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Summary of Contents for MKS 903 Series
- Page 1 Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Instruction Manual Instruction manual part number 109030026 Revision B - May 2020...
- Page 3 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual © 2020 MKS Instruments, Inc. All rights reserved. IgniTorr and mksinst is are trademarks of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
- Page 4 Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Catalog numbers for Series 903 Cold Cathode Ionization Vacuum Sensor 109030111 109030112 109030113 109030114...
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Page 5: Table Of Contents
Table of Contents Chapter 1 General Information ............. . . 7 Receiving Inspection . - Page 6 Series 903 Cold Cathode Vacuum Sensor Instruction Manual - #10903002...
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Page 7: Chapter 1 General Information
Any damaged material including all containers and packaging should be held for carrier inspection. Contact MKS Customer Support for assistance if your shipment is not correct for reasons other than shipping damage. -
Page 8: Customer Service / Technical Support
1 General Information 1.5 Customer Service / Technical Support Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA. -
Page 9: Chapter 2 Safety
These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact MKS. This product was designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions. -
Page 10: Responsibility
For emergencies and for product safety related matters, contact the MKS Customer Service Department. See Section 1.5 or Section 6.9 for detailed information regarding how to contact MKS Customer Service Representatives. Series 903 Cold Cathode Vacuum Sensor... -
Page 11: Grounding Requirements
2 Safety 2.3 Grounding Requirements See Grounding, Section 4.2 in the Installation chapter for more detailed requirements regarding gauge and system grounding. Proper Grounding All components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation. -
Page 12: High Voltage
2 Safety 2.4 High Voltage High Voltage is present in the unit when electrical power is applied to the electronics enclosure. Hazardous voltages may still be present for some time after disconnecting power to the electronics enclosure. Refer to the Installation and Service chapters for more information. High Voltage Be aware that when high voltage is present in any vacuum system, a life threatening electrical shock hazard may exist... -
Page 13: Over Pressure Conditions
2 Safety 2.5 Over Pressure Conditions Explosive Environment Do not use the Series 3903 Transducer in an environment of explosive or combustible gases or gas mixtures. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. Do not use the product to measure the pressure of explosive gases or gas mixtures. -
Page 14: Damage Requiring Service
Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by MKS for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications. -
Page 15: Chapter 3 Specifications
3 Specifications Chapter 3 3Specifications 3.1 General Description The Series 903 Inverted Magnetron Transducers are modular instruments consisting an ionization gauge and electronics enclosure capable of measuring vacuum pressures from less than 1 x 10 Torr to 5 x 10 Torr, air or equivalent using a miniature triode style ionization gauge. -
Page 16: Specifications
3 Specifications 3.5 Specifications Table 3-1 Specifications for the Series 903 Transducer Parameter Specification Performance Torr: 3.0 x 10-10 to 5.0 x 10-3 Measurement Range for N / Air mbar: 3.9 x 10-10 to 6.5 x 10-3 Do NOT use this product with flammable or explosive gases. -
Page 17: Dimensions
3 Specifications 3.5.1 Dimensions Figure 3-1: Series 903 Cold Cathode Sensor Dimensions Series 903 Cold Cathode Vacuum Sensor Instruction Manual - #109030026... - Page 18 3 Specifications Notes: Series 903 Cold Cathode Vacuum Sensor Instruction Manual - #109030026...
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Page 19: Chapter 4 Installation
4 Installation Chapter 4 4Installation 4.1 Transducer Location Notice Install the Transducer on the vacuum chamber where it is protected from physical damage and high heat. See Section 2.5, Over Pressure Conditions, for important safety information before mounting the gauge. Locate the 903 Transducer where it can measure process chamber or manifold pressure. - Page 20 4 Installation Connect the Transducer to the vacuum system flange using the appropriate gasket and mounting hardware. Notice A solid electrical connection between the sensor tube and the grounded vacuum system must be used to shield the electronics from external power sources.
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Page 21: Electrical Connections
4 Installation 4.3 Electrical Connections Do not connect or disconnect any electrical connectors while power is applied to the equipment (hot swapping). Doing so may cause damage to the equipment or severe electrical shock to personnel. This hazard is not unique to this product. Connect a user-supplied cable to the Transducer using a mating 9-pin D-sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors. - Page 22 4 Installation Do not connect the negative side of the analog output, pin 7, to the negative side of the power supply input, pin 2, or to any other ground. Half of the power current would flow through this wire. Measurement errors in the output voltage may be seen due to the voltage drop from this current.
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Page 23: Chapter 5 Operation
5 Operation Chapter 5 1Operation 5.1 Introduction The Series 902 Inverted Magnetron Cold Cathode Sensor is designed for applications which require pressure measurement in the range from 5 x 10 down to 3 x 10 Torr. Its rapid response and wide measurement range provide the equipment designer with maximum flexibility. -
Page 24: Theory Of A Cold Cathode Ionization Sensor
5 Operation 5.2 Theory of a Cold Cathode Ionization Sensor A cold cathode ionization sensor has a number of inherent advantages over a hot cathode sensor, including: • No filament to burn out, which makes it immune to inrushes of air, and it is relatively insensitive to vibration damage •... -
Page 25: Starting The 903 Sensor
5 Operation magnetron to reduce these problems by using separate feedthroughs for the anode high voltage and the cathode current. This geometry uses a cylindrical cathode, a central wire anode, and external cylindrical magnet which provides an axial field. The cathode is insulated from the grounded metal housing. -
Page 26: Equation For Converting Voltage To Pressure
5 Operation 5.3.2 Equation for Converting Voltage to Pressure The following equation converts the 903 Sensor voltage reading “V” to a pressure reading “P” when using air or nitrogen. The voltage must be within the domain of the equation or an incorrect pressure reading will result. -
Page 27: Venting To Atmosphere
Before using the 903 Sensor to measure the pressure of gases other than air or nitrogen, read and understand this section. If additional information is needed, contact MKS Customer Support at +1-833-986-1686 or email: insidesales@mksinst.com. In a cold cathode ionization sensor, the degree of ionization, hence the indicated pressure, is gas-type dependent. -
Page 28: Calibrating For Other Gases
5 Operation Figure 5-5: Indicated Pressure vs True Pressure 5.7 Calibrating for Other Gases Air calibration is indistinguishable from nitrogen. To determine the voltage/ pressure relationship for a gas which is not shown on the graph in Figure 5-2, the sensor must be calibrated. This requires a gas independent sensor, such as a capacitance manometer or spinning rotor gauge, to act as the calibration standard. -
Page 29: Chapter 6 Service & Maintenance
6 Service & Maintenance Chapter 6 2Service & Maintenance 6.1 Introduction The procedures in this section provide instructions for normal service issues that may be required during use of the Series 903 Cold Cathode Vacuum Sensor. 6.2 Service Guidelines Some minor difficulties are readily corrected in the field. Because the product contains static-sensitive electronic parts, the following precautions must be followed when troubleshooting: •... -
Page 30: Damage Requiring Service
Return the product to a service facility designated by MKS for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications. -
Page 31: Troubleshooting
1. D-sub is disconnected 1. Connect D-sub 2. Power supply turned OFF 2. Turn power ON 3. Defective PC board 3. Return to MKS for repair Analog output voltage higher 1. High voltage is turned OFF See Section 4.3.1 than 7.7 V Analog output voltage less 1. - Page 32 6 Service & Maintenance Figure 6-1: 903 Sensor Assembly Illustration 1) Remove the two Phillips head screws holding the electronics assembly to the sensor body. Remove the electronics assembly. 2) Using the smooth-jaw, needle-nose pliers, firmly grasp the compression spring at the tip closest to the flange.
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Page 33: Cleaning
6 Service & Maintenance 6.5.2 Cleaning If cleaning ultrasonically, use high quality detergents compatible with aluminum, such as ALCONOX® Scrubbing with mild abrasives can remove most contamination. Scotch- Brite or a fine emery cloth may be effective. Rinse with alcohol to remove particulates. Clean aluminum and ceramic parts chemically in a wash, such as a 5 to 20% sodium hydroxide solution (not for semiconductor processing), at room temperature (200C) for one minute. -
Page 34: Accessories And Spare Parts
6 Service & Maintenance Figure 6-2: Leaf Spring and Cathode Inside the Sensor 6.6 Accessories and Spare Parts Table 6-2: Accessories and Spare Parts Part/Item Part # IgniTorr™ Cold Cathode Starting Device 120V 100006850 220V 100007090 Internal Rebuild Kit 100002353 Cathode, Grid washer, Ground shield, Ceramic spacers, Small spring, Large spring KF 40... -
Page 35: Bakeout The Sensor
Repeat the test to confirm. 6.9 Customer Service / Technical Support Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. - Page 36 6 Service & Maintenance Notes: Series 903 Cold Cathode Vacuum Sensor Instruction Manual - #109030026...
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Page 37: Chapter 7 Index
Index 9, 10 Caution Notices & Symbols Over Pressure Conditions Damage requiring service Receiving Inspection Dimensions Safety 9, 10 Grounding Cautions & Warnings Gauge to Vacuum Chamber Service Requirements Contact Information 8, 35 Guidelines Service guidelines High Voltage Specifications Dimensions Introduction Storage General Description... - Page 38 Series 903 Cold Cathode Vacuum Sensor Instruction Manual - #109030026...
- Page 40 Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual Instruction manual part number 109030026...
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