Physical Specifications
16x1.12 holes
23.50 O.D.
1/4 F.P.T.
Water Connections (Typ.)
3/2 F.P.T.
Cold Cap Connections
43.00
(1092)
1/4 F.P.T.
Quick Cool Coils (optional)
OD
ID
Thickness
Bolt Circle
No. of Holes
Size of Holes
Orientation
Gasket Groove
ID
Width
Depth
High Throughput Diffusion Pumps
Electrical
4x75 holes
7.50
45°
24.00
(610)
NW-25 Gauge Port
24.00
(610)
Electrical
1/4 F.P.T.
Water Connections (Typ.)
Foreline Cooling Coil
Sight Glass
with Fill and Drain
Figure 6 HS-16 Outline with ASA Flanges
Table 6 HS-16 Flange Dimensions
Units
Inlet
in (mm)
23.50 (596.9)
in (mm)
18.00 (457.2)
in (mm)
1.00 (25.4)
in (mm)
21.25 (539.8)
16
in (mm)
1.13 (28.7)
Holes straddle center line of foreline
in (mm)
18.69 (474.7)
in (mm)
0.37 (9.4)
in (mm)
0.18 (4.6)
Table 5: HS-16: Dimensions and Weights
Height, minimum
including clearance
for heater access
Weight
Connections:
Body and Foreline
Quick Cool coils
ASA
Foreline
7.50 (190.5)
21.65 (549.9)
3.58 (90.9)
18.00 (457.2)
0.50 (12.7)
0.67 (17.0)
6.00 (152.4)
4
0.75 (19.1)
4.31 (109.5)
Requires NW-500
0.30 (7.6)
Centering Ring (not
0.14 (3.6)
included with pump)
15
Units
in (mm)
51 (1295.4)
lbs (kg)
500 (227)
in
1/4 FPT
in
1/4 FPT
ISO
Inlet, 500 K
Foreline, 100 K
5.12 (130.1)
3.58 (90.9)
0.47 (11.9)
Requires NW-100
Centering Ring (not
included with pump)
HS-16