Glossary - Omron D6F Series User Manual

7

Glossary

MEMS

The MEMS, which stands for "Micro Electro Mechanical Systems", is a generic term for devices
that consist of micromechanical component parts, sensors, actuators, and electrical circuits that are
integrated on a silicon substrate, glass substrate or organic material and are fabricated by
semiconductor integrated circuit technology.
%F.S. and %RD

%FS is the accuracy for the output full scale in the detection range of flow rate (flow velocity)
and %RD is the accuracy for the output reading. In the case of %F.S. prescript, the output error is
constant for all detection ranges because the output full-scale is constant. On the other hand, in the
case of %RD prescript, the output error depends on the reading value.
Herein, the output full scale is the difference between the minimum output value and the maximum
output value in flow rate detection range and the output reading is the difference between the
minimum output value and the output value at a certain flow rate.
Also temperature characteristics may be expressed as the difference between the characteristics
of a specific temperature by %RD and %F.S.
%F.S. %F.S.
Flow Rate Flow Rate
Fig. 22 Accuracy in %F.S. prescript
%R.D. %R.D.
Flow Rate Flow Rate
Fig. 23 Accuracy in %RD prescript
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Δ output Δ output
F.S. F.S.
<%F.S. prescript>
An accuracy prescript for the output full scale
Ex) 1-5V output type @+/- 3%F.S.
Not dependent on output voltage
±3%F.S.=±3%×(5V-1V)=±0.12V
Δ output Δ output
R.D. R.D.
<%RD prescript>
An accuracy prescript for a reading value
Ex) 1-5V output type @+/- 3%RD
Output voltage is 3V at a certain flow rate
±3%RD=±3%×(3V-1V)=±0.06V
D6F-series MEMS Flaw Sensor User's Manual (A286)