Cleaning A New Pump; Cleaning Safety; Disassembly For Initial Cleaning; Reassembly After Initial Cleaning - Agilent Technologies HS-16 Instruction Manual

High throughput diffusion pumps
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Cleaning a New Pump

NOTE
A new pump requires cleaning only
if the desired vacuum is below
7
1x10

Cleaning Safety

Cleaning a diffusion pump involves the use of acetone
and alcohol, both of which are toxic and explosive. Take
careful note of the following information and warnings
before starting a cleaning process.
When heated, sprayed or exposed to high temperature
equipment, these solvents become flammable and explo-
sive, causing serious injury or death.
When heated or sprayed, acetone or alcohol also
becomes 4 to 5 times heavier than air and flows down,
settling in tanks, pits, and low areas, displacing air, and
thus, can kill by asphyxiation.
Acetone, alcohol, and other solvents are irritants, narcot-
ics, depressants, and carcinogenic. Their inhalation and
ingestion may produce serious effects. Prolonged or con-
tinued contact with the skin will result in absorption
through the skin and moderate toxicity.
WARNINGS
Do not use near a high temperature
source.
Always use in a large, well-ventilated
room and ventilate the working area
with a blower.
Wear eyeshields, gloves, and other
protective clothing. The use of a
self-contained breathing apparatus
may also be necessary.
High Throughput Diffusion Pumps
Torr.

Disassembly for Initial Cleaning

This procedure involves the cleaning of the following
elements:
Jet assembly
Drain plugs
Sight glass
Pump interior
To disassemble the pump:
1. Remove the cold cap as described in "Cold Cap" on
page 43.
2. Disassemble the internal jet system from the body
of the pump in accordance with the appropriate
procedure within "Jet Assemblies" on page 44.
3. Remove fill and drain plugs and the sight glass with
its O-ring and graphite gasket.
Set the O-ring aside as it must not be cleaned with a
strong solvent. Alcohol, acetone, and other solvents
degrade O-ring materials reducing their ability to hold a
vacuum. If it is necessary to clean any O-rings, wipe with
lint-free, clean cloth, wash in detergent and water, or use
a small amount of pump fluid.
CAUTION
Do not use any solvents on O-rings.
4. Thoroughly clean all components of the jet assembly
and pump casing interior (but not O-rings) with
acetone followed by an alcohol rinse.
5. Remove all traces of cleaning fluid by carefully
drying all components with clean, dry, oil-free
compressed air.

Reassembly After Initial Cleaning

To reassemble the pump:
1. Perform disassembly steps 1 to 3 in reverse order,
then continue with the following steps on a cleaned,
reassembled pump.
2. Clean the interface and inlet flanges and O-ring
grooves thoroughly with acetone or alcohol, using
clean, lint free rags.
3. Remove all traces of acetone and alcohol by carefully
drying all components, particularly the O-ring
grooves, with clean, dry, oil-free compressed air.
4. Re-install the O-ring gasket.
20

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