Hitachi TM3000 Instruction Manual page 251

Code Error Message
1223 Beam current is too low.
Please check the filament
setting.
1224 The filament has burned out.
Or, it is not set right.
Please check the filament
setting.
1231 Time has run out.
"Auto Start" cannot be started.
1241 Time has run out.
"Condition Setting" cannot be
executed.
Countermeasure
An emission current level higher than 10 µA or
lower than 20 µA has been detected while the
electron beam is being emitted. Click the [OK]
button to dismiss the message. The filament may
have burned out. Replace the filament.
For filament replacement, refer to 5.1 in the
instruction manual.
An emission current level lower than 10 µA has
been detected while the electron beam is being
emitted. Click the [OK] button to dismiss the
message. Make sure there are no particles on
the filament tip and Wehnelt opening. Also, the
filament may have burned out. Replace the
filament with a new one.
For filament replacement, refer to 5.1 in the
instruction manual.
This message appears if a time-out (40 s) has
occurred during HV auto start (HV interlink:
HV-ON/AFC/ABC). Then, auto start will stop.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
This message appears if a time-out (60 s) has
occurred during setting of beam axis alignment
conditions. Then, beam axis alignment stops.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
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