Omron D6F Series User Manual page 6

mass flow sensing method by using heat wire. It has a heater in the center of the chip, and the
upstream thermopile (A) and the downstream thermopile (B) are located on either side of the
heater, the base thermo-scope near the thermopile is made by a semiconductor process. The
cavity is formed at the bottom of the heater and the thermopile arrays, so then it is possible to
detect the heat from the heater effectively.
Upstream
Thermopile A
Heater
5
Base thermoscope
Contact Pad
Base Thermo-scope
Downstream
Thermopile B
Fig.3. Flow Sensor Chip Structure
Upstream
Thermopile A
Downstream
Thermopile B
D6F-series MEMS Flaw Sensor User's Manual (A286)
Heater
Thin film
Contact pad
Contact pad
Cavity