2.4.3 Output Log Data......................................................................................... 2- 71
2.4.5 Exit............................................................................................................. 2- 71
3.1 System Configuration ............................................................................................ 3-
3.2 Part Names ........................................................................................................... 3-
3.2.1 Main Unit.................................................................................................... 3-
3.2.2 Diaphragm Pump ....................................................................................... 3-
3.3 PC ......................................................................................................................... 3-
4 OPERATIONS ......................................................................................................... 4-
4.1.1 Operation Units .......................................................................................... 4-
4.2 Basic Operations ................................................................................................... 4-
4.2.13 Fine Focusing .......................................................................................... 4- 33
4.3.3 File Menu ................................................................................................... 4- 43
4.3.4 Edit Menu................................................................................................... 4- 45
4.3.5 View Menu ................................................................................................. 4- 46
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