Specifications - Hitachi TM3000 Instruction Manual

1.3 Specifications

Item
1 Accelerating voltage
Magnification
2
3 Maximum specimen size 70 mm (diameter)
Maximum specimen
4
thickness
5 Specimen stage
6 Electron gun
7 Stigma correction coil
8 Image shift
Detector
9
10 Control CPU method
11 Monitor (recommended)
12 Image data recording
13 Recording pixels
14 Data display
15 Automated function
Auxiliary operation
16
function
Vacuum pump
17
18 Vacuum detector
19 Frequency
Main unit power supply
20
Dimensions/weight
21
(※1) Magnification steps
×15 18 20 25 30 40 50 60 80 100 120 150 180 200 250 300 400 500 600 800 1000
1200 1500 1800 2000 2500 3000 4000 5000 6000 7000 8000 9000 10000 12000
15000 18000 20000 25000 30000
(※2) [D] denotes the distance between the specimen surface and the detector.
Table 1.3 Specifications
Product Specifications
5 kV, 15 kV
15 to 30000x (image display magnification: number of
steps: 40 (※1) )
(digital zoom 2x, 4x), max. observation range: 3.5 mm on
an edge
The minimum magnification depends on the accelerating
voltage, D (※2), and the screen size.
50 mm
X：35 mm, Y：35 mm (X, Y only)
Pre-centered cartridge filament
Provided
±50 μm (15 kV mode: D=4.5 mm)
High-sensitivity semiconductor backscattered electron
detector
Notebook PC + dedicated microcomputer control
LCD attached to the notebook PC (15.4-inch)
Hard disk mounted on PC, and other recording media
1280×960 pixels (max.) /640×480 pixels
Micron marker, file No., date, comments
Auto luminosity control, auto focusing adjustment
Raster rotation
Magnification preset (2 steps)
Compact turbo molecular pump: 30 l/s
Diaphragm pump: 1 m
Pirani gauge
50/60 Hz
AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA
Built-in earth leakage breaker (5 A/(15 mA)): 3P outlet
connection
Main unit: 330×606×550 63 kg (manual stage)
330×630×550 66 kg (motor drive stage)
Diaphragm pump: 145×256×217 4.5 kg
1 - 3
3
/h