needed. ü You have the required right to change the specific parameter.

  • Page 89: Exporting Or Importing Sets Of Parameters

    INFICON Operation | 6 , to activate a set of parameters. , to delete a set of parameters. 6.8.3 Exporting or importing sets of parameters You are able to transfer saved sets of parameters from the internal memory to an attached USB flash drive and to import the sets again.

  • Page 90: Update The User Interface Software

    6 | Operation INFICON 6.9.1 Update the user interface software Import software updates using a USB flash drive. NOTICE Loss of data due to disconnection ► Do not switch off the device and do not remove the USB flash drive while the software is being updated.

  • Page 91: Update The Software In Expert Mode

    INFICON Operation | 6 ð After completion there is an automatic restart of the system. 6.9.3 Update the software in expert mode ü Supervisor rights > Update > Update operating unit/basic unit > Operating unit expert update ð Software versions already available on the device are shown in a list.

  • Page 92: Switch Back To The Internal Monitor

    6 | Operation INFICON 6.10.1 Switch back to the internal monitor NOTICE Disconnect external monitor ► If the device is turned on, switch to the internal monitor in the menu before disconnecting the connections of an external monitor. When the instrument is switched on, you will be able to switch to internal monitor at any time.

  • Page 93: Resetting To Factory Settings

    4 V1 … V8: Solenoid valves for 8 Fore pump controlling gas flows UL3000 Fab PLUS Fig. 14: The most important components of the vacuum diagram in UL3000 Fab PLUS devices 1 Inlet flange 6 Turbo molecular pump 2 p1 … p4: Pressure measuring...

  • Page 94: Logging Off From The Device

    6 | Operation INFICON Loss of settings and measurement data After resetting to factory settings only the manufacturer factory settings are in the memory of the device. The software of the device is not reset when restoring the factory settings.

  • Page 95: Warning And Error Messages

    INFICON Warning and error messages | 7 7 Warning and error messages During operation, the display shows information that helps you operate the device. Measurement values are displayed along with current device modes, operating instructions as well as warnings and error messages. The device is equipped with extensive self-diagnostic functions.

  • Page 96: Warning And Error Messages Ul3000/Ul6000

    7 | Warning and error messages INFICON 7.1 Warning and error messages UL3000/UL6000 Type Notification Possible sources of Remedy error W102 Timeout during The EEPROM on the • Contact customer service communication with VI-Board is defective or EEPROM on VI-Board...
  • Page 97 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W110 Real-time clock was reset! The real-time clock has • Enter the correct date and time Enter date and time not been set • Check that the message does not appear...
  • Page 98 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W125 I/O module no longer Connection to I/O • Check the connection to the I/O module connected module interrupted • Replace the connection cable to the I/O...
  • Page 99 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W153 Operating unit software A more up-to-date • Contact the customer service for the version is obsolete operating unit software latest operating unit software is available. For...
  • Page 100 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W211 5V internal supply voltage Short circuit or • Contact customer service out of range overload in the internal 5V supply W212 5V sniffer line supply voltage Sniffer line defective •...
  • Page 101 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W224 Internal voltage Short circuit or • Contact customer service 24V_PRESSURE (Pirani) overload in the voltage out of range 24V_PRESSURE (Pirani) supply W240 Voltage +15V out of range Short circuit at •...
  • Page 102 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W302 Suppressor voltage too low Short circuit of • Contact customer service suppressor or preamplifier VI-Board or MSB • Contact customer service defective W303 Suppressor voltage too high MSB defective •...
  • Page 103 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E340 Emission error Pressure too high with • Contact customer service aged cathode W342 Cathodes not connected Both cathodes • Contact customer service defective during self-...
  • Page 104 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E404 TMP current consumption Pressure in the TMP is • Contact customer service too high too high W405 No TMP run-up Inlet pressure during • Check that the backing pump is working...
  • Page 105 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E451 Temperature prewarning of The ambient • Reduce the temperature in the backing pump temperature is too high environment where the device is located Ambient temperature is •...
  • Page 106 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E457 Fault in backing pump: The backing pump in • Make sure that you use the supplied Power failure the leak detector has a power cord faulty mains input •...
  • Page 107 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E463 Temperature error of The ambient • Reduce the temperature in the backing pump temperature is too high environment where the device is located Fan blocked or •...
  • Page 108 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E504 Pressure sensor p3 not Pressure sensor not • Contact customer service connected connected or cable defective VI-Board or MSB • Contact customer service defective E505...
  • Page 109 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W542 Flow through capillary too Capillary broken or • Use another sniffer line, if possible high leaky • Contact customer service The pressure limit for a •...
  • Page 110 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W630 Calibration request Operation mode or • Perform a calibration mass has changed HYDRO•S has been • Perform a calibration switched on (if function available) Auto Leak Test is •...
  • Page 111 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W710 MSB temperature is too high The ambient • Reduce the temperature in the temperature is too high environment where the device is located Air filter dirty •...

  • Page 112: Cleaning And Maintenance

    8 | Cleaning and maintenance INFICON 8 Cleaning and maintenance All cleaning and maintenance work described here must be carried out without opening the device! DANGER Risk of death from electric shock There are high voltages inside the device. Touching parts where electrical voltage is present can result in death.

  • Page 113: Replacement Of The Filter Mat On The Bottom Of The Device

    INFICON Cleaning and maintenance | 8 Remove the used air filter from the plastic grid and insert a new one. Refit the plastic grid together with the new air filter. 8.3 Replacement of the filter mat on the bottom of...
  • Page 114 8 | Cleaning and maintenance INFICON Loosen the screws, which fix the filter mat on the metal sheet. Replace the filter mat. Secure the filter mat with the screws, insert the metal sheet and fix it with the knurled screw.

  • Page 115: Replacing The Sl200 Sniffer Line Filter

    INFICON Cleaning and maintenance | 8 8.4 Replacing the SL200 sniffer line filter Structure of the sniffer Fig. 15: Sniffer tip 1 Capillary filter (plastic; standard) 4 Cross-head screws 2 Felt pads 5 Sinter filter 3 Capillary filter (metal with gasket;...

  • Page 116: Replacing The Sl3000 Sniffer Line Filter

    8 | Cleaning and maintenance INFICON • Unscrew the capillary filter and replace it with a new one. Do not forget the gasket for the metal version! Check or replace the Switch off the leak detector or disconnect the sniffer line from the device.
  • Page 117 INFICON Cleaning and maintenance | 8 Table 3: Capillary filter 1 Sniffer line end 4 Plastic capillary filter 2 cone seal 5 Water conservation tip 3 Metal capillary filter Capillary filter and water conservation tip are screwed onto the sniffer line end. The filter inserts are inserted and lie in front of a small metal grill that is also inserted.

  • Page 118: Creating Screenshots

    8 | Cleaning and maintenance INFICON If you have activated the display of maintenance requests, set the maintenance interval to the desired new period. Also see "Activate or deactivate maintenance requests [} 64] " and "Set maintenance interval "Filter sniffer tip" or "Air filter"...

  • Page 119: Sending For Repair Or Maintenance

    Maintenance inside the device should only be performed by the manufacturer. We recommend having the device serviced every 4000 hours or annually. You can send in your device to INFICON so it can be maintained or repaired. For further details see "Sending in the device [} 121]”.

  • Page 120: Maintenance Plan

    • I Service level I Customer legend • II Service level II Customer with technical training • III Service level III Authorized INFICON service technician • X Carry out maintenance as per operating hours or duration • X No time limit only operating hours •...

  • Page 121: Decommissioning The Measuring Instrument

    INFICON Decommissioning the measuring instrument | 9 9 Decommissioning the measuring instrument 9.1 Disposing of the device The device can either be disposed of by the operator or be sent to the manufacturer. The device consists of materials that can be recycled. This option should be exercised to prevent waste and also to protect the environment.
  • Page 122 9 | Decommissioning the measuring instrument INFICON 122 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

  • Page 123: Accessories And Interfaces

    Cable extension for the electrical connection of the SL200 551-205 SL200 sniffer line and cable extension for the electrical 551-210 connection (set) SL3000 sniffer line for UL3000 Fab PLUS SL3000-3, sniffer line 3 m length 525-001 SL3000-5, sniffer line 5 m length 525-002...
  • Page 124 10 | Accessories and interfaces INFICON Sniffer tip, rigid, 500 mm. 45° angled(ST 500) 12272 124 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)
  • Page 125 INFICON Accessories and interfaces | 10 Further accessories for the SL3000 Felt For Capillary Filter SL3xx, 50 pc. 200001116 Capillary filter, metal(1 unit) 12217 Capillary Filter SL 300, set 5 pieces(Plastic capillary filter) 20003501 Intern Filter For SL3XX (5/PKG)(Sinter-filter with O-Ring)
  • Page 126 10 | Accessories and interfaces INFICON Helium bottle holder The Helium bottle holder allows the transport of a Helium supply with a spray gun along with the leak detector. Only small to medium size bottles (max. 10 I, 200 bar) fit without compromising the stability of the device.
  • Page 127 Search for the wireless remote control from the leak detector If you have misplaced the RC1000WL wireless remote control, you can trigger acoustic signals from the UL3000 Fab or the UL3000 Fab PLUS from this remote control. > Setup > Accessories > RC1000 Select the setting “ON”...
  • Page 128 10 | Accessories and interfaces INFICON Fig. 22: Test chamber TC1000 128 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

  • Page 129: I/O Module

    ü Supervisor rights Connect the INFICON I/O module with a data cable to the LD socket on the rear of the device, see "Connections for accessories and control signals [} 32]". > Setup > Accessories > Device selection Select the "IO module".
  • Page 130 10 | Accessories and interfaces INFICON Pressure p1 / Pressure 1 ... 10 V; 0.5 V / decade; logarithmic 1 V = 1 x 10 mbar Leak rate mantissa 1 ... 10 V; linear; in the Useful only if the other analog output is assigned selected unit "Leak rate exponent".

  • Page 131: Configure Digital Inputs

    INFICON Accessories and interfaces | 10 Leak rate log. 0 ... 10 V; logarithmic; The upper limit (= 10 V) and the scale (V / decades) are set via the parameters "Exponent upper limit" and in the selected unit "Analog output scaling".

  • Page 132: Configuring Digital Outputs

    10 | Accessories and interfaces INFICON ð The modes "Standard" or the mode "Inverse" are available for selection. To mode "Inverse": In the following table overview, the arrow pointing the transfer direction in the column "Transition" must be reversed. Save...
  • Page 133 INFICON Accessories and interfaces | 10 Function State: Description Off (open) open: always open Ready for operation closed: Emission switched on, calibration process inactive, no error open: Emission switched off or calibration process active or error Emission on closed: Emission switched on...

  • Page 134: Setting Up The I/O Module Protocol

    This also includes the GSD file for PROFIBUS, which is located in the “..\Manuals\Interface Description“ folder. For the different bus modules from INFICON see also “Accessories and spare parts [} 123]“. 134 / 152...

  • Page 135: Creating A Connection Between The Device And The Bus Module

    To establish the connection between the leak detector and the bus module, proceed as follows: Switch off the leak detector. Connect the INFICON bus module via a data cable to the LD socket of the device, see “Connections for accessories and control signals [} 32]“. Switch on the leak detector.

  • Page 136: Network

    10 | Accessories and interfaces INFICON 10.4 Network 10.4.1 Operate leak detector via web browser (LAN) NOTICE Operating system can be attacked via USB or Ethernet The Linux operating system used in the leak testing is not updated automatically and can therefore contain security gaps.

  • Page 137: Setting The Lan Connection In The Pc Or Tablet

    INFICON Accessories and interfaces | 10 10.4.1.2 Setting the LAN connection in the PC or Tablet LAN connection - quick start If you have performed the steps described here once, it is sufficient to enter the IP address for many devices in case of repetition.

  • Page 138: Operate Leak Detector Via Web Browser (Wireless Lan)

    10 | Accessories and interfaces INFICON 10.4.2 Operate leak detector via web browser (wireless LAN) NOTICE Operating system can be attacked via USB or Ethernet The Linux operating system used in the leak testing is not updated automatically and can therefore contain security gaps. This vulnerability may be exploited through the Ethernet and USB interfaces of the leak testing to provide unauthorized access to the system.

  • Page 139: Setting The Wireless Lan Connection In The Pc Or Tablet

    INFICON Accessories and interfaces | 10 To set-up that the device supports the WLAN connection activate the option "Enable Wireless LAN". In the field “WiFi Name (SSID)” enter the desired network name and in the field “WiFi Network key” the desired Network key.

  • Page 140: Allow Client Access

    10 | Accessories and interfaces INFICON 10.4.2.3 Allow client access ü Supervisor rights > Setup > Network > Client access To allow the leak detector to be operated by PC or Tablet, activate the "Client Access" option. ð If the option "Client Access" is not activated, the leak detector cannot be operated via PC or Tablet.

  • Page 141: Appendix

    INFICON Appendix | 11 11 Appendix 11.1 Menu path Pressing the navigation button brings you back to the measurement display regardless of whether you were previously in a menu or sub-menu. 11.1.1 Diagnostics > Confirmed warnings ð Can only be seen when active.
  • Page 142 11 | Appendix INFICON > User accounts > Log off > User accounts > Manage Automatic Login > User accounts > Manage user accounts > User accounts > Change own PIN > User accounts > Change own language > User accounts > Favorites >...

  • Page 143: Information

    INFICON Appendix | 11 > Setup > Accessories > I/O module > Configuration of digital outputs > Setup > Accessories > I/O module > Configuration of digital Inputs > Setup > Accessories > RC1000 > Parameter sets > Parameter list >...

  • Page 144: Ce Declaration Of Conformity

    11 | Appendix INFICON 11.2 CE Declaration of Conformity 144 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)
  • Page 145 INFICON Appendix | 11 UL3000-Fab-Operating-instructions-iina73en1-09-(2109) 145 / 152...

  • Page 146: Rohs

    11 | Appendix INFICON 11.3 RoHS 146 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

  • Page 147: Index

    INFICON Index Index Display runtimes  85 Display temperature value  85 Access controls  52 Auto Leak Test Operation mode (Definition)  20 Evacuation time gross leak  63 Result display  60 Evacuation time measurements  63 Select operation mode  67 Exhaust  31 Settings  68...
  • Page 148 Index INFICON Pressure monitoring  77 Replacing the filter  115 Note on the exhaust hose connection  66 Sniffer line SL200  125 Sniffer line SL3000  125 Software Update basic unit  90 Operating options  65 User interface update  90 Operation Supervisor  53, 55 PC, Tablet  139...
  • Page 149 INFICON Index Configure leak detector  138 Settings PC or tablet  139 ZERO  80 Button  26 Factory setting  72 UL3000-Fab-Operating-instructions-iina73en1-09-(2109) 149 / 152...
  • Page 150 Index INFICON 150 / 152 UL3000-Fab-Operating-instructions-iina73en1-09-(2109)

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