Hitachi TM3000 Instruction Manual page 258

Code Error Message
1513 TMP stopped due to the
exceeded temperature or
current.
Check if the diaphragm pump is
working right and there is no
vacuum leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1514 The vacuum does not reach
3,000Pa.
Check if there is any vacuum
leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1520 The cooling fan of TMP stopped.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1521 The cooling fan in Main Unit
stopped.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
Countermeasure
Turn off the power switches for the PC and the
control unit; let the system stand inactive for
about 1 hour to cool down. Also, check the
following items 1. to 4. :
1. The room temperature is 35°C or below.
2. The vacuum tube is not bent or kinked.
3. The o-ring contact surface of the specimen
stage is free of particles.
4. The o-ring contact surface of the electron
gun is free of particles.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
If the message appears repeatedly, contact the
nearest service representative.
A time-out (120 s) has occurred after the TMP
was started.
Click the [OK] button to dismiss the message.
Restart the system in the following procedure.
1. Turn off the PC power.
2. Turn off the main unit power.
3. Restart the PC.
4. Turn on the main unit power and start the
application.
Make sure the specimen stage and the electron
gun are securely closed, and no particles, such
as dust, are trapped.
Either the FAN that cools the TMP is not running
due to a malfunction or the F11 or F9 fuse on the
IO-DRV00 board is blown.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
Either the FAN (one of the two fans) that cools
the system is not running due to a malfunction or
the F4, F10, or F9 fuse on the IO-DRV00 board
is blown.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
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