Sign In
Upload
Download
Table of Contents
Contents
Add to my manuals
Delete from my manuals
Share
URL of this page:
HTML Link:
Bookmark this page
Add
Manual will be automatically added to "My Manuals"
Print this page
×
Bookmark added
×
Added to my manuals
Manuals
Brands
MKS Manuals
Measuring Instruments
Mass-Flo 1179A
Instruction manual
MKS Mass-Flo 1179A Instruction Manual
Controller and meter
Hide thumbs
1
2
3
4
Table Of Contents
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
page
of
88
Go
/
88
Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Table of Contents
Mass Flow Controller Safety Information
Symbols Used in this Instruction Manual
Symbols Found on the Unit
Table 1: Definition of Symbols Found on the Unit
Safety Procedures and Precautions
Sicherheitshinweise für den Massenflußregler
In dieser Betriebsanleitung Vorkommende Symbole
Erklärung der am Gerät Angebrachten Symbole
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Informations Relatives À la Sécurité Pour Le Contrôleur de Débit de Masse
Symboles Utilisés Dans Ce Manuel D'utilisation
Symboles Apparaissant Sur L'unité
Tableau 3: Définition des Symboles Apparaissant Sur L'unité
Mesures de Sécurité Et Précautions
Medidas de Seguridad del Controlador de Flujo de Masa
Símbolos Usados en Este Manual de Instrucciones
Símbolos Hallados en la Unidad
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
Procedimientos y Precauciones de Seguridad
Chapter One: General Information
Introduction
Design Features
Reliability
Cleanliness Features
How this Manual Is Organized
Customer Support
Chapter Two: Installation
How to Unpack the Type 1179 Series Unit
Opening the Package
Unpacking Checklist
Environmental Requirements
Interface Cables
Table 5: MKS Cables
Generic Shielded Cable Description
Setup
Dimensions
Figure 1: Outline Dimensions of the Type 1179 MFC and Type 179 MFM
Figure 2: Side View of the Type 1179 MFC and Type 179 MFM
Figure 3: Outline Dimensions of the Type 2179 MFC (with Optional Mounting Plate)
Gas Line Connections
Standard Fittings
Optional Fittings
Mounting a Type 1179 MFC
Figure 4: Mounting Dimensions of the 1179 Flow Controller
Mounting a Type 2179 MFC
Figure 5: Mounting Dimensions of the Base Aluminum Plate
Figure 6: Mounting Dimensions of the Type 2179 Flow Controller
Chapter Three: Overview
Type 2179 MFC with a Positive Shutoff Valve
Electrical Connections
9-Pin Type "D" Connector
Table 6: 9-Pin Type "D" Connector Pinout
P.C. Edge Card Connector
Table 7: 20-Pin Edge Card Connector Pinout
15-Pin Type "D" Connector
Table 8: 15-Pin Type "D" Connector Pinout
The Gas Correction Factor (GCF)
How to Calculate the GCF for Pure Gases
How to Calculate the GCF for Gas Mixtures
How to Read Mass Flow at a Different Reference Temperature
Labels
Control Valve (MFC Only)
Figure 7: Serial Number Label
Chapter Four: Operation
How to Start up the MFC/MFM
How to Zero the Flow Controller
How to Adjust the Controller Gain (MFC Only)
How to Override the Valve (MFC Only)
Priority of the Commands
How to Use the Optional Input (MFC Only)
Chapter Five: Theory of Operation
General Information
Flow Path
Measurement Technique
Control Circuitry
Chapter Six: Maintenance
General
Zero Adjustment
Repair
Chapter Seven: Troubleshooting
Troubleshooting Chart
Table 9: Troubleshooting Chart
How to Adjust the Valve Preload (MFC Only)
Figure 8: Location of the Retaining Screws
Figure 9: Location of the Lock Nut and Centershaft
Table 10: Maximum Valve Currents
Table 11: Valve Current Headroom
Figure 10: Location of the R85 Potentiometer on the PC Board
Appendix A: Product Specifications
Performance Specifications
Environmental Specifications
Electrical Specifications
Physical Specifications
Appendix B: Model Code Explanation
Model Code
Appendix C: Gas Correction Factors
Common Gases
Appendix D: MFC Sizing Guidelines
General Information
How to Determine the Flow Controller Range
How to Determine the Valve Configuration
Table 12: C V Pressure Factors
Table 13: Valve Configuration Selection Guide
Example
Appendix E: Positive Shutoff Valve Information
How to Operate the Positive Shutoff Valve
Table 14: Suitable Two-Way Solenoid Valves
Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve
Index
Advertisement
Quick Links
1
How to Zero the Flow Controller
2
How to Adjust the Controller Gain (Mfc Only)
Download this manual
116527-P1
Rev E, 3/99
Instruction Manual
MKS Type 1179A and 2179A
®
Mass-Flo
Controller
and
Type 179A Mass-Flo Meter
Six Shattuck Road
Fax: (978) 975-0093
Andover, MA 01810-2449
E-mail: mks@mksinst.com
(800) 227-8766 or (978) 975-2350
Web site: http://www.mksinst.com
Table of
Contents
Previous
Page
Next
Page
1
2
3
4
5
Advertisement
Table of Contents
Need help?
Do you have a question about the Mass-Flo 1179A and is the answer not in the manual?
Ask a question
Questions and answers
Related Manuals for MKS Mass-Flo 1179A
Measuring Instruments MKS 146C Instruction Manual
Cluster gauge vacuum gauge measurement and control system (358 pages)
Measuring Instruments MKS Spectra-Physics HighQ-2 Pre-Installation Manual
(11 pages)
Measuring Instruments MKS 903 Series Instruction Manual
Inverted magnetron cold cathode ionization vacuum sensor (40 pages)
Measuring Instruments MKS Mass-Flo 2179A Instruction Manual
Controller and meter (88 pages)
Measuring Instruments MKS Granville-Phillips Series 275 Instruction Manual
Mini-convectron vacuum gauge module with nonlinear analog outputs and process control relays (66 pages)
Measuring Instruments MKS 275 series Quick Start Manual
For the granville phillips series 275 mini convectron vacuum gauge modules with nonlinear analog output and process control relays (2 pages)
Measuring Instruments MKS Granville-Phillips Mini-Convectron 275 series Instruction Manual
Vacuum gauge module with devicenet digital interface (68 pages)
Measuring Instruments MKS Granville-Phillips Mini-Convectron 275 series Quick Start Manual
Vacuum gauge modules with devicenet interface (2 pages)
Measuring Instruments MKS Microvision2 Hardware Manual
(50 pages)
Measuring Instruments MKS Microvision Plus User Manual
(46 pages)
Measuring Instruments MKS Baratron 622D Manual
Absolute pressure transducers and absolute pressure transducer with trippoint relays (59 pages)
Measuring Instruments MKS Ion Systems 775 Instruction Manual
Electrostatic fieldmeter (12 pages)
Measuring Instruments MKS Ophir NOVA II Quick Reference
(2 pages)
Measuring Instruments MKS Vision 2000-C Manual
(37 pages)
Measuring Instruments MKS Spectra-Physics Pre-Installation Manual
(29 pages)
Measuring Instruments MKS HPQ3 Hardware Manual
(64 pages)
This manual is also suitable for:
Mass-flo 179a
Mass-flo 2179a
Table of Contents
Save PDF
Print
Rename the bookmark
Delete bookmark?
Delete from my manuals?
Login
Sign In
OR
Sign in with Facebook
Sign in with Google
Upload manual
Upload from disk
Upload from URL
Need help?
Do you have a question about the Mass-Flo 1179A and is the answer not in the manual?
Questions and answers