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Summary of Contents for Omron D6F Series
- Page 1 MEMS Flow Sensor D6F-series User’s Manual MEMS Flow Sensor A286-E1-01...
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Page 2: Table Of Contents
INDEX OUTLINE ............................2 WHAT IS A FLOW SENSOR? ....................... 2 STRUCTURE ..........................2 ..................2 ASIC COMPOSITION OF FLOW SENSORS ....................3 ENSOR RODUCT INEUP OPERATING PRINCIPLE ......................4 MEMS ..............4 ASIC STRUCTURE OF FLOW SENSOR CHIP ................6 ETECTING PRINCIPLE OF MASS FLOW SENSOR PRODUCT FEATURES ......................... -
Page 3: Outline
OMRON flow sensors adopt a MEMS heat wire type, and have relatively excellent characteristics in comparison with other types of flow sensors. -
Page 4: Flow Sensor Product Lineup
Fig. 1 Example of Internal Structure of Flow Sensor Flow Sensor Product Lineup OMRON’s flow sensor lineup consists of three categories, Mass flow sensors that output a flow rate, Flow velocity sensors that output a flow velocity and Differential pressure sensors that can detect a small pressure drop. -
Page 5: Operating Principle
Table 2 Outline Specifications of D6F series Medium Series Name Flow Rate Type Port Style Features D6F-□A1 1 ～ 2 lpm Mass Flow Bamboo Joint Compact Size High Precision Low Flow Rate D6F-□N2 City gas*1 1 ～ 5 lpm Mass Flow... - Page 6 mass flow sensing method by using heat wire. It has a heater in the center of the chip, and the upstream thermopile (A) and the downstream thermopile (B) are located on either side of the heater, the base thermo-scope near the thermopile is made by a semiconductor process. The cavity is formed at the bottom of the heater and the thermopile arrays, so then it is possible to detect the heat from the heater effectively.
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Page 7: Detecting Principle Of Mass Flow Sensor
Detecting principle of mass flow sensor As shown in Fig.4, the constant current is flowing to the heater at the center of the chip and the heater becomes hot. When there is no flow, the heat distribution around the heater is symmetric, so Vu and Vd of the electromotive force from both thermopiles will be equal. -
Page 8: Product Features
Product Features Mass Flow Sensing ・ Wide Range Sensing Ability ・ Low Power Consumption ・ Ultra Small Size of MEMS Sensor ・ Characteristics of flow sensors Table3. Representative Specifications Example of Mass Flow Sensor (D6F-□□A1-110) Type Type D6F-01A1-110 Type D6F-02A1-110 Flow range＊1 0～1 L/min 0～2 L/min... -
Page 9: Detection Range Of Flow Sensors
5.1.1 Detection range of flow sensors The detection range of Flow Sensors shows the flow rate range of the gas to be detected. The lower limit voltage is the output at the lower limit and the upper limit voltage is the output at the upper limit of the detection range. -
Page 10: Permission Pressure Performance
[Pa m3 / s] or less. 5.1.4 Repeatability OMRON flow sensors have an excellent repeatability characteristic because they have a unique flow path design which results in a stable gas flow. The repeatability is not guaranteed but a reference value. -
Page 11: Port Style And Installation Method
P14 and P10. Please refer to the respective product datasheet to determine which type of quick fastener is recommended. Fig.9 Quick fastener P10 Outline Dimensions Fig.10 Quick fastener P14 Outline Dimensions <List of quick fastener type in Omron > D6F-□A7 ：Quick fastener type P10 D6F-□N7 ：Quick fastener type P10... -
Page 12: Manifold Mount Type
6.2.3 Manifold mount type The D6F-□A5 and D6F-P series have a manifold mount type. A manifold mount type, even if there is no space in the straight pipe direction can be installed in a small space. Below shows the dimensions of the bottom view and the connection example of the manifold mount type D6F-□A5. -
Page 13: Bamboo Type
6.2.4 Bamboo type A bamboo type is used in a state where the urethane tube or others is inserted. Inserting is very easy. It can be done by hand (no tools necessary). In addition, there is the benefit that the variation due to human error is less likely to occur. Both the D6F-□A1 series and D6F-P series are available in bamboo type. -
Page 14: Attention For Piping And Connection
When using a diaphragm pump, pulsation can occur. This can adversely affect the measurement accuracy of the flow rate. Some models in OMRON’s flow sensor lineup have an internal system for reducing the influence of pulsation, but it may not completely remove the effect of pulsation. -
Page 15: Consideration Of The Laminar Flow
6.3.4 Consideration of the laminar flow If a pipe has sufficient straight section before and after the sensor, the fluid inside the pipe will achieve laminar flow. However, the fluid becomes turbulent when there is not enough straight section of pipe. In general, the following requirements are needed in order to achieve laminar airflow inside a pipe. -
Page 16: Temperature Characteristics
6.4.1 Temperature characteristics Basic characteristics of OMRON’s flow sensors specify the output characteristics and the accuracy at the conditions of 25±5℃ but the flow sensor has temperature characteristics. If the ambient temperature is changed, the output characteristics of the flow sensor will vary. -
Page 17: The Influence Of Pressure And Temperature
6.4.3 The influence of pressure and temperature OMRON’s flow sensors can measure a mass flow rate. In order to comply with the combined gas law, even in the same gas volume flow, the mass flow rate becomes low when the pressure is low or the temperature is high. On the other hand, the mass flow rate becomes high when the pressure is high or the temperature is low. -
Page 18: Output Changes In Various Gases
6.4.6 The behavior in over flow rate range OMRON’s flow sensors define the assumed flow rate range (wind speed range in air flow sensor) in each type. Even if the flow rate is below the minimum or the flow rate is over the maximum, there is little adverse effect on the sensor itself. -
Page 19: Application Example
Application example Table 6 Application Example Category Application Usage Air Conditioner HVAC / VAV Clogged Filter Detection Air Filter Leak Detection Flow Rate Detection Burning Control House Hold Fuel Cell Control for Gas Mixing Boiler Measurement of Gas Consumption AMR (Automatic Meter Reading) AMI (Advanced Metering Infrastructure) Medical Equipments Oxygen Concentration Device Respirator... -
Page 20: Glossary
Glossary MEMS The MEMS, which stands for "Micro Electro Mechanical Systems", is a generic term for devices that consist of micromechanical component parts, sensors, actuators, and electrical circuits that are integrated on a silicon substrate, glass substrate or organic material and are fabricated by semiconductor integrated circuit technology. - Page 21 On the other hand, the mass flow rate is the mass of gas flowing per unit time. It does not depend on the temperature and the pressure. It is described as kg/s, kg/min in case of SI unit. OMRON’s MEMS flow sensor will output an equivalent value with the mass flow rate.
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Page 22: Warranty And Limited Liability
Please understand followings as to your adoption and use of Omron Products (1) Please use the product in conformance to the Conditions, including rating and performance. (2) Please confirm the Fitness and decide whether or not Omron Products are able to be adopted in the User Application. - Page 23 (d) Applications under conditions or environment which are not described in this specification (5) Omron Products shown in this catalogue are not intended to be used in automotive applications (including two wheel vehicles). Please DO NOT use the Omron Products in the automotive application.
- Page 24 Electronic and Mechanical Components Company Regional Contact Americas Europe https://www.components.omron.com/ http://components.omron.eu/ Asia-Pacific China https://ecb.omron.com.sg/ https://www.ecb.omron.com.cn/ Korea Japan https://www.omron-ecb.co.kr/ https://www.omron.co.jp/ecb/ © OMRON Corporation 2018 All Rights Reserved. Cat. No. A286-E1-01 In the interest of product improvement, specifications are subject to change without notice. 0918 (0918)(O)
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