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Summary of Contents for Brooks 5860i
- Page 1 Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Model 5860i Mass Flow Meter...
- Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Contents Installation and Operation Manual X -TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Section 1 Introduction Paragraph Page Number Number Purpose ................1-1 Description ................ 1-1 Specifications ..............1-2 Section 2 Installation Receipt of Equipment ............2-1 Recommended Storage Practice........ - Page 6 Page Recommended Filter Size ..........2-5 Bench Troubleshooting ............4-2 Sensor Troubleshooting ............. 4-2 Conversion Factors (Nitrogen Base) ......... 4-7 Restrictor Selection Guide..........4-11 Model 5860i Replacement Parts List ......... 5-3 Tool and Spare Part Kits for 5860i .......... 5-3...
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Page 7: Purpose
This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5860i Mass Flow Meter. This manual is organized into five sections: Section 1 - Introduction... -
Page 8: Typical Response To Flow Step Changes
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Figure 1-1 Typical Response to Flow Step Changes Standard Ranges Any full scale flowrate from 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard: 0°... - Page 9 Section 1 Introduction Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Ambient Temperature Limits Operating: 5 to 65°C (40 to 150°F) Non-Operating: -25 to 100°C (-13 to +212°F) Working Pressure 4500 psi (31.03 MPa) maximum Output Signal 0-5 Vdc into 2000 ohms or greater.
- Page 10 Section 1 Introduction Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 11: Receipt Of Equipment
E-mail: BrooksEu@BrooksInstrument.com 2-2 Recommended Storage Practice If intermediate or long-term storage is required for equipment as supplied by Brooks Instrument, it is recommended that said equipment be stored in accordance with the following: a. Within the original shipping container. b. Store in a sheltered area with the following conditions: 1. -
Page 12: Return Shipment
Figure 2-3 Maximum Allowable Loop Resistance 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory - for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). -
Page 13: Gas Connections
Model 5860i November, 2008 2-4 Gas Connections Standard inlet and outlet connections supplied on the Model 5860i are 1/ 4" compression fittings for flow rates up to 10 slpm, and 3/8" compression fittings for higher flow rates. Optional 1/8 compression, VCO... -
Page 14: Model 5860I Dimensions
109.7 1/4" Tube VCO 3.86 98.0 1/4" Tube VCR 4.18 106.2 3/8" Compression 4.44 Fitting 112.8 Figure 2-1 Model 5860i Dimensions PIN NO. FUNCTION COLOR CODE Set Point Return Black Volt Signal Output White Not Used Current Signal Output Green... -
Page 15: In-Line Filter
2-7 Electrical Interfacing To insure proper operation the Model 5860i must be connected per Figures 2-2, 2-3 and 2-4 and configured according to section 2-7. The following minimum electrical connections must be made for new... -
Page 16: Common Electrical Hook-Ups
X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 2-8 Configuring the PC Board NOTE: To obtain access to the jumpers, the electronics cover must be removed. Disconnect the power to the mass flow meter, and cables to the D-connector. -
Page 17: Theory Of Operation
Model 5860i November, 2008 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5860i works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube. (Refer to Figure 3-1) At zero or no flow conditions, the heat reaching each temperature sensor (one upstream and one downstream of the heater) is equal. -
Page 18: Flow Sensor Operational Diagram
Adjust for the desired flow and assume normal operation. 3-3 Zero Adjustment Each Model 5860i is factory adjusted to provide a 0 ±10mVdc or a 4 mAdc ±0.05 mA signal at zero flow. The adjustment is made in our calibration laboratory which is temperature controlled to 21.1°C (70°F ±2°F). -
Page 19: Calibration Procedure
3-4 Calibration Procedure NOTE 1: Calibration of the Model 5860i mass flowmeter requires the use of a digital voltmeter (DVM) a flow control valve or mass flow controller to set the flow rate and a precision flow standard calibrator such as the ®... -
Page 20: Model 5860I Calibration Connections
Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Figure 3-2 Model 5860i Calibration Connections Figure 3-3 Adjustment Potentiometer Location Figure 3-4 Fast Response Adjustment... - Page 21 Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Example: What is the percent of full scale error when full scale is equal to 100 sccm? Measured flow rate = 50.0 sccm Indicated flow rate = 48.5 sccm h.
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Page 22: Pc Board Jumper Location And Function
Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Figure 3-5 PC Board Jumper Location and Function... -
Page 23: Response (Flow Output Signal)
A solenoid valve is ideal for this, but a manual toggle valve will do. Keep the length of interconnecting tubing as short as possible between the valves and the Model 5860i since the tubing can have a dampening effect on the flow and the gas may not stop flowing the instant the downstream valve is closed as desired. - Page 24 Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 25: Bench Troubleshooting
Brooks Model 5860i November, 2008 4-1 General No routine maintenance is required on the Model 5860i other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4-2 Troubleshooting A. System Checks The Model 5860i is generally used as a component in gas handling systems which can be quite complex. - Page 26 Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-2.
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Page 27: Sensor Troubleshooting
Note: Do not attempt to disassemble the sensor. D. Cleaning Procedures Should the Model 5860i Mass Flow Meter require cleaning due to deposition, use the following procedures: 1. Remove the unit from the system. 2. Refer to Section 4-4 to disassemble the meter. -
Page 28: Sensor Tube
Assembly. If the sensor assembly is cleaned and reinstalled, a calibration check should be performed. Refer to Section 3-4. 4-4 Disassembly and Assembly The Model 5860i Mass Flowmeter may be disassembled in the field by the user for cleaning, re-ranging or servicing. Disassemble and assemble the meter as follows:... - Page 29 Note: Do not attempt to disassemble the sensor assembly. 4. Remove the backup rings (5) and the sensor assembly O-rings (4) from the flowmeter body (1). Using the Brooks O-ring removal tool will help prevent scratching the sealing surface. 5. Remove the adapter fittings (15) from the flowmeter body (1).
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Page 30: Use Of The Conversion Tables
X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 4. Install the sensor assembly (3) as shown in Figure 5-1 and secure with the two socket head cap screws (6) and washers (7). Tighten the screws to 28 in-lbs. -
Page 31: Conversion Factors (Nitrogen Base)
Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Acetylene 0.615 0.970 1.173 Mixture 0.998 1.018 1.293 Allene 0.478... - Page 32 Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME FORMULA SENSOR ORIFICE DENSITY FACTOR FACTOR (kg/m Hydrogen 1.008 0.269 0.090 Hydrogen Bromide 0.987 1.695...
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Page 33: Restrictor Sizing
115 mm water column pressure drop for a specific flow rate. This corresponds to the desired full scale flow rate. A list of restrictor assemblies used in the Model 5860i Series Mass Flowmeters is shown in Table 4-4. - Page 34 Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Example: The desired gas is Silane (SiH The desired full scale flow rate is 200 sccm. Sensor conversion factor is 0.679 from Table 4-3.
- Page 35 Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Table 4-4 Model 5860i Standard Restrictors Range Part Number sccm Air Equivalent Flow Size High ACLFE Wire Mesh 8.038 11.38 S110Z275* 11.25 15.93 S110Z276 15.75...
- Page 36 Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-12...
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Page 37: General
Section 5 Parts List Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2). -
Page 38: Model 5860I Parts Drawing
Section 5 Parts List Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 Figure 5-1 Model 5860i Parts Drawing... -
Page 39: Model 5860I Replacement Parts List
50 Feet Not Recommended 8-32 Mounting Screw Customer Supplied ***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown Table 5-2 Tool and Spare Part Kits for Model 5860i Model 5850/5860 Service Tool Kit Model 5850/5860 Break Out Board Assembly P/N S778D017AAA P/N S273Z668AAA... - Page 40 Section 5 Parts List Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 41 CE mærkning af Masse Flow udstyr Dato Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
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Page 42: Ce Certification Of Mass Flow Equipment
Date January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment. - Page 43 Janvier 1996. Messieurs, Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.
- Page 44 E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio Qualità dei cavi di segnale e dei relativi connettori: Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 100%.
- Page 45 Data Janeiro de 1996. O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética (directiva CEM 89/336/EEC). Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.
- Page 46 Date : January 1996 Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
- Page 47 Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG ® Brooks Model 5860i November, 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 48 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.
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