INDEX
1
OUTLINE ........................................................................................................................................ 2
2
WHAT IS A FLOW SENSOR? ....................................................................................................... 2
3
STRUCTURE ................................................................................................................................. 2
3.1
3.2
4
OPERATING PRINCIPLE .............................................................................................................. 4
4.1
4.2
5
PRODUCT FEATURES ................................................................................................................. 7
5.1
5.1.1
5.1.2
5.1.3
5.1.4
Repeatability .................................................................................................................... 9
6
USAGE OF FLOW SENSOR ........................................................................................................ 9
6.1
6.2
6.2.1
Screw type ..................................................................................................................... 10
6.2.2
Quick fastener type ........................................................................................................ 10
6.2.3
Manifold mount type ....................................................................................................... 11
6.2.4
Bamboo type.................................................................................................................. 12
6.3
6.3.1
6.3.2
Stabilization.................................................................................................................... 13
6.3.3
Measurement of high flow ............................................................................................. 13
6.3.4
6.4
6.4.1
6.4.2
The influence of dust ..................................................................................................... 15
6.4.3
6.4.4
6.4.5
6.4.6
6.4.7
6.5
7
GLOSSARY ................................................................................................................................. 19
8
1
.............................................................................................. 3
......................................................................................................... 9
........................................................................................... 14
............................................................................................................ 18
.................................................................................... 2
..................................................................... 4
.......................................................................... 6
...................................................................................... 7
.................................................................................. 10
................................................................................ 13
D6F-series MEMS Flaw Sensor User's Manual (A286)