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MKS i-Baratron DA01A Instruction Manual
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MKS i-Baratron DA01A Instruction Manual

MKS i-Baratron DA01A Instruction Manual

Digital devicenet capacitance
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Instruction Manual 1051025-001
REV. C, 1/19
MKS Type i-Baratron DA01A
Digital DeviceNet Capacitance
Manometer

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  • Page 1 Instruction Manual 1051025-001 REV. C, 1/19 MKS Type i-Baratron DA01A Digital DeviceNet Capacitance Manometer...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
  • Page 3 Table of Contents Table of Contents Pressure Transducer Safety Information ..................1 Symbols Used in This Instruction Manual ..............1 Symbols Found on the Unit .................... 2 Safety Procedures and Precautions ................. 3 Sicherheitshinweise für den Druckmeßumformer ............... 5 In dieser Betriebsanleitung vorkommende Symbole ............5 Erklärung der am Gerät angebrachten Symbole .............
  • Page 4 Table of Contents Operating Environmental Requirements ............25 Safety Conditions ....................25 Power Requirements ..................25 Setup ..........................26 Dimensions ......................26 Fittings ....................... 27 Interface Connectors ....................... 27 LED Indicators ........................ 27 Zero Pushbutton ......................28 Mounting Instructions ..................28 Electrical Information .....................
  • Page 5 Table of Contents Analog Interface Connector ................42 DeviceNet Status LEDs ..................42 Module Status LED ................... 42 Network Status LED ..................43 Data Rate and Node Address Switches .............. 43 Fault Conditions ......................45 Minor Faults ....................... 45 Major Faults ....................... 45 Trip Points........................
  • Page 6 Table of Contents Connection Object ......................64 Connection Object Instances................64 Explicit Messaging Instance Attributes ............. 65 I/O Poll Messaging Instance Attributes ............. 66 Connection Object Supported Services ............. 68 S-Analog Sensor Object ....................69 Customer Supported Attributes................69 Pressure Units Support ..................74 Specific Services ....................
  • Page 7 Table of Contents Abort ........................109 Get Attribute Single ................... 110 Set Attribute Single .................... 110 Restore Default ....................111 Allocate Master/Slave ..................111 Release Master/Slave ..................112 Lock ........................112 Unlock ........................ 113 Perform Coarse Zero Offset (0x32) ..............113 Appendix D: Example Messages ....................
  • Page 8 List of Figures List of Figures Figure 1: DeviceNet Transducer Object Model ................18 Figure 2: Top View Dimensions of the DA01A Transducer ............26 Figure 3: Side View Dimensions of the DA01A Transducer ............. 26 Figure 17: Push-Button Zero with No Offset ................35 Figure 18: Zeroing using “Calibrate at nonzero”...
  • Page 9 List of Tables List of Tables Table 1: Definition of Symbols Found on the Unit ................ 2 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ............6 Tableau 3: Définition des symboles apparaissant sur l'unité ............10 Tabla 4: Definición de los símbolos hallados en la unidad ............14 Table 5: Definitions ........................
  • Page 10 List of Tables Table 32: Poll Response Assembly Instance 2 ................68 Table 33: Poll Response Assembly Instance 5 ................68 Table 34: Connection Object Supported Services ................ 68 Table 35: S-Analog Sensor Class Specific Attributes ..............69 Table 36: Attribute ID # 03 Data Type ..................70 Table 37: Status Attribute Values ....................
  • Page 11 Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
  • Page 12 Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Table 1: Definition of Symbols Found on the Unit Off (Supply) Earth (ground) Protective earth On (Supply) IEC 417, No.5017 (ground)
  • Page 13 DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 14 Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
  • Page 15 Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.
  • Page 16 Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Tabelle 2: Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...
  • Page 17 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 18 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
  • Page 19 Informations relatives à la sécurité pour le Symboles utilisés dans ce manuel d'utilisation transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.
  • Page 20 Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Tableau 3: Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse)
  • Page 21 Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 22 Mesures de sécurité et précautions Informations relatives à la sécurité pour le transducteur de pression VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
  • Page 23 Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.
  • Page 24 Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Tabla 4: Definición de los símbolos hallados en la unidad Encendido Apagado Puesta a tierra Protección a tierra...
  • Page 25 No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 26 Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
  • Page 27 Type DA01A Absolute Pressure Transducer with a DeviceNet™ Digital Interface is part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 100 mTorr Full Scale (FS) in a RoHS (Restriction of Hazardous Substances)-compliant package.
  • Page 28 Introduction Chapter One: General Information DeviceNet Transducer Object Model The operating information for the DeviceNet digital interface is arranged as a collection of objects (Figure 1). Specific attributes within each object control specific network or instrument features and are referenced by a unique ID number. The object models and attributes for the DA01A transducer are described in detail in Chapter Four: Operation, page 49.
  • Page 29 Chapter One: General Information Introduction Definitions Table 5: Definitions Term Description Attribute All elementary data types are defined in [1] ARRAY A listing or grouping of elements of the same data type BOOL Boolean, which can take either a 0 or 1 value Control Area Network, which is a specification of physical layer signaling and media access control in DeviceNet Class Code...
  • Page 30 How This Manual is Organized Chapter One: General Information References Table 6 lists the documents referenced throughout this manual. Table 6: References Reference Number Document “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol,” Open DeviceNet Vendors Association, Inc. Release 2.0. “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library,”...
  • Page 31 Customer Support Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers.
  • Page 32 Customer Support Chapter One: General Information This page intentionally left blank.
  • Page 33 Do not discard any packing materials until you completed your inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA (Return Material Authorization) Number from the MKS Service...
  • Page 34 For cables connecting to non-MKS products, you can purchase normal shielding or braided shielded cable assemblies from MKS in a nominal 10’ (3 m) length, terminating in flying leads (pigtail) fashion at both ends.
  • Page 35 Chapter Two: Installation Product Location and Requirements Product Location and Requirements The DA01A unit meets the following criteria: • POLLUTION DEGREE 2 in accordance with IEC 664 • Transient overvoltages according to INSTALLATION CATEGORY II Operating Environmental Requirements • Ambient Operating Temperature: 0° to 50° C (32° to 122° F)—DA01A (Ambient) 15°...
  • Page 36 Setup Chapter Two: Installation Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Tolerances are ± .03 [.76 mm] unless specified otherwise. Figure 2: Top View Dimensions of the DA01A Transducer Figure 3: Side View Dimensions of the DA01A Transducer...
  • Page 37 Chapter Two: Installation Interface Connectors Fittings The DA01A unit is available with the following fittings: • ½” diameter (12.7 mm) tubulation • ® ® Swagelok 8-VCR (female) • Mini-CF (rotatable) • NW-16-KF Functions and Controls ® Figure 4. i-Baratron Top Panel Controls and Functions Analog Interface Connector Network Status LED Module Status LED...
  • Page 38 (Refer to Appendix B: Model Code Explanation, page 95.) Mount the unit vertically if the model code has the form: DA01AXXXXXXXX Mount the unit horizontally if the model code has the form: DA01AXXXXXXXX Contact MKS if you require assistance.
  • Page 39 Chapter Two: Installation Electrical Information Electrical Information Grounding Ensure that your DA01A unit, powered from the DeviceNet network, is grounded in accordance with the requirements in the ODVA “DeviceNet Specification,” Volume I [1]. Connectors The DA01A transducer has one 5-pin micro-style digital communications connector and one 9-pin Type DE-9S analog interface connector on its top panel (Figure 2, page 26).
  • Page 40 Note 1. The 9-pin Type DE-9S analog interface connector is a new style connector, that differs from those used on other MKS Baratron transducers. 2. The “Reserved” pin assignment refers to a pin with an internal connection that may be assigned a function in the future.
  • Page 41 Network Status LED remains OFF until the device establishes communication with other devices on the network. Note If the power up LED sequence does not function properly, contact MKS for assistance. Warm Up Time After installation and power-up, allow the DA01A to warm up, as specified below. Ensure your device is fully stabilized and then check the transducer zero to verify the proper output.
  • Page 42 Startup Chapter Two: Installation Reporting the Pressure Value The system pressure can be reported at any time using the appropriate digital communication commands. The data will be reported as either an INT or REAL value dependent upon device settings. (e.g. Data Type attribute in the S-Analog Sensor Object) •...
  • Page 43 Chapter Two: Installation Adjusting the Zero Adjusting the Zero The DA01A unit uses a digital zero in the calculation of the reported pressure value. Figure 5, page 39, illustrates where the digital zero is incorporated into the calculation of the pressure value. The transducer’s calibrated, analog pressure signal is measured from pin 1 on the Type DE-9S interface connector, with pin 8 as the common.
  • Page 44 Adjusting the Zero Chapter Two: Installation Table 13: Highest Pressures Suggested for Proper Zero Adjustment Full Scale Range Highest Pressure for Proper Zero (Torr) Adjustment (Torr) < 5 x 10 < 5 x 10 < 5 x 10 < 5 x 10 1000 <...
  • Page 45 Chapter Two: Installation Adjusting the Zero Zero Adjustments Modes The DA01A has three different modes of zero adjustments. It is important that the user become familiar with the specific application and limitations of each three modes before selecting a mode of zero adjustment. Note that each mode of zero adjustment is applied to both analog and digital pressure outputs.
  • Page 46 Adjusting the Zero Chapter Two: Installation Mode 2. Zeroing with “Calibrate at Nonzero” Service (uses Zero Offset attribute) Purpose: The user cannot achieve zero pressure. The user can achieve a known positive pressure. When pushing the button, the user wants Pout to read output equivalent to known offset zero (Target).
  • Page 47 Chapter Two: Installation Adjusting the Zero Mode 3. Zeroing with “Output Offset” Service (uses Target Offset attribute) Purpose: Pressure output goes into an A/D in the unipolar mode. Therefore, the user wants the pressure output to read a positive value at zero pressure. Limit: +/- 5% 5% FS from the Factory Zero position.
  • Page 49 Chapter Three: Overview General Information Chapter Three: Overview General Information The DA01A transducer contains a digital interface. All communication to and from the device is achieved using the DeviceNet network. Interfacing with your transducer is accomplished using the DeviceNet digital communications protocol, which gives you access to all features of the instrument.
  • Page 50 Pressure Measurement Chapter Three: Overview Pressure Measurement The digital output is read through the DeviceNet interface. The reported pressure value is based on a number of variables, many of which are user-adjustable through software commands. Figure 5, page 41, illustrates how actual pressure values are generated from the raw sensor output. The raw pressure reading (both analog and digital) can be re-zeroed either by using the OneTouch Coarse Zero Push Button located on top of the transducer or by issuing the DeviceNet service 0x32 (the Coarse Zero Adjustment service).
  • Page 51 Chapter Three: Overview Pressure Measurement Figure 5: Analog and Digital Pressure Calculation...
  • Page 52 Top Panel Components Chapter Three: Overview Top Panel Components Figure 6 shows the top panel of your DA01A transducer. Figure 6: Top Panel Components Digital Communications Connector The 5-pin male micro-style connector accepts the power input from the DeviceNet network and provides the interface for digital communications.
  • Page 53 Chapter Three: Overview Top Panel Components Table 14: Module Status LED Indicators LED State Meaning Power is OFF Flashing Red/Green Initializing Solid Green System functioning normally Flashing Green Visual Indicator ON Solid Red Major Unrecoverable Fault Network Status LED The Network Status LED indicates the status of the communications link, as defined in Table 15. If no problems are detected, the Network Status LED illuminates a solid green;...
  • Page 54 Top Panel Components Chapter Three: Overview Attribute_Not_Settable General Error Code will be returned to the Set_Attribute_Single service request. Data Rate Switch TheThe 4-position rotary switch (Figure 6) is used to select the DeviceNet data rates of 125, 250, and 500 Kb. The switch positions are numbered in a clockwise direction, to correspond to the increasing data rate values.
  • Page 55 When this fault condition occurs, the Module Status LED illuminates solid red, in accordance with the ODVA “DeviceNet Specification,” Volume I [1]. Note When a major unrecoverable fault occurs, the device cannot communicate on the network and operation stops. Contact MKS for assistance. Table 16: Fault Conditions Module Status Fault Type...
  • Page 56 Trip Points Chapter Three: Overview Trip Points The DA01A transducer has two software trip points, which are maintained in the S-Analog Sensor Object: • Trip Point-Alarm, Low and High • Trip Point-Warning, Low and High The software trip point values are adjustable using digital communication commands such that when the pressure rises above one or below the other, the corresponding trip point changes state.
  • Page 57 Chapter Three: Overview Labels Labels Note The drawings in Figures Error! Bookmark not defined. and 10 are not drawn to scale. Band Label The band label, which is wrapped around the transducer body, lists the pinouts for the unit’s 5-pin micro-style digital communications connector (Table 9, page 29) and the 9-pin Type DE-9S analog interface connector (Table 10, page 30).
  • Page 58 Labels Chapter Three: Overview This page intentionally left blank.
  • Page 59 Chapter Four: Operation General Information Chapter Four: Operation General Information Note Use this manual with the ODVA “DeviceNet Specification,” Volume I and Volume II [1, 2]; and the SEMI Standards Common and Specific Device Models [3, 4, 5] to obtain a complete functional description of your device. Refer to Table 6, page 20, for a list of the documents referenced throughout this manual.
  • Page 60 DeviceNet Messaging Protocol Chapter Four: Operation In the actual application of DeviceNet communications, the messaging process typically is automated using an interface software program; therefore, manual calculation and interpretation of the messages is not required. Typical interface programs require only the input of specific class codes, instance IDs, attribute IDs, and any required data variable(s).
  • Page 61 Chapter Four: Operation DeviceNet Messaging Protocol Message ID This fixed 2-bit field indicates the type of messaging used in the device. The identifier for Group 2 messages is fixed with bits 10 and 9 set to 1 and 0 respectively. The identifier for Group 1 messages is fixed with bits 10 and 9 set to 0 and 1 respectively.
  • Page 62 DeviceNet Messaging Protocol Chapter Four: Operation Table 17: CAN Identifier Field Group 2 Group 2 Message Node Address Message ID Type ID Hexadecimal Value—6-bits Fixed 2-bit value Fixed 3-bit value Destination Node Address Master’s Explicit Request Source Node Address Slave’s Explicit Response Destination Node Address Master’s I/O Poll Command...
  • Page 63 Chapter Four: Operation DeviceNet Messaging Protocol The message body is a series of up to five, 8-bit fields that defines the specific explicit message. The information included in the message body varies, depending on whether the message is a request or a response. The explicit message body consists of the following three required and two optional components: Required: •...
  • Page 64 DeviceNet Messaging Protocol Chapter Four: Operation Transaction ID Bit The transaction ID (XID) bit is a 1-bit field that is essentially a placeholder with a fixed value of Node Address The node address is a 6-bit field that identifies the network address of the device as a hexadecimal value.
  • Page 65 The attributes and services associated with each Object Model are defined throughout this chapter. Descriptions are supplied for the attributes and services that are either MKS-specific or require additional specifications beyond the DeviceNet and SEMI specifications [1, 2, 3, 4, 5]. A summary of the attributes is listed in Table 51, page 99.
  • Page 66 Objects Chapter Four: Operation Table 19: Object Classes in the DA01A Transducer Class Refer to Object Class Effect on Behavior Page Identity Supports the Reset services. Upon receipt of a Reset service request of any type, the Identity Object sends a Reset service request to the S-Device Supervisor.
  • Page 67 * This information also is available—in a different format—in the S-Device Supervisor Object (see page 78, for more information). Vendor Attribute ID #01 reports the registered vendor supplying the device. MKS Instruments is identified as Vendor #36 (24 Device Type Attribute ID #02 reports the type of device on the network in accordance with the ODVA “DeviceNet Specification,”...
  • Page 68 Identity Object Chapter Four: Operation Status Attribute ID #05 reports the current status of the device in accordance with the ODVA “DeviceNet Specification,” Volume II [2]. Serial Number Attribute ID #06 reports the serial number of the device in accordance with the ODVA “DeviceNet Specification,”...
  • Page 69 Chapter Four: Operation DeviceNet Object DeviceNet Object The DeviceNet Object (Class Code 03 ) contains the attributes for defining the configuration and status of the physical DeviceNet network connections. Use this object to set or report the node address (network address), the data rate, and the bus-off interrupt. In addition, use this object to report how the messaging supported by the device is allocated.
  • Page 70 DeviceNet Object Chapter Four: Operation Node Address The Node Address (network address) can be set with a software command using standard DeviceNet protocol over the network, or manually using the two 10-position rotary switches located on the top of the unit. Refer to Data Rate and Node Address Switches, page 43, for more information.
  • Page 71 Chapter Four: Operation DeviceNet Object Data Rate Switch Adjustment Refer to Data Rate Switch, page 44, for complete information on adjusting this switch. Note In order to control the data rate directly from the switch, ensure the switch is set to an actual value at power up, and not to the network (PGM) position.
  • Page 72 Assembly Object Chapter Four: Operation Assembly Object The Assembly Object (Class Code 04 ) stores data and groups attributes from multiple objects, allowing data to or from each object to be sent or received using a single explicit messaging command. Two instances of the Assembly Object (Table 25) are supported with one instance attribute (Table 26, page 63) and one DeviceNet common service (Table 27, page 63).
  • Page 73 Chapter Four: Operation Assembly Object Assembly Object Instance Attribute Table 26: Assembly Object Instance Attribute Attribute User Non- Factory ID # Data Mode Mode Data Default Volatile (hex) Description Type Access Access Memory Variable Setting Data ARRAY none none Data Attribute ID #03 reports the assembly data for the specified instance.
  • Page 74 Connection Object Chapter Four: Operation Connection Object The Connection Object (Class Code 05 ) contains the attributes for defining the messaging connections in the device. Each connection is defined by the type of messaging (explicit or I/O) it supports and how the I/O connections publish attribute data. Your transducer supports explicit and I/O poll messaging as defined in the Predefined Master/Slave Connection Set [1].
  • Page 75 Chapter Four: Operation Connection Object Explicit Messaging Instance Attributes Table 29: Explicit Messaging Instance Attributes Attribute Default ID # (dec) Attribute Name Value Description state Indicates the Explicit Messaging is in the Established state. instance_type Indicates this is an Explicit Messaging Connection.
  • Page 76 Connection Object Chapter Four: Operation I/O Poll Messaging Instance Attributes Table 30: I/O Poll Messaging Instance Attributes Attribute Default ID # (dec) Attribute Name Value Description state Indicates the Poll Connection Object is in the Configuring state. instance_type Indicates this is an I/O Connection. transportClass_trigger Server/Transport Class 3.
  • Page 77 Chapter Four: Operation Connection Object Table 30: I/O Poll Messaging Instance Attributes (continued) Attribute Default ID # (dec) Attribute Name Value Description consumed_connection_path Empty No specified default. An implementation must choose an Application Object to reference by default and initialize this attribute accordingly.
  • Page 78 Connection Object Chapter Four: Operation Table 32: Poll Response Assembly Instance 2 Data Byte Description Exception Status 16-Bit Pressure 0x30 0x31 Class Code (hex) Device Supervisor S-Analog Sensor Object Model Instance ID # (hex) 0x01 0x01 Attribute ID # (hex) 0x0C 0x06 USINT...
  • Page 79 Chapter Four: Operation S-Analog Sensor Object S-Analog Sensor Object The S-Analog Sensor Object (Class Code 31 ) contains the attributes for reporting the pressure values and for setting the variables used in the pressure calculation. The S-Analog Sensor Object also supports software alarm and warning trip points as descibed below. One instance of the S-Analog Sensor Object is supported with 25 instance attributes (refer to Table 35) and three DeviceNet services (refer to Table 39, page 74).
  • Page 80 S-Analog Sensor Object Chapter Four: Operation Table 35: S-Analog Sensor Class Specific Attributes (continued) Non- Factory Attribute ID # DeviceNet Access Volatile Default Description Data Type Rule Memory Setting (dec) (hex) 0x20 Overrange INT or REAL U-Get 110% FS 0x21 Underrange INT or REAL U-Get...
  • Page 81 Chapter Four: Operation S-Analog Sensor Object where: PressurePFS = Attribute 0x77 Full Scale = Attribute 0x0A Gain = Attribute 0x0E OffsetB = Attribute 0x10 Status Attribute ID # 07 indicates the Alarm and Warning state of this object instance. Table 37: Status Attribute Values Definition High Alarm Exception: 0 = cleared, 1 = set...
  • Page 82 S-Analog Sensor Object Chapter Four: Operation Offset-B Customer Offset Attribute ID # 16 indicates an amount added to derive Value. The acceptable value for Offset B is ±5% of the Full Scale pressure value. This can be used to modify the calculated digital value. The default is 0.
  • Page 83 Chapter Four: Operation S-Analog Sensor Object Note Hysteresis can only be set using DeviceNet digital communications commands. Warning Settling Time Attribute ID # 24 determines the time in milliseconds that the Value must exceed the Trip Point before the exception condition is generated. The default is 0. Overrange Attribute ID # 32 specifies the highest valid Value (110% of Full Scale).
  • Page 84 S-Analog Sensor Object Chapter Four: Operation Pressure Units Support Table 38: S-Analog Sensor Pressure Units Support Code Symbol Name Conversion Factor 1001 hex 4097 Counts Full Scale Counts 23405=100% Full Scale 1007 hex 4103 Percent % Full Scale 100.00 (Base % Full Scale) 1300 hex 4864 (pound-force)/(inch) 2...
  • Page 85 Chapter Four: Operation Device Configuration Object Device Configuration Object Support added in firmware version AF (1.009). Not valid for previous versions. The Device Configuration Object (Class Code 6D ) contains the attributes for selecting the poll response that is returned with I/O poll messaging connections. One instance of the Device Configuration Object is supported with three instance attributes (Table 40) and three DeviceNet common services (Table 41, page 75).
  • Page 86 Identity Object (refer to Table 20, page 57) in accordance with the ODVA DeviceNet Specification, Volume II [2]. In addition, the S-Device Supervisor Object includes attributes specific to the MKS transducer, in accordance with the SEMI Standards Common and Specific Device Models [3, 4, 5].
  • Page 87 Chapter Four: Operation S-Device Supervisor Object Table 42: S-Device Supervisor Class Specific Attributes (continued) Attribute ID # DeviceNet Non-Volatile Factory Description* Data Type Access Rule Memory Default Setting (dec) (hex) 0x0F Alarm Enable BOOL U-Set/Get 0 (disabled) 0x10 Warning Enable BOOL U-Set/Get 0 (disabled)
  • Page 88 Manufacturer’ Name Attribute ID #05 reports the manufacturer of the DA01A capacitance manometer using an ASCII string of up to 20 characters. The manufacturer of the unit is always reported as MKS Instruments, identified with the ASCII string “MKS Instruments”...
  • Page 89 • Device Specific—specific to capacitance manometers • Manufacturer Specific—specific to the MKS unit The response is a byte structured as a bit mapped variable [3]. The transducer supports the expanded method of reporting exceptions. The bit map format is: Table 44 lists the bit map defining this variable.
  • Page 90 S-Device Supervisor Object Chapter Four: Operation Table 45: Exception Detail Alarm Bytes Byte Description Number of Common Alarm Detail Bytes XXXXXXXX Common Alarm Detail Byte 0 XXXXXXXX Common Alarm Detail Byte 1 Number of Device Alarm Detail Bytes XXXXXXXX Device Alarm Detail Byte 0 XXXXXXXX Device Alarm Detail Byte 1 Number of Manufacturer Alarm Detail Bytes...
  • Page 91 Chapter Four: Operation S-Device Supervisor Object Alarm Enable This Boolean attribute (Attribute ID #15) is used to enable (1) or disable (0) the S-Device Supervisor object’s process of setting Alarm Exception bits. Disabled (default) Enabled When disabled, corresponding bits are never set; and, if they were set, disabling clears them. Also, alarm bit states are not retained;...
  • Page 92 S-Device Supervisor Object Chapter Four: Operation Note To switch between the two operating modes, you must use the Lock and Unlock services. Use the Lock service to place your device into the User Mode (refer to Lock, page 112). Use the password protected (1234 ) Unlock service to place your device into the Calibration Mode (refer to Unlock, page 113).
  • Page 93 Chapter Four: Operation S-Device Supervisor Object Table 47: Exception Detail Alarm Map Byte Description Object Model Common Alarm 0 to 7 Least significant byte of Common Alarm Single Byte 2 Size Size (byte length) always 01 hex. Byte length always 02 hex Common [Byte 0] Internal Diagnostic Exception S-Device Supervisor...
  • Page 94 S-Device Supervisor Object Chapter Four: Operation Table 47: Exception Detail Warning Map (continued) Byte Description Object Model Common Warning 0 to 7 Byte length always 01 hex Single Byte 2 Size Common [Byte 0] Internal Diagnostic Exception S-Device Supervisor Microprocessor Exception S-Device Supervisor EEPROM Exception S-Device Supervisor...
  • Page 95 Chapter Four: Operation S-Device Supervisor Object Last Calibration Date Attribute ID # 0x13 reports the date the device was last calibrated by the user. The response is formatted as a data structure of four bytes used to represent a calendar date, as listed in Table 48. Table 48: Calibration Date Format Byte # Description...
  • Page 96 S-Device Supervisor Object Chapter Four: Operation S-Device Supervisor Object Supported Services The S-Device Supervisor Object is supported by the seven DeviceNet services listed in Table 49. Refer to Supported Service Summary, page 107, for more information. Table 49: S-Device Supervisor Object Supported Services Service Parameter ID #...
  • Page 97 Troubleshooting Chart (Table 50, page 88). If the transducer performance does not improve and it is necessary to return the unit to MKS for service, obtain an ERA Number (Equipment Return Authorization Number) from any MKS Calibration and Service Center (listed on the inside back cover of this manual) before shipping.
  • Page 98 (transducer to electronics Inspect cable and transducer. module). Replace, if necessary. Measurement Overpressure and/or a build-up Return to MKS for servicing or slowly goes of contamination in the transducer replacement. positive over time. measurement cavity. Unstable zero The ambient temperature may be Refer to Startup, page 30 to ensure output.
  • Page 99 Appendix A: Product Specifications Appendix A: Product Specifications Digital Communication Specifications Bus Addressing Master/slave information flow Data Rate Switch/Network Length One, 4-position user-adjustable switch: Software Override PGM (Programmable over the network) 125 Kb 500 m (1,640 ft) 250 Kb 250 m (820 ft) 500 Kb 100 m (328 ft) DeviceNet V 2.0 Device Group 2...
  • Page 100 Troubleshooting Appendix A: Product Specifications Electrical Specifications DA01A (Ambient) DA01A (45° C) DA01A (80° C) CE Compliance Pending Specification EN61326 Electromagnetic EMC Directive 2004/108/EEC Compatibility Input Power Requirements Voltage +11 to +25 VDC * +11 to +25 VDC * +11 to +25 VDC * Current at Warm Up 200 mAmps (max) 700 mAmps (max)
  • Page 101 Appendix A: Product Specifications Environmental Specifications DA01A DA01A (45° C) DA01A (80° C (Ambient) and 100 Maximum External Case 50° C (122° F) 65° C (149° F) 50° C (122° F) Temperature 0° to 50° C 15° to 40° C 15°...
  • Page 102 Troubleshooting Appendix A: Product Specifications Performance Specifications Accuracy Range (Torr) Standard Accuracy Optional (nonlinearity, hysteresis, and non-repeatability) (% of Reading) (% of Reading) (% of Reading) DA01A (Ambient) 1, 2, 5 0.25% 10, 20, 50, 100, 0.25% 0.15% 200, 500, 1000 DA01A (45°...
  • Page 103 Appendix A: Product Specifications Time Response Pressure Measurement Response Less than 30 ms with no digital filtering. Polled Communication Response 1 ms, maximum RoHS (Restriction of Fully compliant to Directive 2002-95-EC Hazardous Substances) Compliance ® Media Compatibility Any gas compatible with Inconel and 316 stainless steel Physical Specifications Dimensions...
  • Page 104 Troubleshooting Appendix A: Product Specifications This page intentionally left blank.
  • Page 105 Appendix B: Model Code Explanation Appendix B: Model Code Explanation...
  • Page 106 Troubleshooting Appendix B: Model Code Explanation Range (XX) The full scale range is indicated by a 2-character code. It is expressed in the selected engineering unit. Full Scale Range Ordering (mmHg/Torr) Code 0.10 0.25 1000 Engineering Units (X) The engineering units are indicated by a single letter code. Ordering Units Code...
  • Page 107 Appendix B: Model Code Explanation Fittings (XX) Several types of fittings are available, designated by a 2-character code. No additional parts are required. Ordering Fittings Code Straight Tube 50 O.D. (1 K mmHg max) Swagelok 8-VCR (female) Mini-CF (rotatable) NW-16-KF (5 K mmHg max) Swagelok 8-VCO (female)
  • Page 108 Troubleshooting Appendix B: Model Code Explanation Sensor Control Temperature The sensor control temperature is designated by a single letter code. Ordering Sensor Control Temperature Code Ambient 45° C 80° C Electrical Connector Ordering Connector Code 5 pin DeviceNet Micro Connector with 9 pin D Calibration Type The calibration type is designated by a single letter code.
  • Page 109 Appendix C: Command Summary Attribute Summary Appendix C: Command Summary Attribute Summary Table 51 lists the attributes for the Object Models in your transducer by Class Code. For more information on each Object Model, refer to Chapter Four: Operation, page 49. Table 51: Attribute Summary Instance Attribute...
  • Page 110 Attribute Summary Appendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting none state Indicates the Explicit Connection Messaging is in the Established state.
  • Page 111 Appendix C: Command Summary Attribute Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting produced_ Refer to [1]. Connection connection_path_ length produced_ Empty Refer to [1].
  • Page 112 Attribute Summary Appendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting state Indicates the Poll none Connection Connection Object is in the Configuring state.
  • Page 113 Appendix C: Command Summary Attribute Summary Table 51: Attribute Summary (continued) Class Code (hex) Instance Attribute Factory Object ID # ID # Default Default Model (hex) (dec) Attribute Name Value Description Setting watchdog_ Transition to the Timed none Connection timeout_action Out state.
  • Page 114 Attribute Summary Appendix C: Command Summary Table 51: Attribute Summary (continued) Class Attribute Non- Code (hex) Volatile Factory ID # Object DeviceNet Data Access Memor Default Model (dec) (hex) Description Type Rule Setting 0x31 0x03 Data Type USINT U-Set/Get 0xC3 S-Analog (INT) Sensor...
  • Page 115 Device Type SHORT U-Get Supervisor STRING 0x04 SEMI Standard SHORT U-Get E54-0997 Revision Level STRING 0x05 Manufacturer’s SHORT U-Get MKS Instruments Name STRING 0x06 Manufacturer’s SHORT U-Get DA01A Model Number STRING 0x07 Software SHORT U-Get Current firmware Revision Level STRING...
  • Page 116 Attribute Summary Appendix C: Command Summary Table 51: Attribute Summary (continued) Class Code (hex) Attribute Non- Factory Object ID # DeviecNet Access Mode Volatile Data Default Model (dec) Description Data Type Rule Access Memory Variable Setting S-Device Scheduled -32,767 to Supervisor Maintenance +32,767...
  • Page 117 Appendix C: Command Summary Supported Service Summary Supported Service Summary Table 52 lists the services supported by the Object Models in your transducer by their ID number. It also lists the Object Models that support each service. The service parameters are defined on pages 110 to 113.
  • Page 118 Supported Service Summary Appendix C: Command Summary Table 52: Supported Service Summary (continued) Service Parameter ID # Service Data Service Object (hex) Name Type(s) Type Description Models Set_Attribute_Single* USINT, Request Modifies the object Identity attribute. Attribute DeviceNet Data Type Connection Analog Input Output Pressure...
  • Page 119 Appendix C: Command Summary Supported Service Summary Table 52: Supported Service Summary (continued) Service Parameter ID # Service Data Service Object (hex) Name Type(s) Type Description Models Reset USINT Request Places the object into its Initializing state. Get_Attribute_Single USINT Request Reads the object attribute.
  • Page 120 Supported Service Summary Appendix C: Command Summary Get Attribute Single The Get_Attribute_Single service (ID #0E) reads the value of an object instance attribute. This service is valid for every object in your device. Table 53 lists the parameters for this DeviceNet common service.
  • Page 121 Appendix C: Command Summary Supported Service Summary Restore Default The Restore_Default service (ID #15) restores attributes in the specified object to their factory default values. This service is valid for the Analog Input, Output Pressure, Device Configuration, Trip Point, and SAC Objects. Table 55 lists the parameters for this DeviceNet common service. Table 55: Restore Default Service Parameters Service Parameter...
  • Page 122 Supported Service Summary Appendix C: Command Summary Allocation Choice Parameter The Allocation Choice parameter is specified within a single byte (Table 57). Each bit denotes an explicit and/or I/O poll connection(s) from the Predefined Master/Slave Connection Set that is to be allocated.
  • Page 123 Appendix C: Command Summary Supported Service Summary Unlock The password protected Unlock service (ID #4E)—valid only for the S-Device Supervisor Object—places the device into the Calibration Mode, which enables you to modify certain read- only attributes of the device. Table 60 lists the parameters for this service. Table 60: Unlock Service Parameters Service Parameter...
  • Page 125 The examples depict explicit messaging. • The examples are all nonfragmented message strings. • The node address of the MKS device (the Slave) is 05. • The node address of the master device is 01. • Spaces are shown for clarity only. Do not enter spaces in the actual message string.
  • Page 126 Refer to Figure 12, step 1, page 117. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the destination node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit request (bits 2 to 0). The hexadecimal value of the CAN Identifier Field components is 42C 2.
  • Page 127 Appendix D: Example Messages Explicit Messaging 000101 = 42C Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD DESTINATION MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit request shown) = 01 000001 Step 2...
  • Page 128 Refer to Figure 14 step 1, page 119. This 11-bit field represents the fixed Group 2 Message ID (bits 10 & 9), the source Node Address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).
  • Page 129 Appendix D: Example Messages Explicit Messaging = 42B 000101 Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD SOURCE MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit response shown) = 01 000001 Step 2...
  • Page 130 Refer to Figure Error! Bookmark not defined., step 1, page 121. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the source node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).
  • Page 131 Appendix D: Example Messages Explicit Messaging = 42B 000101 Step 1 GROUP 2 MESSAGE ID (fixed 2 bit hex value) IDENTIFIER FIELD SOURCE MAC ID (= 5) (6 bit hex value) MESSAGE TYPE ID (fixed 3 bit hex value; explicit response shown) 000001 = 01 Step 2 MESSAGE HEADER...
  • Page 132 Refer to Figure 18. This 11-bit field represents the fixed Group 2 Message ID (bits 10 and 9), the destination node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an I/O request (bits 2 to 0). The hexadecimal value of the CAN...
  • Page 133 Refer to Figure 20, step 1, page 124. This 11-bit field represents the fixed Group 2 Message ID (bits 10 & 9), the source node address (the MKS device) as a hexadecimal number (bits 8 to 3), and the fixed Message Type ID for an explicit response (bits 2 to 0).
  • Page 134 I/O Poll Messaging Appendix D: Example Messages 2. Interpret the reported value of poll response #1. Refer to Figure 20, step 2, page 124. The reported value for the Status Byte (80 ) indicates that no exceptions are set. The Status Byte Bit map is shown in Table 44, page 79. The reported value for the 16-bit pressure value (FF 3F) indicates that the pressure is measured at 50% FS.
  • Page 135 Index I/O Poll Messaging Index Customer support, 21 Alarms calibration expiration, 85 Data format, 63 Allocation information, 61, 64, 111 Device configuration object, 70–75 Assembly Device manager object, 77–86 data format, 63 Device type, 57, 75, 77 poll messaging, 62 DeviceNet messaging Assembly object, 62–63 description of, 49...
  • Page 136 Index I/O poll messaging connections, 50 Network manager object, 59–61 Identity object, 57–58 Non-volatile RAM, 55 Installation Category, 25 Object model Labels description of, 18, 55 band label, 47 Operating modes, 49, 81 serial number label, 47 Output pressure object, 69 LED Indicators, 27 LEDs Perform_Remote_Zero, 113...
  • Page 137 Index Safety information, 1–16 Warm up time, 31 Sensor, description of, 39 Serial number Zero adjustment, 31, 87 ASCII string, 78 digital (zero offset), 34 label, 47 Perform_Remote_Zero, 113 ODVA format, 58 Zero Adjustments Modes, 35 Signal Conditioner/Electronics, 39 Zero Pushbutton, 28 Standard revision level, 77 Zeros, description of, 33 Startup...