Omega FMA 4000 User Manual page 47

ACTUAL GAS
Deuterium D
2
Diborane B H
2 6
Dibromodifluoromethane CBr
Dichlorodifluoromethane (Freon-12) CCl
Dichlofluoromethane (Freon-21) CHCl
Dichloromethylsilane (CH
Dichlorosilane SiH
Dichlorotetrafluoroethane (Freon-114) C
1,1-Difluoroethylene (Freon-1132A) C
Dimethylamine (CH
Dimethyl Ether (CH
2,2-Dimethylpropane C
Ethane C H
2 6
Ethanol C H O
2 6
Ethyl Acetylene C
4
Ethyl Chloride C H
2
Ethylene C H
2 4
Ethylene Oxide C
2
Fluorine F
2
Fluoroform (Freon-23) CHF
Freon-11 CCl F
3
Freon-12 CCl F
2 2
Freon-13 CClF
3
Freon-13B1 CBrF
3
Freon-14 CF
4
Freon-21 CHCl F
2
Freon-22 CHClF
2
Freon-113 CCl FCClF
2
Freon-114 C Cl F
2 2 4
Freon-115 C ClF
2 5
Freon-C318 C F
4 8
Germane GeH
4
Germanium Tetrachloride GeCl
*Helium He (<50 L/min)
*Helium He-1 (>50 L/min)
*Helium He-2 (>10-50 L/min)
Hexafluoroethane C
Hexane C H
6 14
*Hydrogen H -1 (<10-100 L)
2
*Hydrogen H -2 (>10-100 L)
2
*Hydrogen H -3 (>100 L)
2
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
F
2 2
) SiCl
3 2 2
Cl
2 2
) NH
3 2
) O
3 2
H
3 12
H
6
Cl
5
H O
4
3
2
4
F (Freon-116)
2 6
K FACTOR
Relative to N
1.00
.4357
.1947
F
.3538
2 2
F
.4252
2
.2522
.4044
Cl F
.2235
2 2 4
H F
.4271
2 2 2
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
2.43
2.05
.2421
.1792
1.0106
1.35
1.9
43
Cp
[Cal/g]
2
1.722
.508
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
1.241
1.241
.1834
.3968
3.419
3.419
3.419
Density
[g/I]
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
.1786
.1786
6.157
3.845
.0899
.0899
.0899