Related Manuals for Agilent Technologies 4072A Advanced
Summary of Contents for Agilent Technologies 4072A Advanced
- Page 1 Preinstallation Guide Agilent 4072A/B Advanced Parametric Tester Agilent 4073A/B Ultra Advanced Parametric Tester Edition 4 Agilent Part Number: 5989-5631EN March 2007 © Agilent Technologies, Inc. 2003 - 2007...
- Page 2 Warranty A copy of the specific warranty terms applicable to your Agilent Technologies product and replacement parts can be obtained from your local sales and service office. Audience This manual is intended for customers who purchase the Agilent 4072A/B or 4073A/B.
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Page 3: Table Of Contents
Contents 1. General Information Agilent 4072/4073 Tester Configuration ........... . 7 Installation Overview . - Page 4 Contents Wafer Probers ............... . 44 Mounting testhead on wafer prober .
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Page 5: General Information
General Information Agilent 4072/4073 Preinstallation Guide, Edition 4... - Page 6 General Information This manual contains Agilent 4072A/B advanced parametric tester and Agilent 4073A/B ultra advanced parametric tester preinstallation information and is the primary reference document to assist you in installation planning and site preparation. This manual consists of the following chapters. Chapter 1 , “General Information.”...
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Page 7: Agilent 4072/4073 Tester Configuration
General Information Agilent 4072/4073 Tester Configuration Agilent 4072/4073 Tester Configuration Figure 1-1 shows the Agilent 4072/4073 tester. Figure 1-1 4072/4073 tester overview system cabinet testhead wafer prober flat panel display The 4072/4073 tester consists of the following: System cabinet The standard system cabinet contains the 4072/4073 tester system instruments (Agilent E4980A/4284A precision LCR meter, Agilent 3458A multimeter, Agilent 81110A/ 8114A pulse generator, and Agilent E4411B spectrum analyzer) and is 1.6 m (5.3 ft.) high. -
Page 8: Installation Overview
General Information Installation Overview Installation Overview This section provides a brief start-to-finish system installation overview. NOTE If the steps described in this document are not completed prior to the system installation date, the Agilent customer engineer (CE) may not be able to install the tester. The checklist in Chapter 2 , “Site Preparation.”... - Page 9 General Information Installation Overview Figure 1-2 Flowchart for preinstallation START 1 month before delivery assigning system administrator preparing installation location chapter 2 preparing for electrical equipment customer confirming environmental considerations confirming safety precautions preparing the requirement to connect chapter 3 testhead to wafer prober 2 weeks before delivery...
- Page 10 General Information Installation Overview Chapter 1 Agilent 4072/4073 Preinstallation Guide, Edition 4...
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Page 11: Site Preparation
Site Preparation Agilent 4072/4073 Preinstallation Guide, Edition 4... -
Page 12: Installation Site Requirements
• Provide at least 0.6 meter (24 in) of clearance at the front and rear of the system cabinet to allow space for servicing. Agilent Technologies recommends 1 meter (39 in) of space for servicing. • Make sure there is adequate workspace around the system so that operating personnel can move freely, without affecting system operation. -
Page 13: Other Requirements
Site Preparation Installation Site Requirements Figure 2-1 System cabinet dimensions 120 degrees max. 906 mm 600 mm 120 degrees max. Front View Side View View Other requirements The site requires the following environment. Air conditioning To satisfy the temperature and air cleanliness requirements outlined in the “Environmental Considerations” on page 28, air conditioning is recommended. -
Page 14: Lighting
Site Preparation Installation Site Requirements Lighting Provide sufficient lighting for optimum visibility of lighted indicators, the display, and the keyboard of the system controller. Arrange lighting so that reflected light does not make it difficult to read displayed characters. Also, the system, and especially the software media, must not be exposed to direct sunlight. -
Page 15: Example Of 4072/4073 Tester Layout
Site Preparation Installation Site Requirements Example of 4072/4073 tester layout Figure 2-3 provides a system component template sheet to make it easy for you to arrange your system and decide upon the best layout. Simply cut out, from the template sheet, the system components furnished with your Agilent 4072/4073 tester, and arrange them on the blank grid sheet provided in Figure 2-6 One square represents 20 cm by 20 cm (approximately 0.43 ft... - Page 16 Site Preparation Installation Site Requirements Figure 2-4 Example of 4072/4073 tester layout Wafer Prober Table T e s t h e a d 640 mm 906 mm 600 mm System Cabinet 513 mm Switch Board Keyboard 19" Color Display Table Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 17 Site Preparation Installation Site Requirements Figure 2-5 Testhead layout switch board 600 mm table 17" flat panel display system cabinet testhead 642 mm keyboard table Rear view 17" flat panel system display cabinet testhead 890 mm - 1010 mm ( The hight is from floor to DUT ) Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 18 Site Preparation Installation Site Requirements Figure 2-6 Grid sheet Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 19 Site Preparation Installation Site Requirements Figure 2-7 Layout example for Tokyo Electron P-8 Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 20 Site Preparation Installation Site Requirements Figure 2-8 Layout example for Accretech A-PM-90A 4400 mm test leads (PG) test leads (DVM) TH PS cables air duct testhead wafer prober ACCRETECH A-PM-90A Grid: 200 mm 3600 mm test leads (PG) test leads (DVM) TH PS cables air duct testhead...
- Page 21 Site Preparation Installation Site Requirements Figure 2-9 Layout example for Tokyo Electron P-12 Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 22 Site Preparation Installation Site Requirements Figure 2-10 Layout example for Accretech UF 300 4400 mm test leads (DVM) test leads (PG) TH PS cables air duct wafer prober testhead ACCRETECH UF300 Grid: 200 mm 3600 mm test leads (DVM) test leads (PG) TH PS cables air duct wafer prober testhead...
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Page 23: Electrical Requirements
Burst Noise: ≤ 1 kV (for common and normal modes) Surge Noise: Agilent Technologies recommends that if the conditions above cannot be met, the tester should use the noise cut trans. This line voltage environment conforms to EN61326-1. Chapter 2... -
Page 24: Grounding
NOTE Agilent Technologies does not recommend installing printers or plotters close to the 4072/4073 tester. When the electrical motors in these peripherals begin operating and their electric consumption increases, noise from the print head or pen movement may cause system errors. - Page 25 Site Preparation Electrical Requirements Table 2-3 Number of installable unit Mounted system controller DDS drive rackmount 81110A 8114A E4411B None c8000 (or C3750) None None Table 2-4 Power consumption of 4072/4073 system instruments Line voltage Component AC 200 V AC 208 V AC 220 V AC 240 V System cabinet...
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Page 26: Main Power Cable
Site Preparation Electrical Requirements Table 2-4 Power consumption of 4072/4073 system instruments Line voltage Component AC 200 V AC 208 V AC 220 V AC 240 V Flat-panel display 0.2 A 0.2 A 0.2 A 0.2 A Main power cable You must prepare the power cables to connect the 4072/4073 tester to the switchboard because it is not bundled with the tester. -
Page 27: Additional Power Outlets
Site Preparation Electrical Requirements Additional power outlets To provide power for test/maintenance equipment and other equipment not included in the system, install additional power outlets (two power outlets, 15 A) at the site. Show the locations of all additional power outlets on your site layout drawing and include their potential load in your calculation for total site power. -
Page 28: Environmental Considerations
NOTE After the SMU calibration, the temperature change must be less than 3 °C. In addition to the above temperature and humidity conditions, Agilent Technologies recommends that the following conditions be satisfied for measuring low-current and low-voltage with the 4073A/B: Temperature change: Within ±... -
Page 29: Floor Vibration
Site Preparation Environmental Considerations Floor vibration In addition to the conditions described in “Temperature and humidity”, Agilent Technologies recommends that the following vibration conditions should be satisfied for measuring low-current and low-voltage with the 4073A/B: ≤ 1 mG Floor vibration: Floor vibration transmission frequency: ≥... -
Page 30: Upgrade To 4072A/4073A
Site Preparation Upgrade to 4072A/4073A Upgrade to 4072A/4073A Upgrading from 4071A to 4072A The Agilent E3196A upgrade kit is used to upgrade from the 4071A to the 4072A tester. In particular, the 4072A requires 200 or 208 Vac instead of 100 or 120 Vac. If you are using the 4071A with 100 or 120 Vac, you must prepare the 200, 208, 220, or 240 Vac. -
Page 31: Upgrade To 4072B/4073B
Site Preparation Upgrade to 4072B/4073B Upgrade to 4072B/4073B There are four types of upgrade kits for upgrading from 4070A series to 4070B series. • E3196B upgrade kit from 4071A to 4072B • E3197B upgrade kit from 4071A to 4073B • E3198B upgrade kit from 4072A to 4073B •... -
Page 32: Safety Precautions
Site Preparation Safety Precautions Safety Precautions To maintain safe operating conditions for the 4072/4073 tester, observe the following earthquake, fire, electrical, and chemical safety precautions. Earthquake To prevent the system cabinet from tipping over in an earthquake, attach the system cabinet to the floor as shown in Figure 2-13 (a). - Page 33 Site Preparation Safety Precautions Figure 2-15 shows the dimensions of the bottom of the system cabinet. The figure shows the form and the position of casters and leveling feet. Figure 2-15 Dimensions of system cabinet bottom LEFT Leveling foot Caster BOTTOM Leveling foot (4 place) Caster...
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Page 34: Fire
Site Preparation Safety Precautions Fire General cleanliness of the work area and system equipment is essential for preventing electrical fires. Only keep paper material that is required for efficient operation in your operating area. Store extra paper in an adjacent area. Do not allow wastepaper to accumulate, and use metal wastebaskets. -
Page 35: Emergency Off (Emo) System
Site Preparation Emergency Off (EMO) System Emergency Off (EMO) System The system cabinet is equipped with an emergency off (EMO) unit. When you press the EMO switch, the main contactor and emergency breaker in the power distribution unit (PDU) of the system cabinet opens and stops supplying electrical power to the system components. -
Page 36: Block Diagram And Operation Of Emergency Off Circuit
Site Preparation Emergency Off (EMO) System Block diagram and operation of emergency off circuit Figure 2-18, Figure 2-19, and Figure 2-20 are emergency off circuit block diagrams. If your system has the 200 V power line option, the main circuit breaker that is included in disconnect device also has a ground-fault circuit interrupter (GFCI) function, which senses the earth leakage current. - Page 37 Site Preparation Emergency Off (EMO) System Figure 2-19 Block diagram of emergency off circuit (208 V option) main contactor power outlet protector line disconnect instrument 10 A power outlets device line power outlet 208 V protector (includes main breaker) 10 A DVM and CMU trans.
- Page 38 Site Preparation Emergency Off (EMO) System • Turning on system instrument Switching on the main breaker, the emergency breaker, and the main switch turns on the LINE indicator (white), but the main contactor switch does not close. Figure 2-18 through Figure 2-20 show this condition. When the system switch closes, power is supplied to the system controller.
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Page 39: I/O Specifications
Site Preparation Emergency Off (EMO) System I/O specifications There are five I/O interface points in the power distribution unit (PDU). The I/O specifications for these interfaces are as follows: Instruments power outlets Maximum current: 6 A for each outlet, Total current: 8A DVM and CMU power outlets (200/208 V option only) Maximum current: 2 A for each outlet, Total current: 2A... -
Page 40: Site Preparation Checklist
Did you check the installation area for temperatures with relative humidities? Did you check the installation area for the floor vibration ≤ 1 mG and floor vibration transmission frequency ≥ 10 Hz? If some of the following apply to your site, Agilent Technologies recommends that you measure floor vibration. •... - Page 41 Check Item Did you check the installation area to ensure class 10,000 or better air cleanliness? If some of the following apply to your site, Agilent Technologies recommend that you check the air cleanliness using a particle counter. • Temperature, humidity, and cleanliness are not controlled.
- Page 42 Site Preparation Site Preparation Checklist Chapter 2 Agilent 4072/4073 Preinstallation Guide, Edition 4...
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Page 43: Wafer Probers And Connection With Testhead
Wafer Probers and Connection with Testhead Agilent 4072/4073 Preinstallation Guide, Edition 4... -
Page 44: Wafer Probers
Wafer Probers and Connection with Testhead Wafer Probers Wafer Probers The Agilent 4072/4073 tester is typically used with a wafer prober as most of the devices under test (DUTs) are on a wafer. You can use automatic and semi-automatic wafer probers and manual wafer probers with the 4072/4073 tester. -
Page 45: Wafer Prober Sense Switch
Wafer Probers and Connection with Testhead Wafer Probers Figure 3-2 Guide pins on testhead Guide Pins Testhead Wafer prober sense switch The 4072/4073 tester uses the wafer prober sense switch located on the bottom panel of the testhead to ensure that the testhead sets on the wafer prober properly. - Page 46 Wafer Probers and Connection with Testhead Wafer Probers Figure 3-3 4072A/4073A Testhead dimensions (1 of 2) At least 400 mm is necessary so the cables and air tube can be bent naturally. Weight = approx. 75 kg (48 pin) Center of Gravity (with 24 pin boards and 4 MPSMUs) (include 1m air tube and 1m PS cables;...
- Page 47 Wafer Probers and Connection with Testhead Wafer Probers Figure 3-4 4072A/4073A Testhead dimensions (2 of 2) RIGHT BACK The bolts must not be screwed more than 16mm into the testhead. The bolts must not be screwed more than 8mm into the testhead. Chapter 3 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 48 Wafer Probers and Connection with Testhead Wafer Probers Figure 3-5 4072B/4073B Testhead dimensions (1 of 2) Chapter 3 Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 49 Wafer Probers and Connection with Testhead Wafer Probers Figure 3-6 4072B/4073B Testhead dimensions (2 of 2) RIGHT BACK Chapter 3 Agilent 4072/4073 Preinstallation Guide, Edition 4...
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Page 50: Placing Testhead Beside Manual Wafer Prober
Wafer Probers and Connection with Testhead Wafer Probers Placing testhead beside manual wafer prober Most manual wafer probers do not have a mechanism for mounting a testhead, because the manual wafer prober is small. The testhead must then be placed beside the manual wafer prober. Figure 3-7 Testhead beside manual wafer prober signal cables... -
Page 51: Connecting With Testhead
NOTE Agilent Technologies recommends the use of the direct docking probe card when using the 4073A/B. The 4073A/B may not fully perform if a personality board or extension cable fixture is used. -
Page 52: Personality Board
The personality board must be fixed on the wafer prober. See Figure 3-9. NOTE Agilent Technologies recommends the use of the direct docking probe card when using the 4073A/B. The 4073A/B may not fully perform if a personality board or extension cable fixture is used. -
Page 53: Wiring For Personality Board
Wafer Probers and Connection with Testhead Connecting with Testhead Wiring for personality board The customer is responsible for the wiring between the personality board and the probe card. The prober manufacturer or its representative can help you obtain the probe card, insert ring, low leakage socket assembly, probing needles, and so on. -
Page 54: Extension Cable Fixture
An extension cable fixture and connector plate are used to interface between the testhead measurement pins and the probe needles. Agilent Technologies provides the Agilent E3146A extension cable fixture for the 4072A/B tester. The E3146A is designed so that all the measurement pins of the testhead contact the pads of this fixture, and can be wired to the connector plate or to the probing needles easily. -
Page 55: Pin Board Configuration
Table 3-2 is an example of where pin boards are installed when additional pin boards are ordered. NOTE Agilent Technologies recommends that you do not change the pin boards from the slots in which they are installed at the factory. - Page 56 Wafer Probers and Connection with Testhead Connecting with Testhead Table 3-2 shows pin boards configuration If you ordered 28 of the Option 001 add one pin board. Table 3-2 Example of pin board configuration for 4072/4073 tester Pin board Pin board Pin board Pin board Slot...
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Page 57: Receiving
Receiving Agilent 4072/4073 Preinstallation Guide, Edition 4... - Page 58 Receiving This chapter describes how to carry in the tester, and includes information for receiving, checking for shipping damage, checking the contents, and unpacking the system cabinet and testhead. Figure 4-1 shows the overall course of events for receiving the tester. Figure 4-1 Overall receiving flow START...
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Page 59: Package
Receiving Package Package Agilent 4072/4073 will deliver packages as shown in Figure 4-2. In many cases, it consists of a package for the system cabinet, testhead, and other accessories. If you order other options such as the system controller, or color monitor, these packages will be delivered at the same time. -
Page 60: Shipping Damage
Receiving Shipping Damage Shipping Damage Before unpacking any system components, inspect all boxes for any signs of damage that might have occurred during shipment. Some typical signs of damage are dents, scratches, cuts, or water marks. If you suspect damage, note on the bill of lading that there is “Apparent damage -- subject to inspection,” and arrange for both the carrier’s representative and a local Agilent customer engineer (CE) to be present when that item is unpacked. -
Page 61: Checking Contents
Receiving Checking Contents Checking Contents First, unpack the box labeled “Open Me First”, take out the contents list, and check the delivered items against it. If something is missing or damaged, contact your local Agilent sales representative. Chapter 4 Agilent 4072/4073 Preinstallation Guide, Edition 4... -
Page 62: Unpacking System Cabinet
Receiving Unpacking System Cabinet Unpacking System Cabinet The customer is responsible for unpacking the Agilent 4072/4073 tester system cabinet and moving it to the final location in the clean room. This section covers how to unpack the system cabinet. The system cabinet is stored in the carton, and is removed from the carton and put down on the floor using the following procedure. - Page 63 Receiving Unpacking System Cabinet Slit 8. Place the slope so the bottom part comes on the slit so that it will not move. 7. Remove the slope. 9. Loosen the two nuts and remove the fixing 10. Loosen the nuts on both side on the base and wooden bar from the base.
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Page 64: Unpacking Testhead
Receiving Unpacking Testhead Unpacking Testhead This section covers how to unpack the testhead. The testhead is stored in the carton. Remove the carton using the following procedure. CAUTION At least two person are required to move the testhead. 1. Cut the nylon straps securing the box, remove the 2. -
Page 65: Unpacking Accessories
Receiving Unpacking Accessories Unpacking Accessories The accessories are also wrapped in a protective vinyl cover and shipped in separate boxes. These boxes can be unpacked whenever it is convenient for you to do so. When unpacking the accessories, observe the following precautions: •... -
Page 66: Moving Cabinet, Testhead And Accessories
Receiving Moving Cabinet, Testhead and Accessories Moving Cabinet, Testhead and Accessories This section covers how to move and unwrap the cabinet, testhead, and accessories in your clean room. All items are wrapped in double protective vinyl covers. CAUTION You must ensure that no condensation occurs in the testhead. Before removing the deaeration packaging’s vinyl cover, the testhead must adapt to the ambient temperature and humidity. - Page 67 Receiving Moving Cabinet, Testhead and Accessories Figure 4-3 Testhead cover removing location Buffer Room (sticky sheet) Clean Room Air Shower Room (sticky sheet) Remove all vinyl cover Remove the carton and You must confirm outer vinyl cover the temperature and the waiting time. Table 4-2 Warming time to ensure no condensation occurs in testhead Atmospheric...
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Page 68: Moving Testhead
Receiving Moving Cabinet, Testhead and Accessories Moving testhead The following describes how to move the testhead. 1. Move the Testhead to the outside entrance of the clean room. 2. Remove the outer vinyl covers. CAUTION Do not cut the deaeration packaging’s vinyl cover. 3. - Page 69 Receiving Moving Cabinet, Testhead and Accessories 6. Remove the inner vinyl covers. 7. Remove the protective vinyl. 8. Remove the protective vinyl. 9. Do not remove the tape holding the air duct. (This tape indicates the final installation location.) Chapter 4 Agilent 4072/4073 Preinstallation Guide, Edition 4...
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Page 70: Moving Cabinet And Accessories
Receiving Moving Cabinet, Testhead and Accessories Moving cabinet and accessories 1. Move the items to the front of the clean room entrance. The system cabinet is equipped with casters to allow movement of the cabinet. CAUTION When moving the system on its casters, do not allow the casters to become caught on cables or debris, or in cracks in the floor. -
Page 71: Confirming The System Power Safety
Confirming the System Power Safety Agilent 4072/4073 Preinstallation Guide, Edition 4... - Page 72 Confirming the System Power Safety If you need to perform an ELECTRICAL SAFETY LEVEL CHECKS before the installation, do as follows to connect the site power line to the 4072/4073 tester and check it: 1. “Connecting Site Power Line” 2. “Component Location for PDU and Checking EMO” 3.
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Page 73: Connecting Site Power Line
Confirming the System Power Safety Connecting Site Power Line Connecting Site Power Line WARNING Main power cable connection must be performed by qualified personnel at the customer site. Incorrect installation will result in serious injury to operating personnel and damage to the equipment. - Page 74 Confirming the System Power Safety Connecting Site Power Line disconnect cable clamp device cover 5. Remove the disconnect device cover. 6. Loosen (for flexible cable) or remove (for rigid/flexible conduit) the cable clamp and pass the main power cable through the cable clamp opening.
- Page 75 Confirming the System Power Safety Connecting Site Power Line cable clamp disconnect device cover 9. (For flexible cable,) fasten the cable clamp 10. Reinstall the disconnect device cover (removed in securely. step 5). PDU side cover 12. Connect the main power cable to switchboard of the installation site.
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Page 76: Component Location For Pdu And Checking Emo
Confirming the System Power Safety Component Location for PDU and Checking EMO Component Location for PDU and Checking EMO For the location of the components shown in this procedure, see Figure 4-4 through Figure 4-8. Figure 4-4 System cabinet component locations (rear view) instrument power outlets DVM and CMU power outlets (200/208 V option only) - Page 77 Confirming the System Power Safety Component Location for PDU and Checking EMO Figure 4-6 PDU component locations ~LINE disconnect device door lock release screw System Sw Fan Protector Emargency Breaker Error Cabinet Protector Error LEDs Testhead Emargency Over Interface Voltage Figure 4-7 Positions of circuit protector (EMO and fan protectors) yellow...
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Page 78: Confirming Pdu And Emo Operation
Confirming the System Power Safety Confirming PDU and EMO Operation Confirming PDU and EMO Operation When you confirm the PDU and EMO operation, use the following procedure. 1. Disconnect all power cords from the power outlets in the system cabinet, and turn off all the instruments, controller, and peripherals. - Page 79 Confirming the System Power Safety Confirming PDU and EMO Operation 4. Check the emergency breaker, disconnect device, LINE indicator, system switch, and controller power outlets as follows: a. Set the power board breaker to the on position. b. Set the emergency breaker to the on position. c.
- Page 80 Confirming the System Power Safety Confirming PDU and EMO Operation 6. Check the EMO button and ext alarm 1 and 2 terminals as follows: a. Check the conductivity of the ext alarm 1 and 2 terminals on the PDU using a hand-held multimeter. The resistance between the ext alarm 1 terminals must be set at approximately 0 ohm, and the resistance between the ext alarm 2 terminals must be set very high.
- Page 81 Confirming the System Power Safety Confirming PDU and EMO Operation 9. Check the fan protector as follows: a. Press the left fan protector to set it to the out position. b. Confirm the conditions of the following in a few minutes: LINE indicator Green LED in the INSTRUMETNT POWER ON switch...
- Page 82 Confirming the System Power Safety Confirming PDU and EMO Operation Appendix A Agilent 4072/4073 Preinstallation Guide, Edition 4...
- Page 84 Agilent Publication No. 5989-5631EN © Agilent Technologies, Inc. 2003 - 2007 Printed in Japan 03/07 (E0307) *P5989-5631EN* 5989-5631EN...