Brooks 5861E Operation Manual
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Brooks 5861E Operation Manual

Mass flowmeter
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Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
Model 5861E
November, 2008
Model 5861E
Mass Flowmeter

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Summary of Contents for Brooks 5861E

  • Page 1 Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Model 5861E Mass Flowmeter...
  • Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
  • Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 4 Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 5: Table Of Contents

    Contents Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Paragraph Page Number Number Section 1 Introduction Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-1 Section 2 Installation Receipt of Equipment ......................... 2-1 Recommended Storage Practice ....................2-1 Return Shipment ........................
  • Page 6 Recommended Filter Size ......................2-4 Bench Troubleshooting ....................... 4-2 Sensor Troubleshooting ......................4-2 Conversion Factors (Nitrogen Base) ..................4-7 Restrictor Selection Guide ......................4-11 Model 5861E Replacement Parts List ..................5-3 Tool and Spare Part Kits for 5861E ..................... 5-4...

  • Page 7: Section 1 Introduction

    This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5861E Mass Flowmeter. This manual is organized into five sections: Section 1 - Introduction...
  • Page 8 Section 1 Introduction Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Control / Usable Range 50 to 1 Sensitivity to Mounting Attitude ±0.5% F.S. maximum deviation from specified accuracy after rezeroing under 200 psig Temperature Sensitivity Zero: Less than ±0.075% F.S.

  • Page 9: Section 2 Installation

    E-mail: BrooksEu@BrooksInstrument.com 2-2 Recommended Storage Practice If intermediate or long-term storage is required for equipment as supplied by Brooks Instrument, it is recommended that said equipment be stored in accordance with the following: a. Within the original shipping container. b. Store in a sheltered area with the following conditions: 1.

  • Page 10: Return Shipment

    Model 5861E November, 2008 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory - for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569).

  • Page 11: Model 5861E Dimensions

    Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Figure 2-1 Model 5861E Dimensions PIN NO. FUNCTION COLOR CODE Cmd. Common (Command Pot "CCW") • Black 0-5 Volt Signal Output White Supply Common Valve Off •...

  • Page 12: In-Line Filter

    Model 5861E November, 2008 Recommended installation procedures: a. The Model 5861E should be located in a clean dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components. c. Install in such a manner that permits easy removal if the instrument requires cleaning.

  • Page 13: Electrical Interfacing

    Model 5861E November, 2008 2-7 Electrical Interfacing To insure proper operation the Model 5861E must be connected as shown in Figure 2-2. Note: There are several functions on the printed circuit board which are not used by the Model 5861E. Avoid making connections marked in Figure 2-2 which are marked •.
  • Page 14 Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

  • Page 15: Section 3 Operation

    Model 5861E November, 2008 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5861E works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube. (Refer to Figure 3- 1) At zero or no flow conditions, the heat reaching each temperature sensor (one upstream and one downstream of the heater) is equal.

  • Page 16: Operating Procedure

    3-3 Zero Adjustment Each Model 5861E is factory adjusted to provide a 0 ±10mVdc signal at zero flow. After initial installation and warm-up in the gas system the zero flow indication may be other than the factory setting. This is primarily caused by changes in temperature between our calibration laboratory and the final installation.

  • Page 17: Calibration Procedure

    3-4 Calibration Procedure NOTE 1: Calibration of the Model 5861E mass flowmeter requires the use of a digital voltmeter (DVM) a flow control valve or mass flow controller to set the flow rate and a precision flow standard calibrator such as the Brooks Vol-U-Meter ®...

  • Page 18: Model 5861E Calibration Connections

    Section 3 Operation Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Figure 3-2 Model 5861E Calibration Connections *Note: Not used for a 5861E Figure 3-3 Adjustment Potentiometer Location Figure 3-4 Fast Response Adjustment...
  • Page 19 Installation and Operation Manual Section 3 Operation X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 f. Shut off the flow. Connect the DVM positive lead to flow signal output (pin 2 D-connector) and the negative lead to TP4. Readjust the zero potentiometer for an output of 0mV±2mV as necessary.

  • Page 20: Response (Flow Output Signal)

    2 of D-Connector. TP4 may be used for circuit common. a. With the shut-off valve open adjust the metering valve so that the output voltage of the Model 5861E is 4.050 to 5.000 Vdc. Allow the output to become stable at this setting.

  • Page 21: Section 4 Maintenance

    Model 5861E November, 2008 4-1 General No routine maintenance is required on the Model 5861E other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 2. Connect the instrument to a source of the same gas used for it's original calibration.
  • Page 22 Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-4. regardless of flow.
  • Page 23 November, 2008 A. System Checks The Model 5861E is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime.

  • Page 24: Sensor Tube

    Note: Do not attempt to disassemble the sensor. Cleaning Procedures Should the Model 5861E Mass Flowmeter require cleaning due to deposition, use the following procedures: 1. Remove the unit from the system. 2. Refer to Section 4-4 to disassemble the meter.

  • Page 25: Disassembly And Assembly

    Model 5861E November, 2008 4-4 Disassembly and Assembly The Model 5861E Mass Flowmeter may be disassembled in the field by user for cleaning, re-ranging or servicing. Disassemble and assemble the meter as fllows: Note: the model 5861E Mass Flowmeter should be disassembled and assembled in a clean enviromentto prevent particulate contamination.
  • Page 26 Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 B. Assembly Note: It is recommended that all O-rings be replaced during meter assembly. All O-rings should be lightly lubricated with Fomblin grease, (part of O-ring kit, Section 5) prior to their installation.

  • Page 27: Use Of The Conversion Tables

    Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 4-5 Use of the Conversion Tables If a mass flowmeter is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relationship between the output signal and the mass flow rate.
  • Page 28 Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Acetylene 0.615 0.970 1.173 Mixture 0.998 1.018 1.293 Allene 0.478 1.199...
  • Page 29 Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Hydrogen 1.008 0.269 0.090 Hydrogen Bromide 0.987 1.695 3.645 Hydrogen Chloride 0.983...

  • Page 30: Restrictor Sizing

    Restrictor O-ring, refer to the spare parts Section 5, for the correct part number. The Model 5861E Mass Flowmeter utilizes porous metal restrictor assemblies for all flow rates.Restrictor elements with porosities of 40 to 60 microns are used in different combinations. Up to three restrictors elements can be placed in one assembly.
  • Page 31 Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Example: The desired gas is cyanogen The desired full scale flow rate is 30 slpm. Sensor conversion factor is 0.498 from Table 4-3. Nitrogen equivalent flow = 30/0.498 = 60.24 sccm...

  • Page 32: Restrictor Element Assembly

    Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Figure 4-1 Restrictor Element Assembly Figure 4-2 Restrictor Element Orientation in Meter Body 4-12...

  • Page 33: Section 4 Parts List

    Section 5 Parts List Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).

  • Page 34: Model 5861E Parts Drawing

    Section 5 Parts List Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Figure 5-1 Model 5861E Parts Drawing...
  • Page 35 Section 5 Parts List Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Table 5-1 Model 5861E Replacement Parts List Item Qty. Description Part Number Body and Stud Weldment S-854-Z-165-BMA Endblock and Screen Weldment S-079-Z-200-AAA Soc. Hd. Cap Screw, #8-32x1/2"...
  • Page 36 Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 Table 5-2 Tool and Spare Part Kits for Model 5861E 5850 Series Service Tool Kit 5850/5860 Series Break Out Board Assembly P/N S-778-D-017-AAA P/N S-273-Z-668-AAA for D Connector version...
  • Page 37 CE mærkning af Masse Flow udstyr Dato Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
  • Page 38 Date January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
  • Page 39 Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
  • Page 40 CE. Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%. I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo.
  • Page 41 Januar 1996 Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
  • Page 42 Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
  • Page 43 Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG Model 5861E November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
  • Page 44 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.

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