Principle Of Pressure Detection; Features Of Product - Omron D6F-PH User Manual

4. Principle of Pressure detection

By using a thermal mass flow sensor, Omron's MEMS differential pressure sensor can detect
fine changes in differential pressure.
Fig. 3 Principle of differential pressure sensor
and differential pressure (b)

5. Features of Product

By using a thermal mass flow method, Omron's MEMS differential pressure sensor is more
sensitive compared with that of a conventional differential pressure sensor in the low-pressure
range.
Fig. 4 Comparison with conventional method and thermal mass flow method
3
(a) and relationship between flow rate
Vout ∝
∆ p ∝
Orange：thermal mass flow method
Blue：conventional method
D6F-PH MEMS Differential pressure Sensor User's Manual (A288)
Thermal mass flow method
v
chip
The output of Omron's sensor is
proportional to the square root of
the gas flow rate through the
sensor chip surface.
Conventional method
v 2
The output of a conventional
main
sensor is proportional
square of the gas flow velocity
through the main channel.
to the