Flow Sensor Product Lineup - Omron D6F Series User Manual

MEMS Flow Chip
(Sensing）
Optimizing design of the three
compositional units is important.
3.2

Flow Sensor Product Lineup

OMRON's flow sensor lineup consists of three categories, Mass flow sensors that output a flow
rate, Flow velocity sensors that output a flow velocity and Differential pressure sensors that can
detect a small pressure drop.
For more information about differential pressure sensors, please refer to the application notes of
MDMK-13-0196.
MEMS Flow Sensor
A flow sensor's shape and size will differ depending on the type of gas to be measured, the flow
rate, and the port style. Please refer to the datasheet at the following URL for more information.
http://www.omron.com/ecb/products/search/?cat=5&did=1&prd=mems-flow&lang=en
3
Fig. 1 Example of Internal Structure of Flow Sensor
Mass Flow
D6F－□A /－□AB /－□N /－□L /－P□ Series
Flow Velocity
D6F－V□ / －W□ Series
Differential Pressure
D6F－PH Series
Sensor
Sensor
Sensor
D6F-series MEMS Flaw Sensor User's Manual (A286)
Driving / Amp. Circuit
(Heater / Output)
Flow Path