Maintenance - Hitachi TM3000 Instruction Manual

Periodically perform inspection and maintenance of the following items to keep the system in
good working condition to extend the lifetime of the instrument.
1. After reading this instruction manual carefully, perform the maintenance according to the
procedures described in this manual.
2. Do not disassemble, assemble or repair items which are not described in this instruction
manual.
3. Contact the nearest service office if the Turbo Molecular Pump (TMP) or Diaphragm
Pump (DFP) maintenance message appears.
The inspection and maintenance list is shown in Table 5.
Item
Filament
Wehnelt
Anode
Condenser lens
aperture
Objective aperture
TMP
(Turbo molecular
pump)
DFP (Diaphragm
pump)

5 MAINTENANCE

Table 5 Inspection and Maintenance List
Task
Filament
When the filament is broken
replacement
When the filament is
Cleaning
replacements
Once every 5 to 6 filament
Cleaning
replacements
Condenser lens
Every 6 months (or when
aperture
image quality deteriorates)
replacement
Objective
Every 6 months (or when
aperture
image quality worsens)
replacement
TMP
replacement
3 to 5 years
Diaphragm
replacement
Interval
5 - 1
Notes
See Section 5.1.
See Section 5.1 9. .
See Section 5.1 9. .
See Section 5.3.
See Section 5.4.
The work is
performed by a
service engineer.