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Instruction Manual
Gases other than nitrogen / air
2.6
WARNING! Do not attempt to use with gases other than nitrogen (N
factor data tables. InstruTech gauges and modules are calibrated for direct readout of nitrogen or air. Do not
attempt to use with other gases such as argon (Ar) or carbon dioxide (CO
correction factors to both the displayed pressure and the analog output to determine the true measured
pressure. This is particularly critical when using convection gauges to measure pressure of gases other than
N
/Air.
2
WARNING! Do not use the IGM402 in an explosive atmosphere or in the presence of flammable gases,
vapors or fumes. Do not use this device to measure the pressure of explosive or combustible gases or gas
mixtures. The sensor filaments operate at incandescent temperatures and could become an ignition source.
This could cause an explosion which could result in serious injury or death.
WARNING! Do not use the CVG101 in an explosive atmosphere or in the presence of flammable gases,
vapors or fumes. Do not use this device to measure the pressure of explosive or combustible gases or gas
mixtures. The sensor wire in the gauge normally operates at 125
temperature could exceed the ignition temperature of certain combustible gases and gas mixture. This could
cause an explosion which could result in serious injury or death.
3
Installation
Mechanical Installation - IGM402 ionization gauge
3.1
Mount the IGM402 as close as possible to the pressure you want to measure. Long or restricted, small diameter
tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay
in response to pressure changes. Mounting the IGM402 too close to a gas source inlet may also cause
measurement and control instability.
The IGM402 can be mounted in any orientation, however, if possible, mount the gauge with port down to help
minimize the effect of any particles or condensation collecting in the gauge.
Do not mount the IGM402 where it will be subjected to excessive vibration. Vibrations may cause unstable
readings, measurement errors and possible mechanical stress to components in the IGM402.
Shield the IGM402 near ion or electron sources such as an electron beam or in a sputtering system.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps.
Fittings/Flanges - follow the fitting/flange manufacturer's recommendations for installation and use.
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below
-7
1.00 x 10
Torr (1.33 x 10
InstruTech
-7
-5
mbar, 1.33 x 10
Pa).
) or air without referring to correction
2
), unless you have you have applied
2
o
C, but if malfunction should occur, the wire
IGM402 Hornet
Page 12
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Troubleshooting
