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Ulvac C30PMVR Instruction Manual

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COMPRESSOR UNIT
Instruction Manual
C30PMVR
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
ULVAC CRYOGENICS INCORPORATED
D/N.MD30PMSE, 2023NR04

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  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. ULVAC CRYOGENICS INCORPORATED D/N.MD30PMSE, 2023NR04...
  • Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
  • Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
  • Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.

  • Page 6: General Precautions

    When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    Maintenance operation for a compressor stopped for a long period ......5-5 Section 6 Wiring and Piping Removal and Storage ............6-1 Removal of wiring and piping and displacement of compressor ........ 6-1 Maintenance in storage ....................6-3 ULVAC CRYOGENICS INCORPORATED...
  • Page 10 Figure 4-4 Connecting and disconnecting helium flexible hoses to compressor and refrigerator....................4-4 Figure 4-5 C30PMVR Compressor Connected to One Cryopump ........ 4-5 Figure 4-6 Connections of the compressor and multiple cryopumps ......4-6 Figure 4-7 Connecting input power cable connector ............4-7...
  • Page 11 Table of Contents Figure 4-8 Remote Connector Pin Assignments for C30PMVR ........4-8 Figure 4-9 “Momentary operating mode” wiring example for two cryopumps operation ....................... 4-9 Figure 4-10 Connector parts descriptions ..............4-10 Figure 4-11 Cut length of insulation coating ..............4-10 Figure 4-12 Fix with set screw ..................
  • Page 12 C30PMVR Compressor Unit Instruction Manual Table A-1 Operating log ....................A-1 Table B-1 Combination of C30PMVR compressor and cryopump ........ B-1 Table C-1 Variation of setting and connections ............. C-1 ULVAC CRYOGENICS INCORPORATED...

  • Page 13: Compressor Unit Safety Instructions

    6 times or less per hour as well. Do not use startup and shutdown of a compressor unit to control the temperature of our Super Trap. Please contact us when temperature control of the Super Trap is required. ULVAC CRYOGENICS INCORPORATED...

  • Page 14: Electrical Wiring Connections

    It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Follow recommended sizes for wires and cables. ・ Power lines and signal lines must be wired at least 10cm separate from one another. ULVAC CRYOGENICS INCORPORATED...

  • Page 15: Cooling Water

    Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...

  • Page 17: Disposal Considerations

    Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED MDIW001E,2018JE01 IW-1...
  • Page 18 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 19: C30Pmvr_Compressor Description

    RM50 refrigerators *1 Refer to Appendix B for detailed specifications on connectable cryopumps or refrigerators. *2 The C30PMVR has three coldhead power receptacles, but the number of refrigerators that can be run at one time is two. Terminology 1) We offer two types of cryopumps; one is the CRYO-U series cryopump which can ®...

  • Page 20: Roles Of Compressor In Cryopump System

    Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” thoroughly and conduct regular maintenance. Compressor specifications 1.5.1 External view Figure 1-1 shows external view of C30PMVR. (Front) (Rear) Figure 1-1 C30PMVR External View ULVAC CRYOGENICS INCORPORATED...
  • Page 21 Section 1 C30PMVR Compressor Description CAUTION Do not place objects or equipments on top of a compressor. It prevents heat to be released from compressors as well as applying unnecessary heat to the equipments placed on it. 1.5.2 Dimensions Figure 1-2 shows the external dimensions.

  • Page 22: Table 1-4 Cooling Water Requirements

    Input-output and Ground) (500V megohmmeter) (Between Dielectric withstanding voltage 1500V / 1 min. power line and ground) Noise immunity (Power line) ±1500V (*1) Noise immunity (Input-output line) ±500V (*1) (*1)By fast transient/burst method. Test duration : 1 min. ULVAC CRYOGENICS INCORPORATED...

  • Page 23: Component Descriptions

    Section 1 C30PMVR Compressor Description Component descriptions This section describes components that need adjustments and/or verifications during operation and maintenance. Compressor front view is shown in Figure 1-3 and rear view in Figure 1-4. ①Elapsed Time Meter Front Panel ②High Pressure Helium Gas Pressure Gauge ③COM:MONITORING PORT...
  • Page 24 Refer to “Section 5.1 Verification of helium static pressure” to verify the helium pressure when the compressor is not in operation. ULVAC CRYOGENICS INCORPORATED...
  • Page 25 Section 1 C30PMVR Compressor Description ③COM: MONITORING PORT This is a port for inspection of our engineer exclusive use. Please note that customers are not allowed to access this port. ④HELIUM FILL FITTING (Inside the panel) Use this to adjust helium gas pressure when needed. When adding helium gas, use only helium gas with a purity of 99.999% or above.
  • Page 26 ⑨CIRCUIT PROTECTOR (Inside the panel) The circuit protector is installed in order to protect wiring and connectors from the over-current produced by an electrical overload or short circuit. The circuit protector is set to ON when it is shipped. ULVAC CRYOGENICS INCORPORATED...
  • Page 27 Section 1 C30PMVR Compressor Description WARNING Circuit protector must be operated by authorized electrician familiar with the structure and the risk of this equipment. Failure to observe this warning may result in severe bodily injury or fatal accident. ⑩COLD HEAD(REFRIGERATOR)CABLE RECEPTACLES （COLD HEAD POWER NO.1, NO.2）...

  • Page 28: Cryo-U ® Cryopump Multiple Installation

    CRYO-U cryopump multiple installation ® C30PMVR can operate up to three cryopumps at a time (See Table 1-1). Figure 1-6 depicts a typical multi-cryopump installation with single compressor. For detailed instructions on cryopump installation with compressor, refer to “Section 4.4 Single cryopump installation”...

  • Page 29: Considerations Before Installation

    Combination of cryopump and compressor Refer to the table in “Appendix B Combination of C30PMVR Compressor and Cryopump” for typical combinations of cryopumps and compressor units.

  • Page 30: Wiring Requirements

    Refer to Table 1-3 in section 1 for circuit breaker current rating. CAUTION In most standards, it is required to install a branch breaker to protect power cables connected to the equipments. A circuit breaker must be installed. Failure to follow this procedure could seriously damage the equipment. ULVAC CRYOGENICS INCORPORATED...

  • Page 31: Figure 2-2 Equipment-Side Power Circuit

    T S R Power cable T S R T S R C30PMVR compressor X 2 Figure 2-2 Equipment-side power circuit Table 2-2 shows wire gauges of refrigerator cable and remote cable for use. Table 2-2 Control and signal wire gauges...

  • Page 32: Cooling Water Requirements

    If the cooling water is cooler than 10°C, stop the water flow when the compressor is suspended. If the cooling water of below 10°C is kept flowing, it may raise viscosity of lubricant oil and the compressor may fail to startup when turned on. ULVAC CRYOGENICS INCORPORATED...
  • Page 33 It is recommended to install a filter in the “Cooling water inlet” line in order to remove contaminant in the cooling water. Installing a water flow meter in the cooling water line of the compressor is also ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Length Of Cables And Flexible Hoses

    Specification Model Signal Quantity Photo Coupler Isolation Input Maximum Input voltage: 26VDC, Input Current: less than Input C30PMVR Rated Input Voltage: ON:20V and above, OFF:3V or less Dry contact form a Output Maximum Load: 30VDC / 100mA ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Figure 2-4 Remote Input Interface Circuit

    Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...

  • Page 36: Table 2-6 Remote Interface Signals

    The operating mode is switched automatically. The operating mode is determined by recognizing into which input pin the operation command of the compressor has entered after turning on the power supply. Once the operating mode is selected, the mode will be kept until the compressor is turned off. ULVAC CRYOGENICS INCORPORATED...
  • Page 37 3 minutes. Frequent starting/stopping shortens the insulation life of the refrigerator motor and may cause a failure of the product. Please use our temperature controller when turning ON/OFF the refrigerator for controlling temperature of a super trap. ULVAC CRYOGENICS INCORPORATED...

  • Page 38: Figure 2-6 Timing Chart For Alternate Operating Mode With Two Refrigerators

    Figure 2-7 shows a timing chart for “Momentary operating mode” with two refrigerators. COMP START/STOP CH1 REF CH2 REF COMP RUN CH1 ACK CH2 ACK Figure 2-6 Timing chart for Alternate operating mode with two refrigerators 2-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 39: Figure 2-7 Timing Chart For Momentary Operating Mode With Two Refrigerators

    Therefore the compressor will neither recognize nor output any remote signal with the equipment for a maximum of 5 seconds. For reference, the signal delay when powered on in Alternate operating mode is shown in Fig. 2-8. ULVAC CRYOGENICS INCORPORATED 2-11...

  • Page 40: Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode

    Note: Figure 2-10 leads the following equation: td + tw + 1 <= 2+ 5 + 1 = 8 (seconds) Where, “1” second is a margin added. 2-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Figure 2-9 Signal Delay When The Time Period From A Stop To A Restart Is Short

    (In Alternate operating mode) td(*1) tw≧5seconds INPUT POWER SUPPLY COMP START COMP STOP CH1 REF COMP RUN CH1 ACK COMP OPERATION CH1 OPERATION (*1) t≦2seconds Figure 2-10 Timing chart when a short power interruption occurs (In Momentary operating mode) ULVAC CRYOGENICS INCORPORATED 2-13...
  • Page 42 In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. NOTE: Refer to “Section 4.5.2 Connecting remote cables” for remote signal wiring. 2-14 ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Unpacking, Inspection And Storage

    Inspect the carton before unpacking for evidence of damage such as dents, breakage, wetness and/or signs that the carton has been tipped over. If there is any damage please contact the delivery company immediately. Figure 3-1 Appearance of a Compressor Carton ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Unpacking

    CAUTION Bring down and place the compressor on the flat floor to avoid the compressor slipping. If the floor is sloped the compressor may move this could result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Figure 3-2 Remove Cardboard And Insert Forks Underneath The Compressor

    The packages can be used for storage and transport of the compressor or for returning it to us for servicing. Remove the cardboard Compressor Compressor Side Front Direction of inserting forks of the forklift Bottom frame Figure 3-2 Remove Cardboard and Insert Forks underneath the Compressor ULVAC CRYOGENICS INCORPORATED...

  • Page 46: Carton Contents

    Accessories Inspect and visually confirm the accessories that there is no evidence of damage If any damage is found, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...

  • Page 47: Flexible Hoses And Specifications

    Failure to observe this warning may result in damage and/or break down of the equipment. CAUTION When carrying flexible hoses, keep appropriate bend radius. When storing them, avoid corrosion and condensation in the same manner as handling other equipments. ULVAC CRYOGENICS INCORPORATED...
  • Page 48 Compressor Unit Instruction Manual This page intentionally left blank.  ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Equipment Installation, Piping, And Wiring

    Electrical connections ................. 4-7 Wire rooting for compressor and other equipments ......4-11 4.1 Before installation This section describes appropriate procedure for installing C30PMVR and connecting the ® compressor to a CRYO-U cryopump. The procedure of connecting the compressor to a CRYO-T super trap is the same as connecting to a cryopump;...

  • Page 50: Connecting Cooling Water Piping

    4.3 Connecting and disconnecting helium flexible hoses CAUTION Follow the procedures below to connect and disconnect flexible hoses. Failure to observe this warning may result in damage to the O-ring seals of the coupling and/or leakage of helium gas. ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Connecting Procedures

    4. Verify the helium filling pressure referring to “Section5.1 Verification of helium static pressure”. Tighten in clockwise. hold the nut with 26mm spanner. Figure 4-2 Fasten with hands first (left) Figure 4-3 Tighten with two spanners (right) ULVAC CRYOGENICS INCORPORATED...
  • Page 52 To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Do not use other spanners. Loosen the couplings with two spanners and then take them off by both hands. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Single Cryopump Connections

    SUPPLY Helium supply flexible hose Helium return flexible hose RETURN Coldhead cable NO.1 RETURN GAS SUPPLY GAS Cooling water Figure 4-5 Figure 4-5 C30PMVR Compressor Connected to One Cryopump C30PMVR Compressor Connected to One Cryopump ULVAC CRYOGENICS INCORPORATED...

  • Page 54: Multiple Cryopump Connections

    Helium supply flexible hose SUPPLY Helium return flexible hose RETURN NO.1 NO.2 Helium Refrigerator power cables manifolds Cooling water Inverter Controller AC input power Figure 4-6 Connections of the compressor and multiple cryopumps ULVAC CRYOGENICS INCORPORATED...

  • Page 55: Electrical Connections

    Turn it until it won’t turn any more to connect the plug properly. more to connect the plug properly. Figure 4-7 Figure 4-7 Connecting input power cable connector Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...
  • Page 56 COMP RUN1 COMP RUN2 ALARM1 C20 COMP ON/OFF ALARM2 (SRCN6A25-24P) Figure 4-8 Figure 4-8 Remote Connector Pin Assignments for C30PMVR Remote Connector Pin Assignments for C30PMVR (Side View of the Plug Soldering) (Side View of the Plug Soldering) ULVAC CRYOGENICS INCORPORATED...

  • Page 57: Operation

    Section 4 Equipment Installation, Piping, and Wiring Figure 4-9 shows the typical wiring for C30PMVR multiple operation with two cryopumps in MOMENTARY OPERATING MODE. REMOTE Equipment RESPONSE Interface CH1REF CH2REF Output Reference COMP START /COMP STOP CH1 ACK1 CH1 ACK2...
  • Page 58 7. Turn the set screw in clockwise to fix the end bell. (Figure 4-11) 8. Mount the clamp saddle. Figure 4-12 Fix with set screw (Solder identification) 9. Put the solder identification label on the connector or cables. 4-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 59: Wire Rooting For Compressor And Other Equipments

    The remote wires must not be either put in the same conduit or routed with the power wires. It may cause interference with the compressor operation. Failure to observe this warning may result in damage to and/or break down of the equipment. ULVAC CRYOGENICS INCORPORATED 4-11...
  • Page 60 C30PMVR system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments.

  • Page 61: Operation

    If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium llin g pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 62: Compressor Operation

    C30PMVR Compressor Unit Instruction Manual Helium filling 1.52 pressure (static) [MPaG] C30PMVR 1.48 + - 0.04MPaG 1.44 1.36 1.32 1.28 1.24 1.16 1.12 Temperature [℃] Figure 5-1 Helium static pressure and ambient temperature 5.2 Compressor operation (1) Supply water to the cooling water piping Supply water to the cooling water piping.
  • Page 63 Failure to observe this precaution could result in severe bodily injury or loss of life Figure 5-2 Ready for operation (left) Figure 5-3 Phase reversal or open phase (right) ULVAC CRYOGENICS INCORPORATED...
  • Page 64 The recorded values are used as reference value for maintenance or replacement of the product explained in the following. For reference, the helium pressure during operation of C30PMVR (2 RM50 refrigerators) with 3m flexible hoses are shown in Table 5-1.

  • Page 65: Inspection After Replacing Helium Circulation Components

    Section 5 Operation Table 5-1 Supply line helium pressure during operation C30PMVR＋RM50 Refrigerator Quantity of refrigerator Helium pressure at start-up [MPaG] Below 2.3 Helium temperature when cryogenically cooled [MPaG] 1.9 - 2.0 5.3 Inspection after replacing helium circulation components After replacing a component such as a cryopump, a flexible hose, and a compressor refer ressor refer to “Section 5.1 Verification of helium static pressure”...
  • Page 66 C30PMVR Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Wiring And Piping Removal And Storage

    The following procedure is available only for an open loop type cooling-water supply system where the water outlet is opened to the atmosphere. For close loop type cooling-water supply system, it is recommended to additionally install a water ULVAC CRYOGENICS INCORPORATED...
  • Page 68 Refer to “Section 4.5.1 Connecting the input power cable” and disconnect the cable in reverse order. 6.1.4 Transferring the compressor Unlock the casters of the compressor. When transferring the compressor, refer to warnings and precautions in “Section 3.3 Unpacking”. ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Maintenance In Storage

    If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 70 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Maintenance

    Replacement of adsorber WARNING The following replacing procedure must be undertaken by authorized personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 72 C30PMVR Compressor Unit Instruction Manual WARNING Some part inside the compressor may be hot immediately after the operation stops. Wait at least 15 minutes until it cools down to conduct the work safely. Failure to observe this warning may result in severe bodily injury.
  • Page 73 Maintenance Figure 7-1 Remove two nuts from Figure 7-2 Remove seven the helium gas connectors screws from the rear panel Remove Hold Figure 7-3 Remove the rear panel Figure 7-4 Remove self-sealing coupling ULVAC CRYOGENICS INCORPORATED...
  • Page 74 C30PMVR Compressor Unit Instruction Manual Clockwise: To tighten Counter Clockwise: To loosen TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing cou pling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners Figure 7-6 Remove adsorber mounting bolt Figure 7-7 Slide adsorber outward 9.

  • Page 75: Adjusting System Helium Pressure

    WARNING The following procedure must be undertaken by an authorized electrician and mechanical personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 76 C30PMVR Compressor Unit Instruction Manual WARNING Some part inside the compressor may be hot immediately after the operation stops, Wait at least 15 minutes until it cools down to conduct the work safely. Failure to observe this warning may result in severe bodily injury.
  • Page 77 When charging helium or performing helium circuit decontamination, equipments (regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are required. Table 7-2 shows items and devices required for adding helium gas. ULVAC CRYOGENICS INCORPORATED...

  • Page 78: C30Pmvr Compressor Unit Instruction Manual

    C30PMVR Compressor Unit Instruction Manual Table 7-2 Preparation for adding helium gas Item Specification Helium bottle 99.999% pure or above Pressure regulator For Helium gas (left-hand screw), 0-20MPaG / 0-6MPaG Helium charging hose Terminating in a 1/4 inch female flare fitting...
  • Page 79 Turn the handle of the pressure regulator in counter-clockwise to stop the gas flow. Then disconnect the charging hose from the helium filling fitting of the compressor. 5. Return the front panel of the compressor unit to the original position. ULVAC CRYOGENICS INCORPORATED...

  • Page 80: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    C30PMVR Compressor Unit Instruction Manual Regular maintenance of helium lines, cooling water piping and electrical wiring Inspect helium lines, cooling water piping and electrical wiring every 12000 hours. Check connection parts of helium lines and cooling water piping for evidence of leakage.

  • Page 81: Troubleshooting

    Problem types ..................8-1 Troubleshooting procedures ..............8-2 8.1 Problem types C30PMVR compressor indicates the state of warning or breakdown with a buzzer sound and STS indicators. NOTE: When a problem occurs, check the status of STS indicators. Also, make sure that the power-supply voltage, cooling water flow rate and its temperature, helium gas pressure, input power cable connections, and the remote cable connections are all in an appropriate state.

  • Page 82: Troubleshooting Procedures

    C30PMVR Compressor Unit Instruction Manual Figure 8-2 Alarm status code table 8.2 Troubleshooting procedures 1. Troubles occurred before operation Table 8-1 List of troubleshooting before operation Problem status Possible cause Corrective action In power OFF Value indication Battery for Elapsed...
  • Page 83 2 than set time (2 seconds, seconds). compressor does not start operation. ※ If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 84 C30PMVR Compressor Unit Instruction Manual WARNING ubleshooti ng procedures described above must be undertaken by an authorized elect rici an or mechanical personnel familiar with the structures and the risks of the pressor and its related components. To ensure safe, reliable system performance, read...
  • Page 85 If there is an earth fault or short circuit in the parts above or no identified cause, Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 86 Check that the helium pressure is not higher than the set value on the helium pressure gauge. Refer to “Section 5.1 Verification of helium static pressure” for helium pressure set value and “Appendix C C30PMVR compressor electrical circuit” for OL1 set value.

  • Page 87: Appendix A Operating Log

    CRYO-U COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Appendix B Combination Of C30Pmvr Compressor And Cryopump

    Appendix B Combination of C30PMVR Compressor and Cryopump Appendix B Combination of C30PMVR Compressor and Cryopump Table B-1 Combination of C30PMVR compressor and cryopump Cryopump Specifications Number of refrigerators that can be run by one Type Model Size Refrigerator compressor unit...
  • Page 90 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 91: Appendix C C30Pmvr Schematic Diagram

    Appendix C C30PMVR Schematic Diagram Appendix C C30PMVR Schematic Diagram Schematic diagrams of the C30PMVR compressor units are shown in Figure C-1. In addition, variations of setting and connections are shown in Table C-1. Table C-1 Variations of setting and connections...
  • Page 92 Compressor Unit Instruction Manual Figure C-1 C30PMVR Schematic Diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 93: Appendix D Compressor Flow Diagram

    The set pressure of pressure relief valve at the refrigerator is 1.9MPaG. Please ※1 note that the refrigerator pressure relief valve releases gas before the compressor pressure relief valve in actual system. ULVAC CRYOGENICS INCORPORATED...

  • Page 94: Compressor

    C30PMVR Compressor Unit Instruction Manual Safety valve Cooling water Pressure gauge Adsorber Oil separator SUPPLY Helium heat exchanger Oil return filter Oil return orifice Compressor pump Differential pressure Solenoid valve regulating valve for pressure Oil heat changer equalization Oil injection...

  • Page 95: Service Network

    ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 96 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 97: Revision History

    “Safety Instructions” Description on the sealing sticker has been added. “Safety Instructions” Description on the adsorber disposal 2023-11-06 2023NR04 has been modified. Section 3-6 A note has been added to flexible hose allowable pressure. Appendix D has been modified. ULVAC CRYOGENICS INCORPORATED...
  • Page 98 C30PMVR Installation, Operation, Maintenance, and Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

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