User Manuals: Brooks 5861E Mass Flow Controllers

User Manuals: Brooks 5861E Mass Flow Controllers

Manuals and User Guides for Brooks 5861E Mass Flow Controllers. We have 1 Brooks 5861E Mass Flow Controllers manual available for free PDF download: Operation Manual

Brooks 5861E Operation Manual

Brooks 5861E Operation Manual (44 pages)

Mass Flowmeter

Brand: Brooks | Category: Measuring Instruments | Size: 0 MB

Table of Contents

Table of Contents
5
Section 1 Introduction

7
- Purpose
  7
- Description
  7
- Specifications
  7
Section 2 Installation

9
- Receipt of Equipment
  9
- Recommended Storage Practice
  9
- Gas Connections
  10
- Installation
  10
- Return Shipment
  10
- D" Type Connector Pin Arrangement
  11
- Figures
  
  11
- Model 5861E Dimensions
  11
- In-Line Filter
  12
- Electrical Interfacing
  13
Section 3 Operation

15
- Theory of Operation
  15
- Operating Procedure
  16
- Zero Adjustment
  16
- Flow Sensor Operational Diagram
  16
- Calibration Procedure
  17
- Model 5861E Calibration Connections
  18
- Adjustment Potentiometer Location
  18
- Fast Response Adjustment
  18
- Response (Flow Output Signal)
  20
Section 4 Maintenance

21
- General
  21
- Troubleshooting
  21
- Sensor Tube
  24
- Disassembly and Assembly
  25
- Use of the Conversion Tables
  27
- Restrictor Sizing
  30
- Restrictor Element Assembly
  32
Section 4 Parts List

33
- General
  33
- Model 5861E Parts Drawing
  34

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