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Omega FMA 4000 User Manual Page 49

Digital mass flow meters.
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ACTUAL GAS
Phosphorous Oxychloride POCl
Phosphorous Pentafluoride PH
Phosphorous Trichloride PCl
Propane C
H
3
8
Propylene C
H
3
6
Silane SiH
4
Silicon Tetrachloride SiCl
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
2
Sulfur Hexafluoride SF
Sulfuryl Fluoride SO
Tetrafluoroethane (Forane 134A) CF
Tetrafluorohydrazine N
Trichlorofluoromethane (Freon-11) CCl
Trichlorosilane SiHCl
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
FCClF
2
Triisobutyl Aluminum (C
Titanium Tetrachloride TiCl
Trichloro Ethylene C
Trimethylamine (CH
Tungsten Hexafluoride WF
Uranium Hexafluoride UF
Vinyl Bromide CH
2
Vinyl Chloride CH
CHCl
2
Xenon Xe
3
5
3
4
4
6
F
2
2
CH
3
F
2
4
3
2
H
)AL
4
9
4
HCl
2
3
)
N
3
3
6
6
CHBr
K FACTOR
Relative to N
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
F
.5096
2
.3237
F
.3287
3
.3278
.2031
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
45
Cp
[Cal/g]
2
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
.161
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
Density
[g/I]
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858

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