6.3
Attention for piping and connection
6.3.1 Cleanup of the inflow gas
The fluid should be dry and clean without dust and oil mist. Dust and oil mist may cause
characteristic changes and failures. A filter or a mist separator should be installed upstream
of the pipe. Foreign substances into the pipe can cause failures. Please be careful when
handling so that the foreign substances do not enter the pipe after removing the sensor from
the packaging bag.
6.3.2 Stabilization
When using a diaphragm pump, pulsation can occur. This can adversely affect the
measurement accuracy of the flow rate. Some models in OMRON's flow sensor lineup have
an internal system for reducing the influence of pulsation, but it may not completely remove
the effect of pulsation. If the effect of pulsation is a concern, please use countermeasures to
reduce pulsation, such as changing to a pump less likely to cause pulsation or establish a
buffer tank and/or an orifice in the flow path.
6.3.3 Measurement of high flow
By making a bypass flow path by pulling some gas from the main flow path at a high flow
rate, it is possible to measure the gas flow rate of the whole piping by measuring the flow
rate in the bypass section. The differential pressure between inflow and outflow to the
bypass section is generated by making a resistor, such as an orifice in main flow path. Gas
will flow into the bypass flow path by this differential pressure.
An example of a bypass flow connection and differential pressure calculation to be
generated are shown in Fig. 15 and 16.
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Fig.15 Example of Bypass Flow Connection
Fig.16 Example of differential pressure calculation
D6F-series MEMS Flaw Sensor User's Manual (A286)