Hs-20: Dimensions And Weights - Agilent Technologies HS-16 Instruction Manual

High throughput diffusion pumps
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OD
ID
Thickness
Bolt Circle
No. of Holes
Size of Holes
Orientation
Gasket Groove
ID
Width
Depth
High Throughput Diffusion Pumps
Figure 7 HS-20 Outline with ASA Flanges
Table 8 HS-20 Flange Dimensions
Units
Inlet
in (mm)
27.50 (698.5)
in (mm)
21.25 (539.8)
in (mm)
1.12 (28.5)
in (mm)
25.00 (635.0)
20
in (mm)
1.25 (31.8)
Holes straddle center line of foreline
in (mm)
21.63 (549.4)
in (mm)
0.48 (12.2)
in (mm)
0.25 (6.6)
Table 7 HS-20: Dimensions and Weights
Height, minimum
including clearance
for heater access
Weight
Connections:
Body and Foreline
Quick Cool coils
ASA
Foreline
9.00 (228.6)
27.17 (690.1)
5.06 (128.5)
21.25 (539.8)
0.75 (19.1)
0.78 (19.8)
7.50 (190.5)
8
0.75 (19.1)
5.31 (134.9)
Requires NW-630
0.38 (9.7)
Centering Ring (not
0.09 (2.3)
included with pump)
16
Units
in (mm)
lbs (kg)
in
in
ISO
Inlet, 630 K
Foreline, 160 K
7.09 (180.1)
5.06 (128.5)
0.47 (11.9)
Requires NW-160
Centering Ring (not
included with pump)
HS-20
56 (1422)
600 (272.2)
1/4 FPT
3/8 FPT

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