Inficon UL6000 Fab Translation Of The Original Operating Instructions
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Inficon UL6000 Fab Translation Of The Original Operating Instructions

Helium leak detector with ultratest sensor technology
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Translation of the original operating instructions
UL6000 Fab
Helium Leak Detector with ULTRATEST
Catalog No.
550-520
From software version
1.51 (Operating unit)
™
Sensor Technology
iina75en1-04-(2109)

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Summary of Contents for Inficon UL6000 Fab

  • Page 1 Translation of the original operating instructions UL6000 Fab ™ Helium Leak Detector with ULTRATEST Sensor Technology Catalog No. 550-520 From software version iina75en1-04-(2109) 1.51 (Operating unit)
  • Page 2 INFICON GmbH Bonner Strasse 498 50968 Cologne, Germany...

  • Page 3: Table Of Contents

    INFICON Table of contents Table of contents 1 About this manual............................. 8 1.1 Target groups ............................ 8 1.2 Warnings.............................. 8 1.3 Definition of terms............................. 8 2 Safety ................................ 11 2.1 Intended use ............................ 11 2.2 Duties of the operator .......................... 13 2.3 Owner requirements .......................... 13 2.4 Dangers .............................. 14 3 Scope of delivery, transport, storage...................... 15...
  • Page 4 Table of contents INFICON 5.2 Connect the supplied accessories ...................... 44 5.3 Fastening bracket for sniffer line SL3000 (accessory, optional) ............. 48 5.4 Connecting to the power supply system .................... 49 5.5 Checking the operation of the device ..................... 49 6 Operation................................ 51 6.1 Switching on ............................ 51 6.2 Basic settings............................ 52...
  • Page 5 INFICON Table of contents 6.3.6.1 Set HYDRO•S ........................ 66 6.3.6.2 Use HYDRO•S ........................ 67 6.3.7 Setting the machine factor ...................... 67 6.3.8 Set external calibration leak...................... 68 6.3.9 Change pressure limits .......................  68 6.3.10 Set and use the function ZERO .................... 69 6.3.11 Vent, purge, regenerate ......................
  • Page 6 Table of contents INFICON 6.8.4 Call maintenance log ........................ 84 6.9 Device settings ............................ 85 6.9.1 Viewing and customizing individual parameters .................  85 6.9.2 Saving and managing sets of parameters ..................  85 6.9.3 Exporting or importing sets of parameters ..................  86 6.10 Updating the software.......................... 86...
  • Page 7 INFICON Table of contents 10.2.3 Configure digital inputs ...................... 126 10.2.4 Configuring digital outputs ...................... 127 10.2.5 Setting up the I/O module protocol ...................  129 10.3 Bus module............................ 130 10.3.1 Creating a connection between the device and the bus module .......... 130 10.3.2 Setting a bus module address ....................

  • Page 8: About This Manual

    1 | About this manual INFICON 1 About this manual This document applies to the software version stated on the title page. Product names may occur in the document, which are added for identification purposes only and belong to the respective owner of the rights.
  • Page 9 INFICON About this manual | 1 Automatic tuning / mass setting This function adjusts the mass spectrometer so that a maximum leak rate indicator is achieved. In order to detect a maximum ion current with the ion detector, the control computer adjusts the voltage for accelerating the ions within the selected mass range accordingly.
  • Page 10 1 | About this manual INFICON Minimum detectable leak rate The minimum detectable leak rate that can be detected by the leak detector under ideal conditions. MASSIVE After selecting the vacuum range "MASSIVE" gross leaks can now be measured from atmospheric pressure.

  • Page 11: Safety

    INFICON Safety | 2 2 Safety 2.1 Intended use The device is a leak detector for detecting and measuring leaks in test objects. The device is suitable for leak detection using the vacuum method and the sniffer method. • Operate the device only according to this instruction manual.
  • Page 12 2 | Safety INFICON • Operation without exhaust pipe in poorly ventilated rooms, depending on the type of gases used Note: This device is not intended to be used in living areas. 12 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)

  • Page 13: Duties Of The Operator

    INFICON Safety | 2 2.2 Duties of the operator • Read, observe, and follow the information in this manual and in the work instructions provided by the owner. This concerns in particular the safety and warning instructions. • Always observe the complete operating instructions for all work.

  • Page 14: Dangers

    2 | Safety INFICON 2.4 Dangers The measuring instrument was built according to the state-of-the-art and the recognized safety regulations. Nevertheless, improper use may result in risk to life and limb on the part of the user or third parties, or damage to the unit or other property may occur.

  • Page 15: Scope Of Delivery, Transport, Storage

    Scope of delivery, transport, storage | 3 3 Scope of delivery, transport, storage Scope of delivery Item Quantity UL6000 Fab Mains connection cable (country-specific) Exhaust hose adapter ISO-KF flange DN25 Power cable strain relief (Pipe and bracket clamp) Screws M6x12...
  • Page 16 3 | Scope of delivery, transport, storage INFICON WARNING Risk of injury due to improper transport of a gas cylinder on the mobile leak detector ► When mounting the bottle holder on the leak detector, follow the sequence of action steps as described in the separate mounting instructions.
  • Page 17 INFICON Scope of delivery, transport, storage | 3 CAUTION Risk of injury due to limited parking brakes Without properly functioning parking brakes, unintentional movements of the device and injuries may occur. ► To ensure proper functioning of the parking brakes, remove the adhesive strips from the wheels.

  • Page 18: Description

    4 | Description INFICON 4 Description 4.1 Function The device is a leak detector for detecting and measuring leaks in test objects. The device is suitable for leak detection using the vacuum method and the sniffer method. It uses the ULTRATEST sensor technology.

  • Page 19: Operation Mode "Sniffing

    INFICON Description | 4 4.2.2 Operation mode "Sniffing" To scan test objects under overpressure with a sniffer probe, you can connect the SL200 sniffer line or the SL3000 sniffer line. SL200 The vacuum connection of the sniffer line SL200 is connected to the upper side of the device on the inlet flange.
  • Page 20 4 | Description INFICON Acknowledge calibration via a button on the sniffer probe 20 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)

  • Page 21: Design Of Device

    INFICON Description | 4 4.3 Design of device 4.3.1 Overall device Fig. 1: Front view UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 21 / 146...
  • Page 22 4 | Description INFICON Fig. 2: Front view with open flap. 22 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)
  • Page 23 INFICON Description | 4 Fig. 3: Back view. The picture shows standard accessories and optional accessories. UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 23 / 146...

  • Page 24: Control Unit

    4 | Description INFICON 4.3.2 Control unit Fig. 4: Control unit - front view The control unit consists of a touchscreen and a control panel with the buttons START, Stop and ZERO (background suppression) on the housing. Also see "Design of touchscreen [} 28] " and "START button [} 25]".

  • Page 25: Start Button

    INFICON Description | 4 Fig. 5: Control unit - rear view 1 HDMI interface • For connection to the HDMI interface of a touch monitor, maximum cable length 3 m. See also "Use external monitor [} 88]". 2 / 3 USB 2.0 Interfaces •...

  • Page 26: Stop Button

    4 | Description INFICON • If you press the START button on the control panel during measurement, the maximum leak rate display is updated. Function Touchscreen Control panel Starting START button Display maximum leak rate Cannot be operated Press the START button via touchscreen again.

  • Page 27: Meaning Of The Button Leds

    INFICON Description | 4 The actual measured leak rate is considered to be a background signal. Depending on the selected variant of operation mode the background signal is hidden until the display limit of the respective vacuum range is reached.

  • Page 28: Meaning Of The Status Led

    4 | Description INFICON 4.3.2.5 Meaning of the status LED The status LED is located on the back of the instrument inside of the connector block for the equipment and control signals, see also "Connections for accessories and control signals [} 33]”.
  • Page 29 INFICON Description | 4 Previous page Measurement value Access control Leak rate Next page Navigation button WLAN User name Max. Settings Navigation button Leak rate Operation Supervisor Measurement value Inlet pressure ZERO Setpoints ZERO Switching: Line chart Bar chart ULTRA...

  • Page 30: Vacuum Connections

    4 | Description INFICON Call up help for the current function Confirm entry or selection Load Save Edit Copy Delete WLAN Page forward Page back Table 2: Function buttons Other symbols Authorization “User“ Authorization “Operator“ Authorization “Supervisor“ View the time or set the time See also "Overview of Rights Groups [} 52]".

  • Page 31: Exhaust

    INFICON Description | 4 NOTICE If you use a filter, for example a centering ring with wire mesh, to prevent dust or dirt accumulation at the inlet of the leak detector: ► Note that ice can form on filters due to condensation of water vapor. This can lead to property damage.

  • Page 32: Venting Connection

    4 | Description INFICON 4.3.3.4 Venting connection Normally, the specimens are vented with ambient air after completion of the test. If necessary, the test specimens can be ventilated with another gas (e.g. fresh air, dry air, nitrogen, etc.) via the ventilation connection. The pressure at the ventilation connection must not exceed the atmospheric pressure by more than 100 mbar.

  • Page 33: Connections For Accessories And Control Signals

    INFICON Description | 4 4.3.4 Connections for accessories and control signals SNIFFER Power switch ACCESSORIES Connection for mains cable Venting connection REMOTE CONTROL SERVICE Purge gas connection Fig. 6: Connections for accessories and control signals SNIFFER For connecting the sniffer line SL3000...

  • Page 34: Markings On The Device

    4 | Description INFICON 4.3.5 Markings on the device Device cannot be scrapped with the normal domestic waste. 4.4 Technical data Mechanical data UL6000 Fab Dimensions (L × W × H) 1050 mm × 472 mm × 1040 mm Mass 143 kg Inlet flange...
  • Page 35 INFICON Description | 4 Physical data UL6000 Fab Minimum detectable leak rate, vacuum < 5 x 10 mbar l/s mode Response time, blind-flanged < 1 s Response time, 50 l volume ~ 1.4 s Maximum inlet pressure (Vacuum range Ambient pressure MASSIVE) Helium suction capacity (vacuum range >...

  • Page 36: Factory Settings

    4 | Description INFICON UL6000 Fab Ambient temperature **) +10°C … +40°C Degree of contamination ***) **) Measuring condition for 40°C ambient temperature: Measuring mode ULTRA, gas load 35 sccm ***) According to DIN EN 61010-1: Only non-conductive contamination. Occasionally, temporary conductivity may occur due to condensation.
  • Page 37 INFICON Description | 4 Digital input pin 3 (IO1000) START Digital input pin 4 (IO1000) Stop Digital input pin 5 (IO1000) ZERO Digital input pin 6 (IO1000) Digital input pin 7 (IO1000) Clear Digital input pin 8 (IO1000) Purge Digital input pin 9 (IO1000)
  • Page 38 4 | Description INFICON Amplifier test during calibration On (can only be changed by service) Alternating preamplifier ranges monitoring On (can only be changed by service) Lower pressure limit SL3000 capillary 80 mbar clogged Upper pressure limit SL3000 capillary 200 mbar broken Pressure limit MASSIVE ->...
  • Page 39 INFICON Description | 4 Note on the exhaust hose connection Activated Set maintenance interval Sniffer tip filter 1000 h Air filter 2500 h Set user Name Supervisor 1111 Language English Diagram type set Line chart Line chart Scaling Logarithmic Decades Autoscale Lower diagram limit 1 ×...

  • Page 40: Installation

    5 | Installation INFICON 5 Installation 5.1 Setup DANGER Danger due to electric shock The mains cable connected at both ends may be damaged or the wall socket may be torn out if the leak detector is moved and the mains cable is tensioned as a result.
  • Page 41 INFICON Installation | 5 WARNING Fire hazard due to overload, short circuit and overheating ► Observe the permissible ambient conditions. ► Ensure sufficient ventilation, especially on the ventilation slots on the left and right of the device: There should be free space in the front, to the rear and sides of the unit of at least 10 cm.
  • Page 42 5 | Installation INFICON CAUTION Danger of bruising extremities Feet can be rolled over and crushed. ► Keep feet away from the rollers. ► Do not pull the device. ► Hold the device by the provided handle only and slide it.
  • Page 43 INFICON Installation | 5 Observe the information on transporting the device, see also “Scope of delivery, transport, storage [} 15]“. Procedure • So that measurement results are not falsified, use in an area that has a constant ambient temperature if possible.

  • Page 44: Connect The Supplied Accessories

    5 | Installation INFICON 5.2 Connect the supplied accessories Install the “Hook for power line and sniffer line” Scope of delivery (amount): Hook (4x), screw M6 x 12 (4x), lock washer S6 (4x) Required tools (supplied): Wrench T30 (Torx) • In order to be able to fix the mains cable and, if necessary, a sniffer line on the device, mount the hooks on the device as shown.
  • Page 45 INFICON Installation | 5 Fig. 8: Hook at the instrument or at the optional bottle holder. UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 45 / 146...
  • Page 46 5 | Installation INFICON Install the “Power line strain relief” Scope of delivery (amount): Strain relief (1x), screw M6 x 12 (1x), lock washer S6 (1x) Required tools (supplied): Wrench T30 (Torx) • To avoid the risk of tripping mount the “strain relief power supply” at the device.
  • Page 47 INFICON Installation | 5 Mounting the exhaust hose adapter on the device • To discharge gases through a DN25 exhaust hose, mount the KF flange DN25 exhaust hose adapter supplied in the exhaust port on the rear of the device. To seal the exhaust hose adapter, use Teflon tape.

  • Page 48: Fastening Bracket For Sniffer Line Sl3000 (Accessory, Optional)

    5 | Installation INFICON 5.3 Fastening bracket for sniffer line SL3000 (accessory, optional) WARNING Risk of injury due to sniffer tip When stumbling, for example over lines, the sniffer tip can cause serious injuries, especially in eye contact. ► To avoid injury from the sniffer tip, align the sniffer tip in the bracket so that it points away from the operator.

  • Page 49: Connecting To The Power Supply System

    INFICON Installation | 5 5.4 Connecting to the power supply system DANGER Danger due to electric shock Improperly grounded or fused products may be dangerous to life in case of a fault. The use of the device is not permitted without a connected protective ground conductor.
  • Page 50 5 | Installation INFICON ð After switching on pieces of status information are shown on the touchscreen about the speed of the turbo molecular pump, the foreline pressure, the emission and the active cathode. The start process takes about 3 minutes and is completed with a short acoustic signal.

  • Page 51: Operation

    INFICON Operation | 6 6 Operation 6.1 Switching on NOTICE Damage to the backing pump due to cold ambient temperature If the ambient temperature is below 10 °C, the device will show a warning on the display after switching on. It is possible to start up the device anyway by confirming this message.

  • Page 52: Basic Settings

    6 | Operation INFICON 6.2 Basic settings 6.2.1 Set language on the user interface You can set the language in the user settings, see "Select, modify, create user profile [} 53]". 6.2.2 Setting date, time and time zone ü Supervisor rights >...

  • Page 53: Select, Modify, Create User Profile

    INFICON Operation | 6 6.2.3.2 Select, modify, create user profile ü Operator or Supervisor rights > User accounts > Manage user accounts ð Existing users and associated groups are displayed in list form. You have the following possibilities: To create a new user profile, select at the bottom of the window.

  • Page 54: Modify Personal Settings

    6 | Operation INFICON Save 6.2.3.3 Modify Personal Settings As a user with limited rights (User) you can also modify your language or PIN. By this the associated user profile is correspondingly adapted. Access to the entire user profile is not necessary.

  • Page 55: Presentation Of The Measurement Screen

    INFICON Operation | 6 ü The requested user was already created. See "Select, modify, create user profile [} 53]". > User accounts > Manage Auto Login In the “Manage Automatic Login” window, activate the option “Active”. Enter the name of the user in the "Name" field. Note the uppercase/lowercase.

  • Page 56: Changing The Presentation Of The Bar Graph

    6 | Operation INFICON In the field "Scaling" select between "Linear" and "Logarithmic". Select between the different viewable ”Decades”. To dynamically adjust the upper and lower limit on the leak rate, activate the option "Autoscale". In the field "Time axis" select the length of the time axis "30", "60", "90", "120" or "240"...

  • Page 57: Changing The Presentation Of The Circle Graph

    INFICON Operation | 6 6.2.6.3 Changing the presentation of the circle graph Fig. 12: Presentation of the circle chart ü Operator or Supervisor rights > Display > Circle graph If you want to fix the number of displayed decades in the circle chart, under "Decades“...

  • Page 58: Change Units

    6 | Operation INFICON ð The internal background is created from the remaining gas, which has not yet been pumped out. Very clean systems show a background in the range of 1 x mbar l/s. Under normal conditions there is a background of 1 x 10 mbar l/s or 1x10 mbar l/s.

  • Page 59: Change The Protection Settings

    INFICON Operation | 6 > Audio In order to change the volume of the audio alarm and the notification sounds, select the desired "Volume". Do not fall below the set value for the “Minimum volume“ in the next field. ð Setting range: 0 … 15 ð...
  • Page 60 6 | Operation INFICON ü Supervisor rights > Setup > Measurement > Protection If you want to switch-on the gross leak protection, activate the option "Gross leak protection" and set under "Gross leak protection limit" a shut-down threshold. ð The device closes the inlet valve as soon as the measured leak rate exceeds the shut-down threshold.

  • Page 61: Set Maintenance Interval "Filter Sniffer Tip" Or "Air Filter

    INFICON Operation | 6 ð If the anticipated pressure conditions are not reached during the evacuation time, a warning message is shown after the expiration of the evacuation time. For the pressure conditions, see also the following setting options: > Setup> Measurement> Pressure limits >...

  • Page 62: Activating Or Deactivating Calibration Requests

    6 | Operation INFICON - TMP - Filter sniffer tip - backing pump - Exhaust filter - Air filter Adjust. Save 6.2.12 Activating or deactivating calibration requests If the option "calibration request” is not active (factory setting), you only get a calibration request in the following cases: •...

  • Page 63: Measure Internal Calibration Leak After Run-Up

    INFICON Operation | 6 ð Released. The buttons START, Stop and ZERO on the control panel and also the buttons of the remote control are released. The operation via touchscreen can be disabled, however, if no user is logged on.

  • Page 64: Turn Notifications On Or Off

    6 | Operation INFICON ð The Favorites window with 9 buttons is displayed. Assigned buttons can be used to quickly call up desired functions. Create Favorites: In the Favorites window, press an empty button. Select the desired menu name from the displayed list overview and confirm your selection with ð...

  • Page 65: Settings For The Measurements

    INFICON Operation | 6 6.3 Settings for the measurements 6.3.1 Select operation mode ü Operator or Supervisor rights > Operating mode Select between "Vacuum", "Sniffer / SL200" and "Sniffer / SL3000". Save 6.3.2 Select gas DANGER Danger from a Hydrogen explosion Hydrogen can explode in combination with oxygen.

  • Page 66: Activate Vacuum Ranges

    6 | Operation INFICON > Setpoints Adjust. Save 6.3.4 Activate vacuum ranges Vacuum ranges You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your measurements. All 4 areas can be activated at the same time. If several areas are activated, they switch automatically depending on the inlet pressure p1.

  • Page 67: Use Hydro•S

    INFICON Operation | 6 > Setup > Measurement > HYDRO•S Make a selection from: "Deactivated" (factory setting) if you do not use HYDRO•S and also want to dispense with manual switchability. "Manual" if you want to activate or deactivate HYDRO•S by pressing on measurement screen.

  • Page 68: Set External Calibration Leak

    6 | Operation INFICON If you would like to compensate for this you can multiply the measured leak rate with the suitable machine factor and then have the value shown. This factor is used only in the vacuum mode and not in the sniffing mode.

  • Page 69: Set And Use The Function Zero

    INFICON Operation | 6 Using this function the factory settings for the switching points between the vacuum ranges MASSIVE, GROSS, FINE and ULTRA can be changed. This can be necessary if the device is pumped down with gases other than air, such as Argon. The reason for this is the gas type dependence of the internal Pirani pressure gauges.
  • Page 70 6 | Operation INFICON A currently displayed leak is hidden through ZERO. By using the function ZERO not only is the background signal hidden, but also the representation of a current leak. ► If you want to prevent this, select the function ZERO only if not measuring a leak at the same time.

  • Page 71: Vent, Purge, Regenerate

    INFICON Operation | 6 6.3.11 Vent, purge, regenerate Vent In measuring mode, you use this function to vent the inlet of the device and a test specimen connected to it after a measurement. Without the suction effect of the vacuum, a test specimen can be easily changed.

  • Page 72: Change Leak Rate Filter

    6 | Operation INFICON If necessary activate the option "Automatic purge". ð If you switch off the automatic purging, you can switch purging on or off in the standby window by pressing Save Regeneration It may happen that too much helium has entered the interior of the device and no accurate measurements are possible (helium contamination).

  • Page 73: Determine The Background Of The Inlet Area

    INFICON Operation | 6 After activating "Background suppression" the internal background and selectably also the background in the inlet area is deducted from the leak rate. This happens after pressing the START button automatically. ü Supervisor rights > Setup > Measurement > ZERO and filter Make your selection in the field “Background suppression“...

  • Page 74: Change Sl3000 Settings For Sound / Light

    6 | Operation INFICON If "Zero and Filter" are shown in the window under background suppression with value "Inlet area" selected, this value is then deducted from the measured signal whenSTART is pressed. See also "Change background suppression [} 72]". ü Inlet blank flange ü...

  • Page 75: Calibrating

    INFICON Operation | 6 "Upper pressure limit SL200 capillary broken" (upper limit) "Lower pressure limit SL3000 capillary clogged" (lower limit) "Upper pressure limit SL3000 capillary broken" (upper limit) Adjust. Save 6.3.16 Calibrating In order to be able to measure leak rates correctly, the leak detector has to be adjusted at regular intervals by calibration.

  • Page 76: Check Calibration

    6 | Operation INFICON Adjust the leak rate of the calibration leak used, see also “Set external calibration leak [} 68]”. Place the device in the state "Standby" or "Measure". Press the cross-hair icon Select the calibration “External”. Press Follow the instructions on the screen.

  • Page 77: Measure

    INFICON Operation | 6 6.4 Measure ü The inlet flange on the upper side of the device is prepared for the pending measurement. Your test specimen or the SL200 sniffer line is normally connected there. ü Alternatively, the sniffer line SL3000 is connected to the back of the device (optional).

  • Page 78: Measuring Helium Ambient Concentration

    6 | Operation INFICON 6.5 Measuring helium ambient concentration The natural content of helium in the ambient air is about 5.2 ppm. You can examine the ambient air for an increased helium content (helium contamination) to determine the appropriate time for further measurements.

  • Page 79: Display Measurement Cycles

    INFICON Operation | 6 To record immediately after starting a measurement, activate the option "Enabled". Note: Data recording occurs during the measurements, i.e. while the measurement screen is displayed. See also "Display measurement cycles [} 79]". ð This option is deactivated as standard. To start or stop a recording without activating this option press in the measurement display.

  • Page 80: Export Measurement Data Via Network

    6 | Operation INFICON ð Alternatively, you can edit "Free text 1" and "Free text 2" from the "Measurement cycles" window. Select an entry by tapping on it and press To change the displayed period in the detailed view on the chart, swipe to the right or left on the display.

  • Page 81: Measurement Data Database: Information

    INFICON Operation | 6 When accessing via LAN, use the IP address found under > Device > Network. When accessing via WLAN, use the URL found under > Setup > Network > WLAN. Example 1: http://192.168.11.124:3000/md?f=csv_en&c=4&d=mr Returns measured values and metadata of the measurement cycle with ID 4 in the format “csv_en”.

  • Page 82: Information

    6 | Operation INFICON If storage is needed for the recording and the maximum database size (in measurement values) has been exceeded, the oldest records are automatically deleted so that 5% of the specified capacity is freed for new data.

  • Page 83: Retrieve Information About The Device

    INFICON Operation | 6 ► > Accessories > Bus module ð If a bus module is connected, you will find details. 6.7.4 Retrieve information about the device Diverse information on the device is shown: Software and serial numbers, network information and operating hours.

  • Page 84: Call Information On The Hydro•S

    6 | Operation INFICON ► > Energy > Voltage (2) ð In this window the second part of the information to the voltage is shown. ► > Energy > Power ► > Energy > Current 6.7.7 Call information on the HYDRO•S The internal parameters for HYDRO•S are displayed.

  • Page 85: Device Settings

    INFICON Operation | 6 6.9 Device settings 6.9.1 Viewing and customizing individual parameters You are able to get a quick overview of the actual settings of the device and you can make modifications, if needed. ü You have the required right to change the specific parameter.

  • Page 86: Exporting Or Importing Sets Of Parameters

    6 | Operation INFICON , to activate a set of parameters. , to delete a set of parameters. 6.9.3 Exporting or importing sets of parameters You are able to transfer saved sets of parameters from the internal memory to an attached USB flash drive and to import the sets again.

  • Page 87: Update The User Interface Software

    INFICON Operation | 6 6.10.1 Update the user interface software Import software updates using a USB flash drive. NOTICE Loss of data due to disconnection ► Do not switch off the device and do not remove the USB flash drive while the software is being updated.

  • Page 88: Update The Software In Expert Mode

    6 | Operation INFICON ð After completion there is an automatic restart of the system. 6.10.3 Update the software in expert mode ü Supervisor rights > Update > Update operating unit/basic unit > Expert ð Software versions already available on the device are shown in a list.

  • Page 89: Switch Back To The Internal Monitor

    INFICON Operation | 6 6.11.1 Switch back to the internal monitor NOTICE Disconnect external monitor ► If the device is turned on, switch to the internal monitor in the menu before disconnecting the connections of an external monitor. When the instrument is switched on, you will be able to switch to internal monitor at any time.

  • Page 90: Resetting To Factory Settings

    6 | Operation INFICON 4 Internal calibration leak 9 Sniffer line 5 V2a, V2b … V15: Solenoid 10 Backing pump valves for controlling gas flows 6.13 Resetting to factory settings You can restore the device to factory settings. Loss of settings and measurement data After resetting to factory settings only the manufacturer factory settings are in the memory of the device.

  • Page 91: Switching Off The Device

    INFICON Operation | 6 6.15 Switching off the device NOTICE Turbo molecular pumps can be damaged The running turbo molecular pumps can be damaged by jerky movements or foreign objects. ► Before switching off the device, vent the inlet to ensure that the TMP2 (booster pump) is slowed down.

  • Page 92: Warning And Error Messages

    7 | Warning and error messages INFICON 7 Warning and error messages During operation, the display shows information that helps you operate the device. Measurement values are displayed along with current device modes, operating instructions as well as warnings and error messages. The device is equipped with extensive self-diagnostic functions.

  • Page 93: Warning And Error Messages Ul3000/Ul6000

    INFICON Warning and error messages | 7 7.1 Warning and error messages UL3000/UL6000 Type Notification Possible sources of Remedy error W102 Timeout during The EEPROM on the • Contact customer service communication with VI-Board is defective or EEPROM on VI-Board...
  • Page 94 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W110 Real-time clock was reset! The real-time clock has • Enter the correct date and time Enter date and time not been set • Check that the message does not appear...
  • Page 95 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W125 I/O module no longer Connection to I/O • Check the connection to the I/O module connected module interrupted • Replace the connection cable to the I/O...
  • Page 96 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W153 Operating unit software A more up-to-date • Contact the customer service for the version is obsolete operating unit software latest operating unit software is available. For...
  • Page 97 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W211 5V internal supply voltage Short circuit or • Contact customer service out of range overload in the internal 5V supply W212 5V sniffer line supply voltage Sniffer line defective •...
  • Page 98 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W224 Internal voltage Short circuit or • Contact customer service 24V_PRESSURE (Pirani) overload in the voltage out of range 24V_PRESSURE (Pirani) supply W240 Voltage +15V out of range Short circuit at •...
  • Page 99 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W302 Suppressor voltage too low Short circuit of • Contact customer service suppressor or preamplifier VI-Board or MSB • Contact customer service defective W303 Suppressor voltage too high MSB defective •...
  • Page 100 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E340 Emission error Pressure too high with • Contact customer service aged cathode W342 Cathodes not connected Both cathodes • Contact customer service defective during self-...
  • Page 101 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E404 TMP current consumption Pressure in the TMP is • Contact customer service too high too high W405 No TMP run-up Inlet pressure during • Check that the backing pump is working...
  • Page 102 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E451 Temperature prewarning of The ambient • Reduce the temperature in the backing pump temperature is too high environment where the device is located Ambient temperature is •...
  • Page 103 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E457 Fault in backing pump: The backing pump in • Make sure that you use the supplied Power failure the leak detector has a power cord faulty mains input •...
  • Page 104 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error E463 Temperature error of The ambient • Reduce the temperature in the backing pump temperature is too high environment where the device is located Fan blocked or •...
  • Page 105 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error E504 Pressure sensor p3 not Pressure sensor not • Contact customer service connected connected or cable defective VI-Board or MSB • Contact customer service defective E505...
  • Page 106 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W542 Flow through capillary too Capillary broken or • Use another sniffer line, if possible high leaky • Contact customer service The pressure limit for a •...
  • Page 107 INFICON Warning and error messages | 7 Type Notification Possible sources of Remedy error W630 Calibration request Operation mode or • Perform a calibration mass has changed HYDRO•S has been • Perform a calibration switched on (if function available) Auto Leak Test is •...
  • Page 108 7 | Warning and error messages INFICON Type Notification Possible sources of Remedy error W710 MSB temperature is too high The ambient • Reduce the temperature in the temperature is too high environment where the device is located Air filter dirty •...

  • Page 109: Cleaning And Maintenance

    INFICON Cleaning and maintenance | 8 8 Cleaning and maintenance All cleaning and maintenance work described here must be carried out without opening the device! DANGER Risk of death from electric shock There are high voltages inside the device. Touching parts where electrical voltage is present can result in death.

  • Page 110: Replacement Of The Filter Mat On The Bottom Of The Device

    8 | Cleaning and maintenance INFICON Remove the used air filter from the plastic grid and insert a new one. Refit the plastic grid together with the new air filter. 8.3 Replacement of the filter mat on the bottom of...

  • Page 111: Replacing The Sl200 Sniffer Line Filter

    INFICON Cleaning and maintenance | 8 Loosen the screws, which fix the filter mat on the metal sheet. Replace the filter mat. Secure the filter mat with the screws, insert the metal sheet and fix it with the knurled screw.
  • Page 112 8 | Cleaning and maintenance INFICON 3 Capillary filter (metal with gasket; 6 Gasket option) A blockage of the sniffer tip can have the following causes: Capillary filter blocked -> replace felt discs or capillary filter Sinter filter clogged -> check or replace sinter filter Capillary clogged in sniffer tip ->...

  • Page 113: Replacing The Sl3000 Sniffer Line Filter

    INFICON Cleaning and maintenance | 8 If you have activated the display of maintenance requests, set the maintenance interval to the desired new period. Also see "Activate or deactivate maintenance requests [} 61] " and "Set maintenance interval "Filter sniffer tip" or "Air filter" [} 61]".

  • Page 114: Creating Screenshots

    8 | Cleaning and maintenance INFICON Push the metal grill and then the two new inserts into the filter from the front. Make sure that grill and inserts do not cant. Switch on the leak detector. Close the sniffer probe with your finger. With the water protection tip, you have to also cover the opening on the side.

  • Page 115: Sending For Repair Or Maintenance

    Maintenance inside the device should only be performed by the manufacturer. We recommend having the device serviced every 4000 hours or annually. You can send in your device to INFICON so it can be maintained or repaired. For further details see "Sending in the device [} 118]”.

  • Page 116: Maintenance Plan

    • I Customer or higher level legend • II Customer with instruction or higher level • III INFICON Service Technician • X Carry out maintenance as per operating hours or duration • X Maintenance after operating hours, not after duration •...
  • Page 117 INFICON Cleaning and maintenance | 8 To the Kashiyama NeoDry backing pump When pumping clean gases such as dry air and inert gases, the recommended schedule for preventive maintenance is 3 years. When pumping condensable gases such as water vapour and gas-mixed solvents as well as aggressive or corrosive gases, it may be necessary to reduce the maintenance interval to one year.

  • Page 118: Decommissioning

    9 | Decommissioning INFICON 9 Decommissioning 9.1 Disposing of the device The device can either be disposed of by the operator or be sent to the manufacturer. The device consists of materials that can be recycled. This option should be exercised to prevent waste and also to protect the environment.
  • Page 119 INFICON Decommissioning | 9 UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 119 / 146...

  • Page 120: Accessories And Interfaces

    10 | Accessories and interfaces INFICON 10 Accessories and interfaces 10.1 Accessories and spare parts The parts listed below can additionally be ordered: Bus module BM1000 PROFIBUS 560-315 BM1000 PROFINET IO 560-316 BM1000 DeviceNet 560-317 BM1000 EtherNet/IP 560-318 I/O module...
  • Page 121 INFICON Accessories and interfaces | 10 Sniffer tip, rigid, 500 mm. 45° angled(ST 500) 12272 Further accessories for the SL3000 Felt For Capillary Filter SL3xx, 50 pc. 200001116 Capillary filter, metal(1 unit) 12217 Capillary Filter SL 300, set 5 pieces(Plastic capillary filter)
  • Page 122 10 | Accessories and interfaces INFICON The installation instructions are supplied as a separate document with the bottle holder. Remote control RC1000C and RC1000WL With the RC1000C remote control you can operate the leak detector over a cable with a length of up to 28 m.
  • Page 123 INFICON Accessories and interfaces | 10 Search for the wireless remote control from the leak detector If you have misplaced the RC1000WL wireless remote control, you can trigger from your leak detector acoustic signals of this remote control. > Setup > Accessories > RC1000 Select the setting “ON”...

  • Page 124: I/O Module

    ü Supervisor rights Connect the INFICON I/O module with a data cable to the LD socket on the rear of the device, see "Connections for accessories and control signals [} 33]". > Setup > Accessories > Device selection Select the "IO module".
  • Page 125 INFICON Accessories and interfaces | 10 Pressure p1 / Pressure 1 ... 10 V; 0.5 V / decade; logarithmic 1 V = 1 x 10 mbar Leak rate mantissa 1 ... 10 V; linear; in the Useful only if the other analog output is assigned selected unit "Leak rate exponent".

  • Page 126: Configure Digital Inputs

    10 | Accessories and interfaces INFICON Leak rate log. 0 ... 10 V; logarithmic; The upper limit (= 10 V) and the scale (V / decades) are set via the parameters "Exponent upper limit" and in the selected unit "Analog output scaling".

  • Page 127: Configuring Digital Outputs

    INFICON Accessories and interfaces | 10 ð The modes "Standard" or the mode "Inverse" are available for selection. To mode "Inverse": In the following table overview, the arrow pointing the transfer direction in the column "Transition" must be reversed. Save...
  • Page 128 10 | Accessories and interfaces INFICON Function State: Description Off (open) open: always open Ready for operation closed: Emission switched on, calibration process inactive, no error open: Emission switched off or calibration process active or error Emission on closed: Emission switched on...

  • Page 129: Setting Up The I/O Module Protocol

    INFICON Accessories and interfaces | 10 Function State: Description Setpoint 3 closed: Measured leak rate exceeds the setpoint 3 open: Measured leak rate undercuts the setpoint 3 Setpoint 4 closed: Measured leak rate exceeds the setpoint 4 open: Measured leak rate undercuts the setpoint 4...

  • Page 130: Bus Module

    To establish the connection between the leak detector and the bus module, proceed as follows: Switch off the leak detector. Connect the INFICON bus module via a data cable to the LD socket of the device, see “Connections for accessories and control signals [} 33]“. Switch on the leak detector.

  • Page 131: Network

    INFICON Accessories and interfaces | 10 10.4 Network 10.4.1 Operate leak detector via web browser (LAN) NOTICE Operating system can be attacked via USB or Ethernet The Linux operating system used in the leak testing is not updated automatically and can therefore contain security gaps.

  • Page 132: Setting The Lan Connection In The Pc Or Tablet

    10 | Accessories and interfaces INFICON 10.4.1.2 Setting the LAN connection in the PC or Tablet LAN connection - quick start If you have performed the steps described here once, it is sufficient to enter the IP address for many devices in case of repetition.

  • Page 133: Operate Leak Detector Via Web Browser (Wireless Lan)

    INFICON Accessories and interfaces | 10 10.4.2 Operate leak detector via web browser (wireless LAN) NOTICE Operating system can be attacked via USB or Ethernet The Linux operating system used in the leak testing is not updated automatically and can therefore contain security gaps. This vulnerability may be exploited through the Ethernet and USB interfaces of the leak testing to provide unauthorized access to the system.

  • Page 134: Setting The Wireless Lan Connection In The Pc Or Tablet

    10 | Accessories and interfaces INFICON To set-up that the device supports the WLAN connection activate the option "Enable Wireless LAN". In the field “WiFi Name (SSID)” enter the desired network name and in the field “WiFi Network key” the desired Network key.

  • Page 135: Allow Client Access

    INFICON Accessories and interfaces | 10 10.4.2.3 Allow client access ü Supervisor rights > Setup > Network > Client access To allow the leak detector to be operated by PC or Tablet, activate the "Client Access" option. ð If the option "Client Access" is not activated, the leak detector cannot be operated via PC or Tablet.

  • Page 136: Appendix

    11 | Appendix INFICON 11 Appendix 11.1 Menu path 11.1.1 Diagnosis > Confirmed warnings > Errors and warnings > Measurement data > Data recording > Measurement data > Data base information > Measurement data > Measurement data export > Measurement data > Measurement cycles >...
  • Page 137 INFICON Appendix | 11 > User accounts > Change own language > User accounts > Favorites > Operating mode > Setup > General > Notifications > Setup > General > Date and time > Setup > General > Units > Setup > General > Reset >...

  • Page 138: Information

    11 | Appendix INFICON > Sets of parameters > Manage sets of parameters > Setpoints 11.1.3 Information > Assemblies > Ion source > Assemblies > TMP > Assemblies > TMP2 > Assemblies > Backing pump > Assemblies > Preamplifier > Energy > Power >...

  • Page 139: Ce Declaration Of Conformity

    INFICON Appendix | 11 11.2 CE Declaration of Conformity UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 139 / 146...

  • Page 140: Rohs

    11 | Appendix INFICON 11.3 RoHS 140 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)

  • Page 141: Index

    INFICON Index Index Evacuation time gross leak  60 Evacuation time measurements  60 Access controls  52 Exhaust  31, 47 Automated login Switch off  54 Switch on  54 Factory settings  36 Function description  18 Background signal  10 Background suppression  9, 72, 73 HYDRO•S...
  • Page 142 Index INFICON Update basic unit  87 User interface update  87 Operating options  62 Supervisor  52, 54 Operation Switch monitor  25, 88, 89 PC, Tablet  134 Switch off  91 Operation mode "Sniffing"  19, 65 Switching on  51 Operation mode "Vacuum"  18, 65 Operator  52...
  • Page 143 INFICON Index ZERO  77 Button  26 Factory setting  70 UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 143 / 146...
  • Page 144 Index INFICON 144 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)

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