Hitachi TM3000 Instruction Manual page 259

Tabletop microscope
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Code
Error Message
1530
Evacuation System is wrong.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
1570
The power supply of -15V for VA
was shut down.
Start up the main unit and
application again.
1571
The power supply of +15V for
VA was shut down.
Start up the main unit and
application again.
1572
The power supply of -15V for
SG was shut down.
Start up the main unit and
application again.
1573
The power supply of +15V for
SG was shut down.
Start up the main unit and
application again.
1574
The power supply of +24V was
shut down.
Start up the main unit and
application again.
Countermeasure
This message appears when the evacuation
SEQ did not run successfully due to an error
other than the above (1510 ~ 1514) in the
evacuation system.
If the same message appears repeatedly after
restart of the system, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F5 on the CONTROL0 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F4 on the CONTROL0 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F3 on the CONTROL0 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (F2 on the CONTROL0 board) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
An overcurrent in the power supply or a blown
fuse (on the IO-DRV00 board, F5, F6, F7, F8, or
F9, or more than one fuse) was found.
Click the [OK] button to dismiss the message.
Restart the main unit. If the message appears
repeatedly, contact the nearest service
representative.
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