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Unpacking
WARNINGS
❑
Before lifting a pump, check the
weight of the equipment in Table 4
on page 12.
❑
Use power-assisted equipment,
and trained moving and installation
personnel to avoid dropping,
slipping, and overturning the
pump and severely injuring
personnel.
❑
Do not stand under equipment
being moved.
Agilent large diffusion pumps are shipped in sturdy con-
tainers that permit prolonged storage in suitably protected
areas without special precautions, however, care must be
taken when moving the crated pump with a fork lift to
avoid excessive shock.
Carefully remove the outer shipping container. Visually
inspect the pump for damage that may have occurred
during shipping and notify the carrier immediately if dam-
age is suspected. If damage is noticed, save the crate and
the internal packing for inspection.
High Throughput Diffusion Pumps
19
Setup
Assembly
1. Remove flange covers, blank plugs and protective
plugs from water connections. Do not to scratch or
otherwise damage the sealing surface (the O-ring
groove on top of the inlet flange).
2. Check the internal jet assembly. It should be
concentric and firmly seated on the bottom of the
pump. Use a flashlight to verify that the ejector
nozzle is opposite the foreline (the pump outlet
connection). The jet assembly should not rotate;
it is held by an indexing pin at the bottom of the
assembly.
3. If the expected vacuum level is below 10
clean the pump using the procedure outlined in the
next section. Otherwise make sure that there are no
foreign materials inside the pump, and proceed with
attaching the pump to the system as instructed in
"System and Utility Connections" on page 21.
7
Torr,
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