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Related Manuals for Instrutech CVM211
Summary of Contents for Instrutech CVM211
- Page 1 InstruTech® CVM211 Convection Vacuum Gauge Module The Stinger™ User Manual (Unit of measure in bar / mbar) InstruTech 1475 S. Fordham St. Longmont, CO 80503 Phone: +1-303-651-0551 Fax: +1-303-678-1754 E-mail info@instrutechinc.com www.instrutechinc.com p/n 000452-109...
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Page 2: Shock Hazard
In no event will InstruTech be responsible or liable for indirect or consequential damages that result from the use or application of this equipment. - Page 3 Copyright © 2011 by InstruTech All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by InstruTech.
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Page 4: Table Of Contents
Instruction Manual CVM211 Stinger Table of Contents Introduction / General Information ......................3 Description ............................3 Specifications ..........................3 Dimensions ............................4 Part Numbers ..........................4 Options & Accessories........................4 Important Safety Information .......................6 Safety Precautions - General ......................6 Safety Precautions - Service and operation ..................7 Electrical Conditions ........................7... - Page 5 Instruction Manual CVM211 Stinger Analog Output .............................19 Non-Linear Analog Output ......................20 Log-Linear Analog Output ......................21 Service ..............................23 Calibration ...........................23 Maintenance ..........................23 Troubleshooting ..........................23 Contamination ..........................24 Module and sensor replacement ....................25 Factory Service and Support .......................26 Warranty ............................26 InstruTech Page 2...
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Page 6: Introduction / General Information
MKS Instruments / Granville-Phillips® "S-curve". The other model provides a Log-linear analog output, and one setpoint relay. A built-in display provides a convenient user interface for setup and operation of the vacuum gauge. This User Manual is intended to be used with CVM211 displaying pressure in bar / mbar units of measure. -
Page 7: Dimensions
® 1/2 in. Cajon 8VCR Part Numbers With Log-Linear With Non-Linear CVM211 Fittings / Flanges Analog Output Analog Output CVM211GAA-B-L CVM211GAA-B-NL Combination 1/8 in. NPT male - 1/2 in. tube (use 1/8 in. NPT male or 1/2 in. O.D. O-ring compression) - Page 8 Instruction Manual CVM211 Stinger Options & Accessories Continued Part Number PS401-UX For Use With User This variation of the PS401 power supply may PS401-UX be used when an AC plug that is not listed Supplied AC Power Cord above is required. The conventional...
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Page 9: Important Safety Information
CVM211 Stinger Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and instructions. -
Page 10: Safety Precautions - Service And Operation
The CVM211 module vacuum gauge must be connected directly to a good quality earth ground. Use a ground lug on the CVM211 gauge vacuum connection / flange if necessary. -
Page 11: Overpressure And Use With Hazardous Gases
The CVM211 vacuum gauge module is not intended for use at pressures above 1333 mbar (20 psia); DO NOT exceed < 2 ½ bars (35 psig) pressure inside the sensor. If your chamber goes to higher pressures, you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions. -
Page 12: Installation
Mounting the CVM211 too close to a gas source inlet may also cause measurement and control instability. Do not mount the CVM211 near a source of heating or cooling, such as heaters or air conditioning vents. Mount the CVM211 with its main axis horizontal (see diagram below). Pressure reading errors may occur above 1 mbar if the unit is not mounted horizontally. -
Page 13: Electrical Installation
A good recommended practice is to remove power from any cable prior to connecting or disconnecting it. The InstruTech CVM211 will directly replace Granville-Phillips® Mini-Convectron® modules that have a 9-pin D-sub connector (DE-9P), and you can use your existing cables and electronics. -
Page 14: Setup And Operation
Instruction Manual CVM211 Stinger Setup and Operation Initial Setup Two of the most important steps for the initial setup of the gauge are to set zero and set span (atmosphere) as described in the Programming section 4.3 below. This will ensure proper operation of the gauge and accurate pressure measurements. -
Page 15: User Interface Basics
During setup, and operation, be sure to consider the bar/mbar LEDs. It is important to note the unit of measure (engineering units) LED status on the front panel of the CVM211 to correctly interpret the displayed pressure. The following table summarizes the mbar/bar LED indicator status:... -
Page 16: Programming
CVM211 Stinger Programming 1. With the CVM211 in the normal pressure display mode, press and hold <select> for 3 seconds. 2. The readout displays the value of the 'setpoint turn-on’ pressure. The relay energizes when the pressure is below this value [Factory default = 0.1 mbar]. -
Page 17: Return To Factory Default Settings
Instruction Manual CVM211 Stinger Return to Factory Default Settings You can reset all values to the original factory default settings by holding the <up> key for 5 seconds. The display will read "dEF" until 5 seconds has passed, at which point all user settings will be replaced by the original factory default values and the display will return to the normal pressure display. - Page 18 Instruction Manual CVM211 Stinger User Interface Map Normal pressure display To enter setup mode, press and hold <select> for 3 seconds. Readout displays value of "setpoint turn-on" pressure. Relay energizes when pressure is below this value [Factory default = 0.1 mbar].
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Page 19: Using The Gauge With Different Gases
Under normal conditions the voltages and currents in InstruTech convection gauges are too low to cause ignition of flammable gases. However, under certain failure conditions, sufficient energy could be generated to cause flammable vapors or gases to ignite or explode. - Page 20 The X-axis is the pressure reading indicated by the convection gauge under test. This chart shows readings for an InstruTech convection gauge (CVG) and Granville-Phillips® Convectron® gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable.
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Page 21: Display
Instruction Manual CVM211 Stinger Display The table below shows the displayed readings at various pressures for selected gases. Displayed Pressure Readings vs. True Pressure for selected gases Pressures shown in bold italic font in the shaded areas are in x 10 mbar. - Page 22 Instruction Manual CVM211 Stinger Analog Output The CVM211 is provided with either a non-linear or a log-linear analog output. Non-Linear Output The first Convectron® gauge controllers produced a non-linear output signal of 0.375 to 5.659 Vdc for 0 to 1000 Torr of N , roughly in the shape of an "S"...
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Page 23: Non-Linear Analog Output
Instruction Manual CVM211 Stinger Non-Linear Analog Output The following table is for use with CVM211 Stinger part numbers ending with the letter “NL” providing a non- linear analog output. Non-Linear analog output for CVM211GAA-B-NL through CVM211GHA-B-NL True Pressure Freon12 Freon22... -
Page 24: Log-Linear Analog Output
CVM211 Stinger Log-Linear Analog Output The following table is for use with CVM211 Stinger part numbers ending with the letter “L” providing an output voltage that is linear with respect to the log of pressure. Log-Linear analog output for CVM211GAA-B-L through CVM211GHA-B-L... - Page 25 Instruction Manual CVM211 Stinger Chart of the calculated pressures using the formulas and data for the log-linear output signal for nitrogen from the previous page. InstruTech Page 22...
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Page 26: Service
1.33 x 10 mbar. Care should be exercised when using gases other than nitrogen (N Maintenance In general, maintenance is not required for your InstruTech module. Periodic performance checks may be done by comparing the gauge to a known reference standard. Troubleshooting... -
Page 27: Contamination
Thermal vacuum gauges may be available with different sensor materials that are not as reactive with your particular process gases. The standard gold plated tungsten sensor used in the InstruTech convection gauge is offered for use with air and inert gases such as N , argon, etc. -
Page 28: Module And Sensor Replacement
(within specified limits) during the process cycle. Particles in the process chamber may be swept into the gauge during the vent cycle. The CVM211 has a screen built into the gauge port to help keep the largest particles out of the gauge. In very dirty applications, or where particles are small enough to get through the screen, an additional filter installed on the inlet may help prolong the gauge life. -
Page 29: Factory Service And Support
(examination of which shall disclose to SELLER's satisfaction that it is defective) returned, to SELLER's plant, properly identified within twenty four (24) months (unless otherwise noted) after the date of shipment from InstruTech Plant. BUYER must obtain the approval of SELLER and a return authorization number prior to shipment. - Page 30 InstruTech® 1475 S. Fordham St. Longmont, CO 80503 Phone +1-303-651-0551 Fax +1-303-678-1754 E-mail info@instrutechinc.com www.instrutechinc.com p/n 000452-109...