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Summary of Contents for Pfeiffer Vacuum TC 750
- Page 1 Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Turbomolecular Pumps with Electronic Drive Unit TC 750 TPH 1501 P / PC TPU 1501 P / PC...
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Page 2: Table Of Contents
3.6. Connecting The Electronic Drive Unit TC 750 11 3.7. Installing The Power Supply ......11 Service ........... 24 3.8. Installing The Cover Plate For The TC 750..12 Maintenance/Replacement..25 3.9. Connecting The Venting Valve......13 8.1. Replacing The Lubricant ......... 25 3.10. -
Page 3: Safety Instructions
(accessory). Warning, danger of personal injury. WARNING ☞ Without the cover plate for the TC 750 the unit has been accredited protection class IP 30. When the unit is operated in environments which require other protection classes, the necessary measures must be taken. -
Page 4: Understanding The Pumps
Fore-vacuum side: Oil circulatory lubricated ball bearing tion with the valid specification. with ceramic balls. – Without the cover plate for the TC 750 the pumps may only be operated providing the ambient conditions in complian- ce with Protection Type IP 30 are observed. -
Page 5: Improper Use
– Venting with rates higher than in Section 4.6. stated. motor and bearing area – Operating the pump without the cover plate for the TC 750 Suffix”C C “: Surface protection for passive protection... -
Page 6: Installation
HPU 001, the remote plug 8d (please see Section 2.1.) on Connecting via a Pfeiffer Vacuum vibration compensator the TC 750 should be disconnected and then proceed in The high vacuum side can be flanged onto the vacuum cham- accordance with the corresponding operating instructions. - Page 7 ISO-F flange The components for installing the tuebopumps are special Hexagon screw with flange Centering ring, coated designs from Pfeiffer Vacuum Splinter shield – The minimum strength of 170 N/mm of the flange material Protective screen needs to be observed.
- Page 8 Variant 3 - Stud screw and clearance hole Hexagon screw and clearance hole ➡ If used: Insert the splinter shield and protective screen in Stud screw and clearance hole the high vacuum flange with the clamping lugs downward (towards the pump). ISO-F flange ➡...
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Page 9: Connecting The Fore-Vacuum Side
(see Section 11. Accessories) whose control dirty and the lubricating pump not properly function. The line is connected to ”FV PUMP” on the TC 750. deviation of the fore-vacuum flange from the perpendicular must not exceed the following values (view onto the fore-... -
Page 10: Connecting The Cooling Unit
When the turbopump is water cooled the enclo- CAUTION Cooling with Recycled Water Cooling Unit TZK sed cover plate for the TC 750 must be installed by an electrical specialist, in order to attain Cooling water connection 31 Supply line protection class IP 54 (please see Section 3.8.). -
Page 11: Connecting The Electronic Drive Unit Tc 750
(power Section 11. Accessories). supply specifications available on request). ➡ Unscrew screw with tooth lock 8c from the TC 750 (above the connection X4) 1) . Operations with TPS 600/DCU 600 only possible PLEASE NOTE ➡... -
Page 12: Installing The Cover Plate For The Tc 750
When the turbopump is water cooled the enclosed cover 1 piece E 153/8 1 piece E 153/11) plate for the TC 750 m m u u s s t t be installed by an electrical specia- list, in order to attain protection class IP 54. PG 16 for... -
Page 13: Connecting The Venting Valve
Electrical connection ➡ Plug control lead 42a into the connection ”VENT“ of the Connecting the sealing gas valve TC 750 (8) on the turbopump. Locking screw sealing gas connection 15 Seal Release for venting is executed via remote plug pin 2 (pre-set 66 Sealing gas valve on delivery, please see Section 4.9.) -
Page 14: Connecting The Remote Control Unit
”REMOTE” on the TC 750 via the 15 pole D-Sub connector. Shielded cable must be used. Shielding is on the plug side of the TC 750 connected to the TC 750 casing. The inputs 2 - 6 are activated by connecting them to the + 24V on pin 1 (active high) (please see Section 3.13. -
Page 15: Connecting The Serial Interface Rs 485
HPU 001 o o r r – using a level converter – an external computer D- (pin7/RS 485) to the bus. can be connected via the connection ”RS 485” on the TC 750 ➡ The bus must be completed at both ends. -
Page 16: Connections Diagram
3.13. Connections Diagram TC 600 TC 750 n.c. +24 VDC* / max. 200 mA (supply voltage, DCU) n.c. n.c. RS 485 RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. +24 VDC*/max. 50 mA Venting release Motor TMP... -
Page 17: Operations
➡ Open cooling water supply and check flow. screw 71. ➡ Plug connecting cable 8a (see Section 11. Accessories) into the TC 750 and connect with Power Unit TPS 600 on X2 (please see Section 3.6.). Filling in the lubricant... -
Page 18: Switching On
Argon; – Gas mode “1" for all lighter gases. Works setting: Gas mode “0” ➡ Set the applicable gas mode on the TC 750 via the DCU or HPU (please refer to the respective operating Instructions). Pumping gases with molecular mass ≥ 40 with... -
Page 19: Operation With Cooling Water Temperature ≠ 25°C
Operation with cooling water The following gas type characteristics lines enable you to adjust the power properly. At a cooling water temperature temperature ≠ ≠ 25°C between 25 °C and 35 °C you have to draw your own gas type This chapter does only apply to the TPH version. -
Page 20: Circulatory Lubrication
Second stage: venting with an optionally large venting HPU 001, the remote plug 8d (see Section 10.) valve. on the TC 750 should be disconnected. The valve cross-section for a venting rate of 15 mbar/s must be compatible with the size of the vacuum chamber. -
Page 21: Operations With The Remote Control Unit
(standby ON) or at its nominal rotation speed Remote control operations can be performed via the connec- (standby OFF). tion with the designation “REMOTE” on the TC 750. The connection is via a 15 pole D-Sub connector. Pin arrangement and remote plug functions please see table Pumping Station under Section 3.11.. -
Page 22: Monitoring Operations
5. Monitoring Operations 5.1. Operations Display Via LED 5.2. Turbopump Temperature Monitoring Certain operations modes of the turbopump and the TC 750 Where impermissible motor temperatures are involved or the can be ascertained via the two integrated LEDs located on temperature of the casing is too high, the motor current is the front panel of the TC 750. -
Page 23: What To Do In Case Of Breakdowns
• Check the power supply mains connection – Supply voltage short circuit to earth • Check the power supply voltage for short circuit to earth 1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble. -
Page 24: Service
The turbopump and the Electronic Drive Unit PLEASE NOTE TC 750 form a single unit and must therefore be returned complete for repair purposes. Before returning the unit it should be ensured that the... -
Page 25: Maintenance/Replacement
Electronic Drive Unit TC 750 yourself. screw 71. Please contact your local Pfeiffer Vacuum Service for all other maintenance and service work. Ensure no mechanical forces act on the Filling in the lubricant CAUTION Electronic Drive Unit TC 750. -
Page 26: Cleaning The Lubricant Pump
Removing the lubricant pump from the turbopump 77 Lubricant pump 83 Socket cap screw (4 Stück) ➡ Assemble the new Electronic Drive Unit TC 750 on the turbopump and connect again. Please take into account that after replacement CAUTION... -
Page 27: Technical Data
2) Measured at a helium concentration of 20%, 10 s measurement time 8) Protection class IP 54 is afforded for the Electronic Drive Unit TC 750 by instal- 3) If the pump is to be operated with more than 50% of the maximum gas load, ling the provided cover plate (see Section 3.8.). -
Page 28: Dimensions Diagram
9.1. Dimensions Diagram TPH 1501 P / P C DN 250 ISO-K G1/8" Ø290 DN 250 ISO-K Ø264 (M6) DN 40 ISO-KF Ø200... - Page 29 TPH 1501 P / P C DN 250 ISO-F G1/8" DN 250 ISO-F Ø335 Ø264 (M6) DN 40 ISO-KF Ø200...
- Page 30 TPU 1501 P / P C DN 250 CF-F G1/8" Ø305 DN 250 CF-F Ø264 (M6) DN 40 ISO-KF Ø200...
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Page 31: Spare Parts
Size Number Comments Ordering Quantity Spare parts TPH/TPU 1501 P, TPH/TPU 1501 P C Electronic Drive Unit TC 750 PM C01 713 Remote plug P 0920 668 E Seal ring for water connection P 3529 133 -A Lubricant filler screw N 3191 382 X see Section 4. -
Page 32: Accessories
PM 016 486 -T Other accessories Connecting cable, TC 750-TPS/DCU PM 051 103 -T other lengths on request Connecting cable, TC 750-TPS/DCU, shielded PM 051 143 -GT other lengths on request Power Supply – TPS 600; for fitting to walls... -
Page 33: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. - Page 34 "Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. TPH 1501 P / TPH 1501 P C / TPU 1501 P / TPU 1501 PC...
- Page 35 Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
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