Limited Life Parts - Hitachi TM3000 Instruction Manual

6.2 Limited Life Parts

The parts which are regarded as limited life parts (See Table 6.2) must be replaced in the
specified interval. If the system is continuously used without properly replacing the limited life
parts, it may not only damage the system but cause safety problems. Contact the nearest
service office to schedule the replacements.
Part No.
55E-1275 P Turbo molecular pump
52E-6688 DFP maintenance kit
55E-1642 SR exhaust tube N assy
55E-1692 Exhaust tube
K433004 Pirani gauge
51E-1492 Element
55E-1317 Element (5)
55E-1171 Spring
52E-6980 Diaphragm pump
55E-1118 Deflection coil
55E-2810 ACWHND00SP assy
55E-2811 CONTROL0SP assy
55E-2812 COLHVC00SP assy
55E-2803 5CHAMP00SP assy
55E-2814 IO-DRV00SP assy
55E-2805 LED00SP assy
55E-2806 ISAL00SP assy
55E-2807 TMPMCONT00SP assy
55E-2808 REGOUT00SP assy
55E-2835 HVT SP assy
55E-2602 NF cord assy
Table 6.2 Limited Life Parts List
Part Name
Turbo molecular pump
For DFP maintenance
Exhaust tube between turbo
molecular pump and diaphragm
pump
Exhaust tube and sealing
component between turbo
molecular pump and specimen
chamber
Vacuum level measurement
detector
Leak valve (V1) filter
Slow leak valve (V2) filter
Specimen stage (For lock nut)
Evacuation System
Column
Usage
－
－
－
－
－
－
－
－
－
－
－
6 - 2
Replacement
Interval
5 years
5 years
5 years
5 years
3 years
5 years
5 years
4 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years
5 years