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Electrical Connections
Terminal connections for each pump are different depending on the source voltage available, the principle difference
being a Y or
connection of the heaters. Table 13 provides the figure number and page of the wiring diagrams in this
manual. The specific wiring diagrams for each pump shows both Y and
connection.
WARNING
Improper operation, severe heater
damage, and danger to personnel
can result from an improperly wired
diffusion pump system.
Source Voltage
200 Delta
208 Delta
Figure 12 on page 26
220 Delta
240 Delta
Figure 12 on page 26
265 Delta
380 Delta
Figure 12 on page 26
380 Wye
400 Delta
Figure 12 on page 26
415 Wye
Figure 13 on page 27
430 Delta
Figure 12 on page 26
440 Delta
Figure 12 on page 26
460 Delta
Figure 12 on page 26
480 Delta
Figure 12 on page 26
575 Delta
Figure 12 on page 26
CAUTION
High Throughput Diffusion Pumps
Table 13 Wiring Diagram Locations
HS-16 Wiring
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 15 on page 29
Figure 14 on page 28
Figure 15 on page 29
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Figure 14 on page 28
Do not operate the pump at more than 5% over its rated voltage.
All electrical connections must be made by qualified personnel
in accordance with all applicable laws and industrial codes.
For overcurrent protection, the pump must be installed with
appropriate branch circuit protection.
To guarantee electrical safety, ensure the diffusion pump is
bonded to the earth ground system.
WARNING
HS-20 Wiring
Figure 16 on page 30
Figure 16 on page 30
Figure 16 on page 30
Figure 17 on page 31
Figure 16 on page 30
Figure 18 on page 32
24
connections and the source voltages for each
High voltages (up to 480 V) can kill.
Always break the primary circuit to the
pump before starting work on the heater
or its wiring.
HS-32 Wiring
Figure 19 on page 33
Figure 19 on page 33
Figure 19 on page 33
Figure 20 on page 34
Figure 19 on page 33
Figure 21 on page 35
NHS-35 Wiring
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