Pfeiffer Vacuum TC 1200 DN Operating Instructions Manual
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Pfeiffer Vacuum TC 1200 DN Operating Instructions Manual

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OPERATING INSTRUCTIONS
EN
Translation of the Original
TC 1200 DN
Electronic drive unit

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Summary of Contents for Pfeiffer Vacuum TC 1200 DN

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original TC 1200 DN Electronic drive unit...

  • Page 2: Telegram Example

    Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.

  • Page 3: Table Of Contents

    5.1.10DeviceNet object "S-Analog Supervisor" 5.1.11DeviceNet object "S-Analog Sensor" 5.1.12DeviceNet object "S-Single Stage Controller" 5.1.13DeviceNet object "Interfaces" 5.1.14DeviceNet object "Process Components" Pfeiffer Vacuum protocol for RS-485 interface 5.2.1 Telegram frame 5.2.2 Telegram description 5.2.3 Telegram example 1 5.2.4 Telegram example 2 5.2.5 Data types...
  • Page 4 Status requests Reference value inputs Additional parameters for the control unit Operation Configuring the connections with the Pfeiffer Vacuum parameter set 7.1.1 Configure the "DeviceNet" connection 7.1.2 Configuring the device address 7.1.3 Setting the baud rate 7.1.4 Configuring the data exchange 7.1.5 Configuring the "remote"...
  • Page 5 List of tables List of tables Tbl. 1: Stickers on the product Tbl. 2: Abbreviations used in this document Tbl. 3: Permissible ambient conditions Tbl. 4: Features of the device variant Tbl. 5: Delivered drive power depending on the supplied mains voltage Tbl.
  • Page 6 List of figures List of figures Fig. 1: Connection panel TC 1200 DN Fig. 2: Diagram and assignments of the connection panel Fig. 3: Selector switch for DeviceNet device address Fig. 4: Selector switch for DeviceNet baud rate Fig. 5:...

  • Page 7: About This Manual

    Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status.

  • Page 8: Stickers On The Product

    Analog Input / Analog Output Ampere interrupting capacity DINT Signed Double Integer (DeviceNet data type) Display Control Unit (Pfeiffer Vacuum display and control unit) DI / DO Digital Input / Digital Output DeviceNet version Electronic Data Sheet (DeviceNet communication parameter) Rotation speed value of a vacuum pump (frequency, in rpm or Hz) Handheld Programming Unit.

  • Page 9: Trademark Proof

    About this manual Abbreviation Meaning in this document UINT Unsigned Integer Value (DeviceNet data type) USINT Unsigned Short Integer Value (DeviceNet data type) Tbl. 2: Abbreviations used in this document 1.5 Trademark proof ● DeviceNet ® is a registered trademark of Open DeviceNet Vendor Association Inc. 9/68...

  • Page 10: Safety

    Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►...

  • Page 11: Safety Precautions

    Safety DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.

  • Page 12: Limits Of Use Of The Product

    Safety Infringement of conformity due to modifications to the product The Declaration of Conformity from the manufacturer is no longer valid if the operator changes the original product or installs additional equipment. ● Following the installation into a system, the operator is required to check and re-evalu- ate the conformity of the overall system in the context of the relevant European Direc- tives, before commissioning that system.

  • Page 13: Proper Use

    Safety 2.5 Proper use ● The electronic drive unit is used exclusively for the operation of Pfeiffer Vacuum turbopumps and their accessories with a DeviceNet bus system. 2.6 Foreseeable misuse Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular: ●...

  • Page 14: Product Description

    ID no. 000021320. 3.2 Product features The type TC 1200 DN electronic drive unit is a fixed component of the turbopump. The purpose of the electronic drive unit is to drive, monitor and control the entire turbopump. The electronic drive unit is equipped with an integrated extended voltage supply.

  • Page 15: Scope Of Delivery

    AC in Housing plug HAN 3A for the voltage supply accessory M12 socket with screw lock for the connection of Pfeiffer Vacuum accessories. The use of a Y-distributor permits the double allocation of a connection. PV.can M12 bushing with threaded coupling and LED for Pfeiffer Vacuum service purpos-...

  • Page 16: Installation

    Installation 4 Installation 4.1 Connection diagram DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.
  • Page 17 Installation n.c. n.c. Accessory A2 Accessory B2 24 V DC** 24 V DC** Accessory A1 Accessory B1 + 24 V DC* out DI Motor Pump CAN-H DI Pump stand 24 V DC*** DI Standby GND*** CAN-L AI+ 0-10 V DC Drain AI- GND AO1 / 0-10 V DC...

  • Page 18: Devicenet" Connection

    Establishing the DeviceNet connection 1. Establish the DeviceNet connection in compliance with the applicable guidelines. 2. Use a suitable connection cable and components from the Pfeiffer Vacuum line of accessories. 3. Supply the DeviceNet connection with voltage (see chapter “Mains power supply”, page 20).

  • Page 19: Tbl. 8: Terminal Lay-Out Of 26-Pin "Remote" Connection

    = 50 V DC; I = 1 A) DO remote priori- GND: off; V+: Remote priority active RS-485 D+ in accordance with the specification and Pfeiffer Vacuum proto- RS-485 D- Ground (GND) Reference earth for all digital inputs and outputs Tbl. 8: Terminal lay-out of 26-pin "remote"...

  • Page 20: Mains Power Supply

    Terminal lay-out of the power supply connector Establishing mains connection 1. Order a corresponding power supply cable from the Pfeiffer Vacuum accessories range. 2. Assemble your own power supply cable using the HAN 3A connecting socket from the shipment. 3. Plug mains cable into the mains connection "AC in".

  • Page 21: Interfaces

    Interfaces 5 Interfaces 5.1 DeviceNet interface Data type Data length Description Example BOOL 1 bit Binary value (0/1) 00h 0, 01h:1 BYTE 8 bit 8 individual bits 00h, FFh DINT 4 byte Integer with sign 12345678h 89h, 56h, 34h, 12h 2 byte Integer with sign 1234h 34h, 12h Packed EPATH...

  • Page 22: Devicenet Object "Message Router

    1.1.5 Status WORD 1.1.6 Serial Number UDINT 1.1.7 Product Name SHORT_STRING TC 1200 DN 1.1.100 Status Code Tbl. 12: DeviceNet object "Identity" 5.1.2 DeviceNet object "Message Router" This object does not provide any attributes and services. 5.1.3 DeviceNet object "DeviceNet" Path Name...

  • Page 23: Devicenet Object "Connection

    Interfaces Path Name Data type Service Comments 4.2.3 Data ARRAY of Exception Status BYTE 48.1.12 Speed Status 42.1.39 Pump On/Off BOOL 8.1.3 Speed Actual 42.1.7 Instance 5 (default output): pump control 4.5.3 Data ARRAY of get, set Pump On/Off BOOL 9.1.3 Instance 6 (output): pump control 4.6.3...

  • Page 24: Devicenet Object "Register

    Interfaces Path Name Data type Service Comments 5.1.1 State USINT 5.1.2 Instance Type 5.1.3 Transport Class Trigger BYTE 5.1.4 DeviceNet Produced Connection ID UINT 5.1.5 DeviceNet Consumed Connection ID 5.1.6 DeviceNet Initial Comm Characteristics BYTE 5.1.7 Produced Connection Size UINT 5.1.8 Consumed Connection Size 5.1.9...

  • Page 25: Devicenet Object "Discrete Input Point

    Interfaces Path Name Data type Service Comments 7.1.4 Data ARRAY of get, set BYTE Bit 0/1 venting valve: 0 - do not vent 1 - vent directly 2 - delayed venting Bit 2/3 sealing gas valve: 0 - off 1 - released 7.1.100 Venting Frequency USINT...

  • Page 26: Devicenet Object "Ac/Dc Drive

    Interfaces Path Name Data type Service Comments Instance 3: Sealing gas 9.3.3 Value BOOL get, set 0: Sealing gas off 1: Sealing gas on 9.3.5 Fault Action 0: Sealing gas off 1: Maintain state 9.3.6 9.3.7 Idle Action 0: Sealing gas off 1: Maintain state 9.3.8 Instance 100: Brake...

  • Page 27: 10Devicenet Object "S-Analog Supervisor

    Interfaces Path Name Data type Service Comments 42.1.18 Accel Time UINT get, set Starting time (ms/2 Time Scale e.g. 2813 read -> 6 min 42.1.22 Speed Scale SINT 42.1.27 Voltage Scale 42.1.28 Time Scale 42.1.38 Speed Control BYTE Bit 0: Pumping station on Bit 1: Motor off Bit 2: Standby on 42.1.39...
  • Page 28 Interfaces Path Name Data type Service Comments 48.1.3 Device Type SHORT_STRING 48.1.4 SEMI Standard Revi- sion Level 48.1.5 Manufacturer’s Name 48.1.6 Manufacturer’s Model Number 48.1.7 Software Revision Level 48.1.8 Hardware Revision Level 48.1.11 Device Status USINT 1: Self Testing 2: Idle 3: Self-Test Exception 4: Executing 5: Abort...
  • Page 29 Interfaces Path Name Data type Service Comments 48.1.13 Exception Detail STRUCT of Alarm Common Exception USINT Detail Size Common Exception BYTE Bit 0: Internal diagnostics Detail 0 Bit 1: Microcontroller Bit 2: EPROM Bit 3: EEPROM Bit 4: RAM (random access memory) Bit 5: reserved Bit 6: Internal realtime Bit 7: reserved...

  • Page 30: Tbl. 20: Devicenet Object "S-Analog Supervisor

    Interfaces Path Name Data type Service Comments 48.1.14 Exception Detail STRUCT of Warning Common Exception USINT Detail Size Common Exception BYTE Bit 0: Internal diagnostics Detail 0 Bit 1: Microcontroller Bit 2: EPROM Bit 3: EEPROM Bit 4: RAM (random access memory) Bit 5: reserved Bit 6: Internal realtime Bit 7: reserved...

  • Page 31: 11Devicenet Object "S-Analog Sensor

    Interfaces 5.1.11 DeviceNet object "S-Analog Sensor" Path Name Data type Service Comments 49.0.1 Inspection UINT 49.0.2 Max Instance 49.0.3 Number of Instances Instance 1: Motor temperature 49.1.5 Reading Valid BOOL 0: invalid 1: valid 49.1.6 Value Motor temperature (°C/10) 49.1.7 Status BYTE Bit 0: Excess temperature (error) Bit 2: high temperature (warning)

  • Page 32: 12Devicenet Object "S-Single Stage Controller

    Interfaces 5.1.12 DeviceNet object "S-Single Stage Controller" Path Name Data type Service Comments 51.0.1 Inspection UINT 51.0.2 Max Instance 51.0.3 Number of Instances Instance 1 51.1.6 Setpoint get, set TMS set temperature (°C/10) 51.1.10 Status BYTE Tbl. 22: DeviceNet object "S-Single Stage Controller" 5.1.13 DeviceNet object "Interfaces"...

  • Page 33: 14Devicenet Object "Process Components

    DeviceNet object "Process Components" 5.2 Pfeiffer Vacuum protocol for RS-485 interface 5.2.1 Telegram frame The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the telegram C . Basically, a host (e.g.

  • Page 34: Telegram Description

    Interfaces I1 – I0 Data length dn to d0 dn – d0 Data in the respective data type (see chapter “Data types”, page 35). c2 – c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 carriage return (ASCII 13) 5.2.2 Telegram description Data query -->...

  • Page 35: Data Types

    Interfaces 5.2.5 Data types Data type Description Length Example l1 – l0 boolean_old Logical value (false/true) 000000 is equivalent to false 111111 is equivalent to true u_integer Positive whole number 000000 to 999999 u_real Positive fixed point number 001571 corresponds with 15.71 string Any character string with 6 charac-...

  • Page 36: Parameter Set

    Each parameter has a three-digit number and a description. The parameter can be accessed via Pfeiffer Vacuum control units or externally via RS-485 using Pfeiffer Vacuum protocol. The vacuum pump starts in standard mode with factory default pre-set parameters.
  • Page 37 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg DO2 Output DO2 0 = Rotation speed switchpoint configuration reached 1 = No error 2 = Error 3 = Warning 4 = Error and/or warning 5 = Set rotation speed reached 6 = Pump on 7 = Pump accelerating 8 = Pump decelerating...
  • Page 38 Parameter set Display Description Functions Data Unit min. max. type cess fault type Cfg Acc A1 Configuration 0 = fan (continuous operation) accessory 1 = Venting valve, closed with- connection out current 2 = Heating 3 = Backing pump 4 = Fan (temperature control- led) 5 = Sealing gas 6 = Always "0"...

  • Page 39: Status Requests

    Parameter set Display Description Functions Data Unit min. max. type cess fault type CtrlViaInt Operate via 1 = remote interface 2 = RS-485 4 = PV.can 8 = Fieldbus 16 = E74 255 = Unlock interface selec- tion IntSelLckd Interface se- 0 = off lection locked 1 = on...

  • Page 40: Reference Value Inputs

    Parameter set Display Description Func- Data Access Unit min. max. tions type type fault OpHrsElec Drive electronics operating 65535 hours Nominal Spd Nominal rotation speed 999999 (Hz) DrvPower Drive power 999999 PumpCycles Pump cycles 65535 TempPwrStg Final stage temperature °C 999999 TempElec Electronics temperature...

  • Page 41: Additional Parameters For The Control Unit

    The basic parameter set is set in the electronic drive unit ex-factory. For controlling con- nected external components (e.g. vacuum measuring equipment), additional parameters (extended parameter set) are available in the corresponding Pfeiffer Vacuum control units. ● Refer to the corresponding operating instructions of the respective components.
  • Page 42 Parameter set Indicator Description Functions Data Access Unit min. max. type type fault Param set Parameter set 0 = Basic pa- rameter set 1 = Extended parameter set Servicelin Insert service line Tbl. 29: Parameters for control unit functions 42/68...

  • Page 43: Operation

    Operation 7 Operation 7.1 Configuring the connections with the Pfeiffer Vacuum parameter set The electronic drive unit is pre-configured with the factory default basic functions and is ready for opera- tion. For individual requirements, you can configure most connections for the electronic drive unit with the parameter set.

  • Page 44: Configuring The Data Exchange

    Operation Setting the baud rate via DeviceNet 1. Switch the device off or disconnect it from the mains. 2. Set the selector switch to position "P". 3. Program the baud rate via DeviceNet object 3.1.2. (see chapter “DeviceNet object "Device- Net"”, page 22) After switching on, the device uses the last valid baud rate (on delivery: 500 kBit/s).

  • Page 45: Tbl. 30: Input Data (Produced Data, Vacuum Pump To Controller)

    Operation Input data (produced data, vacuum pump to controller) ● 1: pump status (factory setting) ● 2: pump status, speed ● 100: pump status, speed, current ● 101: pump status, speed, current, temperature Assembly ... Byte Meaning (BYTE) Exception Status (48.1.12) ●...

  • Page 46: Configuring The "Remote" Connection

    Operation Assembly ... Byte Meaning 2 – 3 2 – 3 (INT) Speed Target (42.1.8) ● Set rotation speed in rpm/4 (e.g. value 15,000 corresponds to 60,000 rpm) 4 – 5 (WORD) Valve Configuration (7.1.4) ● Bit 0/1 venting valve: 0 - do not vent, 1 - direct venting, 2 - delayed venting ●...

  • Page 47: Configuring The Accessory Connections

    Operation Option Description 0 = actual speed Rotation speed signal; 0 – 10 VDC = 0 – 100% x f Nominal 1 = output: Power signal; 0 – 10 VDC = 0 – 100% x P 2 = current Current signal; 0 – 10 VDC = 0 – 100% x I 3 = Always 0 V Always GND 4 = Always 10 V...

  • Page 48: Select Interfaces

    ► Make sure that the gas mode is set correctly by [P:027] in the electronic drive unit. ► Consult Pfeiffer Vacuum before you use gases with higher molecular masses (> 80). High gas throughput and high rotation speed lead to strong friction heating of the rotor. To avoid over- heating, power to rotation speed characteristics are implemented in the electronic drive unit.

  • Page 49: Set Value Power Consumption

    Operation P max [P:708] Fig. 5: Schematic diagram of power characteristics, example of heavy gases [P:027] = 0 Power consumption Power characteristic in gas mode "0" (gases with molecu- lar mass > 39, e.g. Argon) Rotation speed Power characteristic in gas mode "1" (gases with molecu- lar mass ≤...
  • Page 50 Operation Rotation speed switch point 1 [P:017] = 0 f (%) [P:701] [P:010] [P:302] Process Fig. 6: Rotation speed switch point 1 active Adjusting rotation speed switch point 1 Signal output and status parameters are based on the set value for the rotation speed switch point 1 [P:701].

  • Page 51: Rotation Speed Setting Mode

    3. Check the set rotation speed (parameter [P:308] or [P:397]). 7.2.6 Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and production stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbo pump.

  • Page 52: Backing Pump Operating Modes

    Fluctuations in the power consumption of idling turbopumps and varying fore-vac- uum pressures of the backing pumps require individual settings of the interval operation. Pfeiffer Vacuum recommends interval operation between 5 and 10 hPa. A pressure gauge and a dosing valve are required to set the switching thresholds.

  • Page 53: Backing Pump Standby Mode

    2. Use this signal for the control of a fore-vacuum safety valve. 7.2.9 Backing pump standby mode In case you are using a Pfeiffer Vacuum backing pump with rotation speed control, this can be used in standby mode by configuring the digital output [P:019] or [P:024]. The power consumption of the turbo- pump has a direct influence on the rotation speed of the backing pump.

  • Page 54: Operation Via "Remote" Connection

    The digital inputs at the "remote" connection are used to switch various electronic drive unit functions. As a factory default, inputs DI1 – DI2 have functions that you can configure with the Pfeiffer Vacuum parameter set via DeviceNet or the RS-485 interface.

  • Page 55: Tbl. 42: Di Motor Pump/Pin

    Operation Status Description Turbo pump motor on open Turbo pump motor off Tbl. 42: DI motor pump/pin 3 DI pumping station / Pin 4 Control of connected pumping station components (e.g. backing pump, venting valve, air cooling). If pin 3 (motor) is activated at the same time, the turbopump starts up. Any pending error messages are reset by eliminating the cause.

  • Page 56: Outputs

    The digital outputs at the "remote" connection have a maximum load limit of 24 V/50 mA per output. All outputs listed below are configurable with the Pfeiffer Vacuum parameter set via DeviceNet or the RS485 interface (description relates to factory settings).

  • Page 57: Rs-485

    ► Connect only suitable devices to the bus system. A Pfeiffer Vacuum display and control unit (DCU or HPU) or an external PC can be connected via pins 24 and 25 of the electronic drive unit's "remote" connection. A USB interface (PC) can be connected via the USB/RS-485-converter.

  • Page 58: Operation Monitoring

    7.6.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the turbopump. A differentiated er- ror and warning display is possible in case of operations with the Pfeiffer Vacuum display and control panel.
  • Page 59 Operation ● In order to avoid switching off the turbopump, the electronic drive unit already reduces the power consumption in case of exceeding the warning threshold for excess temperature. ─ Examples are an impermissible motor temperature, or impermissibly high housing tempera- ture.

  • Page 60: Malfunctions

    Warnings (* Warning F –––– *) do not cause components to be switched off. Handling malfunction messages 1. Read out error codes via Pfeiffer Vacuum control units or a PC. 2. Remove the cause of the malfunction. 3. Reset the malfunction message with parameter [P:009].
  • Page 61 Malfunctions Error Problem Possible causes Remedy code Err043 Internal configuration er- ● Device defective ● Contact Pfeiffer Vacuum Service Err044 Excess temperature, ● Insufficient cooling ● Improve the cooling electronics ● Check the operating conditions Err045 Excess temperature, ● Insufficient cooling ●...
  • Page 62 Problem Possible causes Remedy code Err800 Magnetic bearing over- ● Impacts, vibrations ● Contact Pfeiffer Vacuum Service flow ● Device defective ● Check the operating conditions ● Only acknowledge for rotational speed f = 0 Err802 Magnetic bearing sen- ● Calibration values invalid ●...

  • Page 63: Warning And Malfunction Messages When Operating With Control Units

    ● Check the operating conditions ● Impermissible thermal radiation ● Impermissible magnetic field Wrn113 Inaccurate rotor tem- ● Internal communication error ● Contact Pfeiffer Vacuum Service perature Wrn115 Pump lower part tem- ● Device defective ● Contact Pfeiffer Vacuum Service...

  • Page 64: Service Solutions By Pfeiffer Vacuum

    We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
  • Page 65 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.

  • Page 66: Ec Declaration Of Conformity

    This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Electronic drive unit TC 1200 DN We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Electromagnetic compatibility 2014/30/EU...

  • Page 67: Declaration Of Conformity

    Semi F47-0200 EN IEC 61326-1:2021 Semi S2-0706 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...

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