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COMPRESSOR UNIT
Instruction Manual
C10T
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MD10T00E, 2019NR09
ULVAC CRYOGENICS INCORPORATED
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Summary of Contents for Ulvac C10T
- Page 1 10(2) of appended table 1 of Japan’s Export Trade Control Order as well. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. D/N.MD10T00E, 2019NR09 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
C10T Compressor Instructions Table of Contents Safety Instructions ························································································ S-1 Disposal Considerations ················································································ IW-1 COMPRESSOR UNIT DESCRIPTION ·························································· 1-1 General ··························································································· 1-1 Specifications ··················································································· 1-1 INSPECTION ·························································································· 2-1 Shipping List ····················································································· 2-1 Compressor ····················································································· 2-2 Connecting Piping (Flexible Hose) ························································· 2-2 Cables ····························································································... - Page 10 Compressor Installation ................3-8 Figure 5-1 Disconnecting Flexible Hose ..............5-2 Figure 6-1 Charging Helium Gas ................. 6-4 Figure B-1 C10T Circuit Diagram ................B-3 Figure B-2 C10T Wiring Diagram ................B-5 Figure D-1 C10T Flow Diagram .................. D-2 Tables Table 1-1 Compressor Unit Standard Specifications ..........
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Page 11: Safety Instructions
Do not start/ stop operation to control the temperature of Super Trap. Please contact us when it is required to control the temperature of super trap. ULVAC CRYOGENICS INCORPORATED... - Page 12 ☆We collect used adsorbers. If there is any used absorber, please contact a person in your local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
- Page 13 Also, parts of inside the compressor unit are still hot just after the compressor has been 12.絈 絈 stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
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Page 15: Disposal Considerations
Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 17: Compressor Unit Description
The power consumption and current in the above table are standard values when flexible hoses of 3 meters long are used. The maximum allowable length is 20m, and the power consumption and current will be larger by 6% with a 20m hose. ULVAC CRYOGENICS INCORPORATED... - Page 18 ◆Applicable Model of Cryopump and Refrigerator unit Cryopump U8HT Refrigerator R10RT / RM10T ◆Connector Specifications (Cable Side) CONNECTOR MANUFACTURER TYPE INPUT POWER NANABOSHI NCS-304-P COLD HEAD POWER NANABOSHI NJC-204-PM REMOTE/RESPONSE SRCN6A25-16P ※The Cold Head Power Cable is dedicated to three-phase motor refrigerator unit. ULVAC CRYOGENICS INCORPORATED...
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Page 19: Figure 1-1 Dimensions
Compressor Unit Instruction Manual ◆Dimensions 【FRONT】 【SIDE】 76.2 108.3 57.2 【REAR】 Dimensions Figure 1-1 ULVAC CRYOGENICS INCORPORATED... -
Page 20: Major Components
Cooling Water Inlet (Rc3/8) Cooling Water Outlet (Rc3/8) 【REAR】 Circuit Protector FUSE(1A) Fuse 【CONTROLLER (REAR)】 ＊For the operation of a controller switch, remove the control panel on the rear of the compressor unit. Major Components Figure 1-2 ULVAC CRYOGENICS INCORPORATED... -
Page 21: Inspection
Quantity Input Power Cable (1.25mm ×4cores×3m or customized length) Three Phase Refrigerator power cable (0.5mm ×4cores×3m or customized length) Flexible Hose ( 3m or customized length) Lipped Bowl Spanner (Flexible hoses installing tool) Gasket for Helium Coupling(Spare) ULVAC CRYOGENICS INCORPORATED... -
Page 22: Compressor
If you find any missing parts or damages of the product, please contact our Service If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED... -
Page 23: Installation
Avoid dust and moist. 3.Leave the spaces as shown in Figure 3-1 to make the following maintenance processes easier. ・ Pressure gauge inspection. ・ Gas charge valve operation. ・ Adsorber replacement. 1543 Figure 3-1 Maintenance Space(Unit: mm) ULVAC CRYOGENICS INCORPORATED... -
Page 24: Installation
・ Usage of poor quality water causes performance degradation of heat exchanger. ・ If the water quality does not satisfy the requirement, it shortens the lifetime of the heat ・ If the water quality does not satisfy the requirement, it shortens the lifetime of the heat exchanger. exchanger. ULVAC CRYOGENICS INCORPORATED... - Page 25 ・The compressor unit will not be turned on for a long time (more than a week). ・Shipping the compressor unit. Most of the cooling water can be purged from the compressor by blowing air into the compressor for 30 seconds at inlet pressure of 0.2MPaG with the outlet opened. ULVAC CRYOGENICS INCORPORATED...
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Page 26: Figure 3-2 Cooling Water Requirement
EXAMPLE A dashed arrow (→) in the graph shows the minimum required water flow rate (3.5L/min.) and water pressure drop (0.04MPa) when the temperature of the water Cooling Water Requirement Figure 3-2 ULVAC CRYOGENICS INCORPORATED... -
Page 27: Connecting The Compressor Unit To The Cryopump
When you use a flexible hose with length of 10m to 20m, chose the hose dedicated to C10. If a standard hose of the same length is used, helium charge pressure will be lower than required, inviting the need for charging helium gas. ULVAC CRYOGENICS INCORPORATED... -
Page 28: Figure 3-3 Connecting Flexible Hose
Tighten self-sealing coupling with a wrench. Hold here with a wrench. ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed. When using torque wrench, torque the connection to 20N･m. Connecting Flexible Hose Figure 3-3 ULVAC CRYOGENICS INCORPORATED... -
Page 29: Connecting Electrical Cables
Appendix B. Always use the momentary switch (contact) for setting START/STOP push button switch (PB1, PB2) in remote operation. ◆ RESPONSE WIRING :Be sure to make wiring for RESPONSE signals. The relay specification of response signals is shown in Appendix B. ULVAC CRYOGENICS INCORPORATED... -
Page 30: Compressor Installation
Copper wire / 600VAC, 3 conductors with ground INPUT Input power cable 1.25mm POWER (*1) The color of the ground wire is green. CRYOPUMP FLEXIBLE HOSE(SUPPLY) FLEXIBLE HOSE(RETURN) REMOTE/RESPONSE INPUT POWER CABLE COLD HEAD INPUT POWER CABLE COOLING WATER 【C10T】 Figure 3-5 Compressor Installation ULVAC CRYOGENICS INCORPORATED... -
Page 31: Operation
3. REMOTE/LOCAL switch is properly set. 4. Cooling water requirements is within the specified values. 5. Helium gas static pressure is within the specified values. Normal Operation CAUTION Verify that the operating pressure is within the specified values shown in Table 1-1. ULVAC CRYOGENICS INCORPORATED... - Page 32 Operation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 33: Disconnection And Storage
It might cause a helium leakage also. ・However, only when carrying out helium circuit decontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors at the compressor unit side right after shutdown. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED... -
Page 34: Storage
6. Check the pressure gauge of the compressor unit periodically. Contact o ur Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage mig ht have occurred. ULVAC CRYOGENICS INCORPORATED... - Page 35 -term storage. ◆ When shipping the compressor unit, pack as it was shipped from us and avoid extreme shock. MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED...
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Page 37: Maintenance
When the gas pressure is lowered, it is necessary to charge helium. Investigate the cause of the pressure reduction before adding helium gas. If there is a leakage, take an adequate measure before charging. Improperly connected self-sealing coupling might be one of the causes of the leakage. ULVAC CRYOGENICS INCORPORATED... - Page 38 5. Open the charge valve slowly and perform the following instruction according to the state of the compressor. a. If the compressor unit is running under normal operating conditions, replenish it with the pure helium gas until it reaches the operation pressure shown in table 1-1 in this instruction manual. ULVAC CRYOGENICS INCORPORATED...
- Page 39 2.5MPaG. 6. Close the charge valve after charging helium gas. 7. Close the regulator and remove the charging hose from the charge inlet. The replenishment work of the gas for the compressor has been completed with this. ULVAC CRYOGENICS INCORPORATED...
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Page 40: Charging Helium Gas
Maintenance High pressure Low pressure Front Panel side side Bottle Charging Hose alve Regulator Remove the front panel. ® CRYO-U ging V ve Helium Gas Bottle Flexible Hoses Compressor Charging Helium Gas Figure 6-1 ULVAC CRYOGENICS INCORPORATED... -
Page 41: Table A-1 Troubleshooting Procedures
(Refer to section 4.1). Compressor 1) Thermal protective switches (TS1 Check that cooling water flows Ⅲ stops after and TS2) are ON. properly. Also check the cooling several minutes’ water temperature and flow rate operation. (Refer to Figure 3-2). ULVAC CRYOGENICS INCORPORATED... - Page 42 (CP1, CP2) are active. Division or the nearest CS center. operation. (The cooling water temperature and (Continued from the room temperature will be the previous needed.) page.) 3) Compressor failure. Contact our Service Engineering Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED...
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Page 43: Table A-2 Operating Log
Ｖ× φ OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED... - Page 44 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 45: Appendix B Schematic Diagram
Set pressure: 2.41MPa(gage) (350psig) Differential Located in the line between the supply and return helium lines. ― pressure Regulates the maximum differential pressure during operation. regulating valve Set pressure: 1.34MPa(gage) (195psi) ULVAC CRYOGENICS INCORPORATED... - Page 46 Contact capacities of CR1 are as follows: Maximum voltage AC250V DC125V Maximum current Rated load Resistance load (Induction load) AC220V 5A (2A) DC 24V 5A (2A) Minimum applicable load DC5V 1mA ULVAC CRYOGENICS INCORPORATED...
- Page 47 Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B-3/B-4...
- Page 48 Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B-5/B-6...
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Page 49: Appendix C Flexible Hose
・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the flexible hoses in order to prevent modification and crushing of them. MD0C001E,2010.06 ULVAC CRYOGENICS INCORPORATED... - Page 50 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 51: Appendix D Flow Diagram
At the same time, the helium from oil separator enters an adsorber. As passing through the adsorber, oil mist contained in helium is removed by adsorption and the helium is supplied to the cold head via flexible hose. ULVAC CRYOGENICS INCORPORATED... -
Page 52: Figure D-1 C10T Flow Diagram
Oil injection filter Differential pressure regulating valve Oil injection orifice Solenoid controlled valve (N.C.) Check valve Helium RETURN Helium Gas Flow Oil Flow Helium Gas + Oil Flow Cooling Water Flow Figure D-1 C10T Flow Diagram ULVAC CRYOGENICS INCORPORATED... - Page 53 Tel: +81-6-6397-0112 Fax: +81-6-6397-0126 <Inquiries about cryostats or LN generators> Kyoto Factory 140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan Tel: +81-774-28-5595 Fax: +81-774-20-2201 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 451-831 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. www.ulvac-cryo.com 1-2 Floor, Shuguang Building, No.6 Jingyua Road,...
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- Page 55 Cover: Export control policy has been revised. 2011-02-14 2011FY03 2011-05-16 2011MY04 Full-fledged revision. P.B-3～6 C10T Compressor unit circuit diagram and wiring 2011-12-01 2011DR05 diagram have been revised. Service Network has been revised. “Safety Instruction” No.3 and No.5 have been revised.
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