Omron D6F-PH User Manual
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Omron D6F-PH User Manual

Mems differential pressure sensor
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MEMS Differential pressure Sensor
D6F-PH
User's Manual
MEMS Differential pressure Sensor
A288-E1-01

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Summary of Contents for Omron D6F-PH

  • Page 1 MEMS Differential pressure Sensor D6F-PH User’s Manual MEMS Differential pressure Sensor A288-E1-01...

  • Page 2: Table Of Contents

    Example of Sensing data ....................19 8-3. Sensor Operation flow chart .................... 20 8-4. I2C Instruction for Sensor Operation ..................21 10. Sample Source Code .......................24 D6F_PH_Sample.h ...................... 24 10-1. D6F_PH_Sample.c....................... 25 10-2. 11. WARRANTY AND LIMITED LIABILITY..................32 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 3: Outline

    Fig.1 shows the internal cross-section view of the MEMS differential pressure sensor (D6F-PH). Air will flow from one inlet and out the other passing over the MEMS flow chip surface. The MEMS chip is able to measure the airflow as air passes over the chip.

  • Page 4: Principle Of Pressure Detection

    4. Principle of Pressure detection By using a thermal mass flow sensor, Omron’s MEMS differential pressure sensor can detect fine changes in differential pressure. Fig. 3 Principle of differential pressure sensor (a) and relationship between flow rate and differential pressure (b) 5.
  • Page 5 Supply Voltage Current Consumption Vcc=3.3V、25degC Frequency of SCL FAST Mode （Note）Span accuracy and zero point accuracy are the independence errors, and are not satisfied at the same time. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 6: Usage

    Lower Pressure side Fig. 5 Recommended tube connection method of D6F-PH Here, the inner diameter of the bypass tube which is connected to the D6F-PH is 4[mm] and its length is 800[mm] or less. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 7: Electrical Connection Method Of D6F-Ph

    6-2. Electrical connection method of D6F-PH For the I2C output, the D6F-PH will require a pull-up resistor to each clock line(SCL) and data line (SDA). A pull-up resistor of 2.2[kΩ] (recommended value) should be implemented between the Vcc as shown in Fig.6. In addition, please adjust the pull-up resistor’s value depending on the transfer rate of SCL and the I2C wire length.

  • Page 8: Specification Of Communication

    Compensated Flow Configuration rate Register D052h COMP_DATA1_L Register D061h TMP_H Internal Temperature Register D062h TMP_L D065h REF_FLOW1_H Sensor Reference Flow Register D066h REF_FLOW1_L D067h THRESH_FLOW1_H Sensor Threshold A/D converter Flow Register D068h THRESH_FLOW1_L D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 9 Read Buffer 2 Data read from Address + 2 Read Buffer 3 Data read from Address + 3 Initialize Power Sequence Hardware reset control Upper byte：bit[15:8] of 16bit data, Lower byte：bit[7:0] of 16bit data D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 10: Access Address Registers (00H - 01H)

    For read requests the bridge controller stores the read data into data buffer. • D_byte_cnt3 [3：0] Transfer data byte count. It only supports 1, 2, 3, 4 data byte transfer. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 11: Write Buffer Registers (03H - 06H)

    ・Write 1Ch to address = 02h of interface configuration registers.(1byte, new request, read) [Note] Read address = 02h. If Req = 0 (02h[3]), controller is finished with read data[0] from address = 07h. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 12: Initialize (0Bh)

    This hardware reset function is similar to the power reset function. Notes · When using hardware reset, set bits 0 to 6 to “0”. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 13: Example Of I2C Access Commands

    This data will be stored in serial D8h (6Ch (7b)+ 0) configuration register “07h” & “08h” .(Read Buffer 0 / Read Buffer 1) Re-Start Slave Address Read Data H Read Data L STOP D9h (6Ch (7b)+ 1) D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 14: Description Of Registers

    MS – MCU start – Begin execution of measurement or MCU mode based on the state of DV_PWR. • 0 = Stop Sequences are stopped and MCU clock is turned off. • 1 = Start The MCU clock is started and the MCU mode is executed. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 15: Flags (D046H)

    HV2 and OS2 are reserved bits. In case of write access, you should set to “0”. If you want to read flag register, it is recommended to read twice in order to avoid conflict with the MCU update. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 16: Crc Calculation Control ( D049H )

    CRC8 polynomial x^8 + x^5 + x^4 + 1. The following is an example of I2C access 2 byte read using CRC function. Fig 9. Example of 2byte read with CRC Fig.8 Example of 2byte read with CRC D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 17 0 0 0 0 1 1 1 0 1 0 0 0 0 1 0 0 1 1 0 0 0 1 0 1 1 1 0 0 0 0 1 Polynomial bit sequence i l bit Fig.9 XOR operation example of CRC-8 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 18: Data Registers (D051H-D068H)

    Description D051h COMP_DATA1_H DATA<15:8> Compensated Flow rate D052h Register COMP_DATA1_L DATA<7:0> D061h TMP_H DATA<15:8> Internal Temperature D062h Register TMP_L DATA<7:0> For additional information, please refer to Section 8: Explanation of output data. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 19: Explanation Of Output Data

    Where, Tv is Converted temperature value in the degC format, and Rv is Register content stored in the Temperature Data register. Note: Temperature data is for reference ONLY. Its accuracy is not specified in the device specifications. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 20: Example Of Sensing Data

    Table14. Temperature Data registers content vs. Temperature value Address of Registers Value of Registers Converted Temperature values TMP_H TMP_L D061h D062h 2B8Dh 11149 25.0 degC 2EFFh 12031 48.6 degC 26BBh 9915 -8.0 degC D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 21: Sensor Operation Flow Chart

    Command of data acquisition Data acquisition Command of data acquisition β α Time Slave Start of data acquisition Start of data acquisition COMP_DATA Fig.11 Time axis image view of the differential pressure measurement D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 22: I2C Instruction For Sensor Operation

    33ms. I2C command: Write 06h to the Sensor Control Register (D040h) (MS=1&MCU_on) START Slave Address Access Address Reg Address H Reg Address L D8h (6Ch (7b)+ 0) Serial Ctrl Write Data STOP D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 23 2byte of Compensated flow data. START Slave Address Access Address D8h (6Ch (7b)+ 0) Re-Start Slave Address Read Data H Read Data L STOP D9h (6Ch (7b)+ 1) D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 24 I2C command: Write 80h to the Power Sequence Register (0Dh). START Slave Address Access Address Write Data STOP D8h (6Ch (7b)+ 0) The hardware reset after the execution, bit 7 is cleared to "0" automatically. D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 25: Sample Source Code

    10. Sample Source Code The following is a sample source code of the D6F-PH control in the case of using STM32microcontroller. The I2C control unit will need to be adjusted to whatever microcontroller is used. 10-1. D6F_PH_Sample.h /*=================================================*/ /* D6F-PH Digital Flow Sensor Header File (using STM32) * :Copyright: (C) OMRON Corporation, Microdevice H.Q.

  • Page 26: D6F_Ph_Sample.c

    10-2. D6F_PH_Sample.c /*=================================================*/ /* D6F-PH Digital Flow Sensor Sample Code (using STM32) * :Copyright: (C) OMRON Corporation, Microdevice H.Q. * :Auther * :Revision: $Rev$ * :Id: $Id$ * :Date: $Date$ * All Rights Reserved * OMRON Proprietary Right *=================================================*/ #include "stm32f10x_i2c.h"...
  • Page 27 = ((rd_fifo - 1024) * RANGE_MODE *10/ 60000) - RANGE_MODE*10/2; /* convert to [Pa] */ return rd_flow; /*=======================================================*/ /* Temperature measure Function /* Usage : Temp_meas() /* Argument : NULL /* Return value : x10 Temperature /*=======================================================*/ D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 28 /* Stop condition */ return 0; /*=================================================*/ /* I2C Read command /* Usage : I2C_RD() /* Argument : char add (7bit Slave Address) char *dbuf (Write data) unsigned char n (Number of bytes)*/ D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 29 = {0, 0}; n_w = n - 1; /* I2C Pre-WR Access */ I2C1_Start(); /* Start condition */ I2C1_MastrSel(add, 0); /* Slave Address 7bit => 8bit */ while (n_w--) { I2C1_senddata(dbuf[i]); /* Send Data D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 30 /* Send Data i++; I2C1_Stop(); /* Stop condition */ adc_wait(5); /* 5msec wait */ I2C1_Start(); /* Start condition */ I2C1_MastrSel(add, 0); /* Slave Address 7bit => 8bit */ I2C1_senddata(dbuf[n-1]); /* Word Address D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 31 I2C_Init(I2C1, &I2C1_InitStructure); // Initialize with above parameters I2C_Cmd(I2C1, ENABLE); void I2C1_Start(){ I2C_GenerateSTART(I2C1,ENABLE); // issue start condition while(!I2C_CheckEvent(I2C1,I2C_EVENT_MASTER_MODE_SELECT)); void I2C1_MastrSel( uint8_t address, uint8_t RW){ uint8_t direct; uint32_t event; direct =(RW == 0)?I2C_Direction_Transmitter : I2C_Direction_Receiver; event =(RW 0)?I2C_EVENT_MASTER_TRANSMITTER_MODE_SELECTED I2C_EVENT_MASTER_RECEIVER_MODE_SELECTED; D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 32 // wait ACK return I2C_ReceiveData(I2C1); // receive 4th 8bit data void I2C1_Stop(){ I2C_GenerateSTOP(I2C1, ENABLE); // put stop condition void I2C1_AckEn(){ I2C_AcknowledgeConfig(I2C1, ENABLE); // ack enable void I2C1_AckDis(){ I2C_AcknowledgeConfig(I2C1, DISABLE); // ack disable D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

  • Page 33: Warranty And Limited Liability

    (2) Please confirm the Fitness and decide whether or not Omron Products are able to be adopted in the User Application. (3) Omron will not warrant any items in 1.(5) (a) to (d) of User Application nor the Fitness. (4) If you use Omron Products in the application below, please ensure followings; (i) allowance...
  • Page 34 7. EXPORT CONTROLS Buyer shall comply with all applicable laws and regulations of Japan and/or other related countries at the time of export or provision to non-citizens of Omron Products or their technical information. EC200E D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
  • Page 36 Electronic and Mechanical Components Company Regional Contact Americas Europe https://www.components.omron.com/ http://components.omron.eu/ Asia-Pacific China https://ecb.omron.com.sg/ https://www.ecb.omron.com.cn/ Korea Japan https://www.omron-ecb.co.kr/ https://www.omron.co.jp/ecb/ © OMRON Corporation 2018 All Rights Reserved. Cat. No. A288-E1-01 In the interest of product improvement, specifications are subject to change without notice. 0918 (0918)(O)

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