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NORMINAL HEATER RESISTANCE @
ROOM TEMPERATURE (OHMS)
2700 W
3200 W
N/A
208 V = 12.8
240 V = 20.3
240 V = 17.1
380 V = 50.1
380 V = 45.1
400 V = 56.3
400 V = 47.5
430 V = 65.1
N/A
440 V = 68.1
440 V = 57.5
460 V = 74.5
N/A
480 V = 81.1
480 V = 68.4
N/A
575 V = 98.2
High Throughput Diffusion Pumps
Figure 12 HS-16 3-Phase Delta Circuit
Table 15 HS -16
3 Phase Delta
LINE TO LINE RESISTANCE (OHMS)
L1-L2/L2-L3/L3-L1
8100 WATTS
9600 WATTS
N/A
208 V = 8.6
240V = 13.5
240 V = 11.4
380 V = 33.9
380 V = 28.6
400 V = 37.5
400 V = 31.7
430 V = 43.4
N/A
440 V = 45.4
440 V = 38.3
460 V = 49.6
N/A
480 V = 54.0
480 V = 45.6
N/A
575 V = 65.4
26
LINE CURRENT (AMPS)
8100 WATTS
9600 WATTS
N/A
26.6
19.5
23.1
12.3
14.6
11.7
13.9
10.9
N/A
10.6
12.6
10.2
N/A
9.7
11.6
N/A
9.6
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