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5860i
Brooks 5860i Manuals
Manuals and User Guides for Brooks 5860i. We have
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Brooks 5860i manual available for free PDF download: Installation And Operation Manual
Brooks 5860i Installation And Operation Manual (48 pages)
Mass Flow Meter
Brand:
Brooks
| Category:
Measuring Instruments
| Size: 0 MB
Table of Contents
Table of Contents
5
Purpose
7
Description
7
Specifications
7
Typical Response to Flow Step Changes
8
Receipt of Equipment
11
Recommended Storage Practice
11
Maximum Allowable Loop Resistance
12
Return Shipment
12
Gas Connections
13
Installation
13
Model 5860I Dimensions
14
D" Type Connector Pin Arrangement
14
In-Line Filter
15
Electrical Interfacing
15
Recommended Filter Size
15
Common Electrical Hook-Ups
16
Theory of Operation
17
Flow Sensor Operational Diagram
18
Operating Procedure
18
Calibration Procedure
19
Model 5860I Calibration Connections
20
Adjustment Potentiometer Location
20
Fast Response Adjustment
20
PC Board Jumper Location and Function
22
Response (Flow Output Signal)
23
Bench Troubleshooting
25
General
25
Sensor Troubleshooting
27
Sensor Tube
28
Use of the Conversion Tables
30
Conversion Factors (Nitrogen Base)
31
Restrictor Sizing
33
General
37
Model 5860I Parts Drawing
38
Model 5860I Replacement Parts List
39
CE Certification of Mass Flow Equipment
42
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