1. Manuals
  2. Brands
  3. Ulvac Manuals
  4. Air Compressor
  5. C30HMVRT-E3
  6. Instruction manual

Ulvac C30HMVRT-E3 Instruction Manual

Compressor unit
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
COMPRESSOR UNIT
Instruction Manual
C30HMVRT-E3
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
ULVAC CRYOGENICS INCORPORATED
D/N. MD30H04E, 2024.11

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the C30HMVRT-E3 and is the answer not in the manual?

Questions and answers

Related Manuals for Ulvac C30HMVRT-E3

Summary of Contents for Ulvac C30HMVRT-E3

  • Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. ULVAC CRYOGENICS INCORPORATED D/N. MD30H04E, 2024.11...
  • Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
  • Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
  • Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.

  • Page 6: General Precautions

    When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E 2023JA04 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    Table of Contents Table of Contents Compressor unit Safety Instructions ..................S-1 Disposal Considerations ......................IW-1 Section 1. C30HMVRT-E3 Compressor Description ............1-1 Introduction ......................... 1-1 Terminology......................... 1-1 Cryopump system documents ..................1-2 How the compressor works in cryopump system ............1-2 Compressor specifications ..................
  • Page 10 Compressor rear view (example) ..............1-6 Figure 1 4 Anchor bolts mounting positions (example) ..........1-8 Figure 1 5 Typical installation of cryopumps and C30HMVRT-E3 ......1-10 Figure 2 1 Required space for compressor installation (scale: mm) and levelness ..2-2 Figure 2 2 Equipment-side power circuit ..............
  • Page 11 C30HMVRT-E3 schematic diagram............C-2 Figure D-1 Compressor flow diagram ................D-2 List of Tables Table 1 1 C30HMVRT-E3 Compressor model ............1-1 Table 1 2 Compressor weight ..................1-4 Table 1 3 Power supply rating ..................1-4 Table 1 4 Cooling water requirements.................
  • Page 12 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 13: Compressor Unit Safety Instructions

    6 times per hour as well. Do not use startup and shutdown of a compressor unit to control the temperature of our Super Trap. Please contact us when Super Trap temperature control is required. ULVAC CRYOGENICS INCORPORATED...

  • Page 14: Electrical Wiring Connections

    It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Follow recommended sizes for wires and cables. ・ Power lines and signal lines must be wired at least 10cm separate from one another. ULVAC CRYOGENICS INCORPORATED...

  • Page 15: Cooling Water

    Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
  • Page 16 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...

  • Page 17: Disposal Considerations

    Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED MDIW001E,2018JE01 IW-1...
  • Page 18 This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED IW-2...

  • Page 19: C30Hmvrt-E3 Compressor Description

    Compressor specifications ....................1-3 Component descriptions ....................1-5 CRYO-U cryopump installation ..................1-9 ® Introduction C30HMVRT-E3 is a compressor unit for cryopump system. C30HMVRT-E3 can change the operation frequency with an inverter installed inside the compressor. Table 1-1 C30HMVRT-E3 Compressor model Compressor Cooling...

  • Page 20: Cryopump System Documents

    It is necessary to check the elapsed time of operation and replace adsorber regularly to maintain refrigeration capacity as well as prevent breakdown of the refrigerator. Refer to “Section 7.2 Replacement of adsorber”. The Compressor requires maintenance. Read “Section 7 Maintenance” carefully and conduct regular maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 21: Compressor Specifications

    Compressor Description Compressor specifications 1.5.1 Dimensions Figure 1-1 shows the dimensions of C30HMVRT-E3. The appearance of the compressor unit may differ from the figures below depending on customer specifications. The drawings in the customer specific document supersedes if provided. Ｃ３０Ｈ MＶ R Ｔ －Ｅ３...

  • Page 22: Power Supply Rating

    < 0.6G, 10 – 55 Hz Free from metal powder, dust, Atmosphere flammable and corrosive gas Static helium pressure at 20°C 1.4±0.04MPaG (*1) Sound pressure level during operation < 70 dBA (*1) Refer to “Section5.1 Verification of helium static pressure” for details. ULVAC CRYOGENICS INCORPORATED...

  • Page 23: Component Descriptions

    请 将 此 面 板 取 下 ， 从氦 气 填 充 口进 行氦 气压 力 的调 整 ・ ・ 参 照说 明书 ・ ・ 헬륨압력의 조정은 판넬을 벗기고 문의는 아래의 연락처로 부탁드립니다 咨询处 ：宁波爱发科低温泵有限公司 헬륨충전구에서 실시해 주십시오 . 상세내용은 취급설명서를 참조해 주십시오 . 한국알박크라이오(주)TEL(031)683-2926 Tel.0574-8790-3322 (9) CASTERS Figure 1-2 Compressor front view (example) ULVAC CRYOGENICS INCORPORATED...
  • Page 24 「CH1」 indicator (GREEN) lights up when refrigerator No.1 is in operation. 「CH2」 indicator (GREEN) lights up when refrigerator No.2 is in operation. 「CH3」 indicator (GREEN) is not used with C30HMVRT-E3 compressor. One or more STS LED indicators for alarm indication will light up when malfunction of the compressor is detected.
  • Page 25 It is also required to have preventative measures for slippage and/or overturning in case of earthquake. Please contact us if fixing brackets need to be attached to the compressor. Figure 1-4 shows an example of anchor bolts mounting positions when fixing brackets are attached to the compressor. ULVAC CRYOGENICS INCORPORATED...
  • Page 26 The plug for remote cables is supplied with the compressor. Customers need to solder the cables to use it. Refer to “Section 4.5.2 Connecting remote cables” for definitions of connector pin assignments and appropriate connection method for your application. ULVAC CRYOGENICS INCORPORATED...

  • Page 27: Cryo-U® Cryopump Installation

    ® cryopump installation C30HMVRT-E3 can run up to two refrigerators of cryopump units at a time (See Table 1- 1). Figure 1-5 depicts an example of connection with multiple cryopumps and single compressor. For detailed instructions on cryopump installation with compressor, refer to “Section 4.4 Cryopump installation”...

  • Page 28: Figure 1 5 Typical Installation Of Cryopumps And C30Hmvrt-E3

    Compressor Unit Instruction Manual Helium Supply Line Helium Return Line Remote Cable Coldhead Cable Helium Manifolds Cooling Water AC220V×3φ Power Input Compressor C30HMVRT-E3 Figure 1-5 Typical installation of cryopumps and C30HMVRT-E3 ULVAC CRYOGENICS INCORPORATED 1-10...

  • Page 29: Considerations Before Installation

    Also, a space of 500mm back and front of the compressor is needed for maintenance. The space which can work without difficulty is necessary around the power cable on the back of a compressor. Refer to Figure 1-1 in Section 1 for the dimensions of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 30: Wiring Requirements

    Almost any standards require installing a breaker for branch in upstream of equipment and protect power supply line which connects with each equipment; circuit breakers must be installed. Failure to observe this warning may result in damage and/or failure of the equipment. ULVAC CRYOGENICS INCORPORATED...
  • Page 31 (*1) REMOTE Remote cable Connector #22 AWG Customer supply RESPONSE (*1) Current rating of the refrigerator is less than 0.7A. NOTE: Refer to “Section 4 Equipment Installation, Piping, and Wiring” for routing of the cables above. ULVAC CRYOGENICS INCORPORATED...

  • Page 32: Cooling Water Requirements

    If the cooling water of temperature below 10°C is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Figure 2 3 Cooling Water Flow Rate, Water Supply Temperature, And Water Pressure

    If the cooling water of temperature below 10°C is supplied continuously while stopping the compressor, it may increase viscosity of lubricant oil and cause start up failure of the compressor when the operation command is sent. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: Length Of Cables And Flexible Hoses

    It is also available to select an operating mode of the compressor in accordance with your applications. The following information also contains instructions for selecting operating modes. 2.6.1 Remote interface specifications Remote interface specifications are indicated in Table 2-5. ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Figure 2 4 Remote Input Interface Circuit

    Since it is the contact output, the polarity of DC24V in Figure 2-5 can be reversed. Make provisions for the interface circuit at the equipment side. (Equipment side) SIG1 SIG2 Relay Figure 2-5 Remote output interface circuit ULVAC CRYOGENICS INCORPORATED...
  • Page 36 Turn the command signal ON for more than 0.3 second. (Refer to the description of COMP STOP below). Command signals for refrigerators （CH1 REF and CH2 REF）should be turned ON to start the refrigerators. ULVAC CRYOGENICS INCORPORATED...
  • Page 37 This is an answer-back signal responding to the compressor pump operation command. When the compressor starts operation, the answer-back signal is sent to the equipment. Note: Refer to “Section 2.6.6 Signal timing charts –Answer-back signal delay” as well. ULVAC CRYOGENICS INCORPORATED...

  • Page 38: Figure 2 6 Timing Chart For Momentary Operating Mode With Two Refrigerators

    COMP START (*1) COMP STOP CH1 REF CH2 REF COMP ACK CH1 ACK CH2 ACK *1) The status should continue for 0.3 seconds or longer. Figure 2-6 Timing chart for Momentary operating mode with two refrigerators ULVAC CRYOGENICS INCORPORATED 2-10...

  • Page 39: Figure 2 7 Timing Chart For Alternate Operating Mode With Two Refrigerators

    5 seconds. For reference, the signal delay when powered on in Alternate operating mode is shown in Fig. 2-8. ≧5seconds INPUT POWER COMP START/STOP CH1, CH2 REF COMP CH1, CH2 REF Figure 2-8 Signal delay when powered on（In Alternate operating mode） ULVAC CRYOGENICS INCORPORATED 2-11...

  • Page 40: Figure 2 9 Signal Delay When The Time From A Stop To A Restart Is Short

    Where, “1” second is a margin added. ≧5seconds COMP START/STOP CH1, CH2 REF COMP ACK CH1, CH2 COMP OPERATION CH1, CH2 OPERATION Figure 2-9 Signal delay when the time from a stop to a restart is short (In Alternate operating mode) ULVAC CRYOGENICS INCORPORATED 2-12...

  • Page 41: Figure 2 10 Timing Chart When A Short Power Interruption Occurs

    In “Alternate operating mode”, the compressor restarts as soon as the input power is recovered because there is always the command from the equipment side. NOTE: Refer to “Section 4.5.2 Connecting remote cables” for remote signal wiring. ULVAC CRYOGENICS INCORPORATED 2-13...
  • Page 42 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED 2-14...

  • Page 43: Unpacking And Inspection

    Accessories Inspect and visually confirm the accessories that there is no evidence of damage If any damage is found, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Flexible Hoses And Specifications

    Failure to observe this warning may result in damage and/or break down of the equipment. CAUTION When carrying the flexible hose, ensure that the bending radius does not become narrower than the minimum value listed above. In the same manner as other equipment, avoid corrosion and condensation when storing. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Equipment Installation, Piping, And Wiring

    WARNING Following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 46: Connecting Cooling Water Piping

    Then tighten the coupling with two spanners as shown in Figure 4-3. See for usage of two spanners. The torque value is 20N･m for both couplings. Complete the procedure as quick as possible to minimize helium gas leakage. ULVAC CRYOGENICS INCORPORATED...
  • Page 47 To disconnect flexible hoses from the connectors, use only two lipped bowl spanners (bolt width 26mm, 30mm). Do not use other spanners. ULVAC CRYOGENICS INCORPORATED...

  • Page 48: Cryopump Installation

    Connect the refrigerator cable to “COLD HEAD POWER NO.2” in the same procedure. Helium Supply Line SUPPLY Helium Return Line RETURN COLD HEAD POWER No.1 No.2 Coldhead Cable Helium Manifolds RETURN GAS SUPPLY GAS C30HMVRT-E1 Compressor Figure 4-5 Example of Connection with Multiple Cryopumps ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Electrical Connections

    “INPUT POWER” receptacle on the rear panel of the compressor, turn the rotating part of the plug to the right. Turn it until it won’t turn any more to connect the plug properly. Figure 4-6 Connecting input power cable connector ULVAC CRYOGENICS INCORPORATED...

  • Page 50: Figure 4 7 Remote Connector Pin Assignments For C30Hmvrt-E1

    /COMP STOP CH2ACK1 CH2ACK2 CH3ACK1 (Not in use) CH3ACK2 (Not in use) (GND) COMP RUN1 COMP RUN2 ALARM1 C20 COMP ON/OFF ALARM2 (SRCN6A25-24P) Figure 4-7 Remote Connector Pin Assignments for C30HMVRT-E1 (Side View of the Plug Soldering) ULVAC CRYOGENICS INCORPORATED...

  • Page 51: Figure 4 8 "Momentary Operating Mode" Wiring Example For A Cryopump Operation

    (6) Twist paired signal lines such as CH1ACK1and CH1ACK2. (7) These are signal lines. Do not drive the power device by direct output signals (such as answer-back signals) from the compressor. It may cause a failure of the product. ULVAC CRYOGENICS INCORPORATED...
  • Page 52 9. Put the solder identification label on the connector or cables. CAUTION For lead-free soldering, use only specified lead-free solder iron and tip. Do not mix lead eutectic solder with lead-free solder. Failure to observe this warning may result in decreasing the life of soldered parts severely. ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Wire Rooting For Compressor And Other Equipment

    C30HMVRT-E1 system is not separated from other equipments it may cause interference to sensitive sensor wires, analog wires, and other high impedance wiring of other equipments. ULVAC CRYOGENICS INCORPORATED...
  • Page 54 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED 4-10...

  • Page 55: Operation

    If the pressure relief valve blows, stop the operation and leave the compressor for several hours to ensure that the helium filling pressure is in the range which can be still operated. If the helium filling pressure is reduced, please contact us for maintenance. ULVAC CRYOGENICS INCORPORATED...

  • Page 56: Compressor Operation

    If PWR LED and RDY LED indicators light up after a few seconds from power-on, the compressor is ready for operation. If the buzzer keeps ringing after power-on and all eight STS indicators light up, it means ULVAC CRYOGENICS INCORPORATED...
  • Page 57 These two recorded values depend on the length of flexible hoses and a kind of the refrigerator mounted on the cryopump system. The recorded values are used as reference value for maintenance or replacement of the product explained in the following. ULVAC CRYOGENICS INCORPORATED...

  • Page 58: Inspection After Replacing Helium Circulation Components

    Also, operate the refrigerator for ten minutes at a time every six months. Failure to observe this precaution may result in damage to the compressor when restarting operation. NOTE: Circulate cooling water during the regular maintenance operation of the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 59: Wiring And Piping, Removal And Storage

    For close loop type cooling-water supply system, it is recommended to additionally install a water drain line diverged from the water return line on the equipment in order to release water pressure in the compressor. ULVAC CRYOGENICS INCORPORATED...

  • Page 60: Maintenance In Storage

    Place the compressor on a flat floor and lock all the casters. Remove the piping and wiring from the compressor and put dust caps or dust plugs on the helium line connectors. ULVAC CRYOGENICS INCORPORATED...
  • Page 61 If the value is clearly decreasing compared to the one before, there is a possibility of helium leakage. Please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 62 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 63: Maintenance

    Replacement of adsorber WARNING The following replacing procedure must be undertaken by authorized personnel familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...
  • Page 64 7. Remove the bolts that secure the adsorber to the base of the compressor with the proper spanner (Figure 7-6). 8. Slide the adsorber outward and remove it from the mounting tab on the base of the compressor. And then remove the adsorber from the compressor (Figure 7-7). ULVAC CRYOGENICS INCORPORATED...
  • Page 65 Remove the rear panel (left) Figure 7-4 Remove self-sealing coupling (right) Clockwise: Tightening Counter Clockwise: Loosening TURN with 30mm spanner Adsorber HOLD with 26mm spanner Flexible hose (Self-sealing coupling) Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ULVAC CRYOGENICS INCORPORATED...
  • Page 66 16. Record the date and accumulated operation time when the adsorber was replaced in the adsorber replacement record label on the front panel of the compressor. As a guide for the next replacement, it is recommended to make a note of the value that the ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Adjusting System Helium Pressure

    Allow a slight amount of helium gas to escape. 3. Wait until the helium pressure gauge reads the prescribed standard value described above. When the pressure reaches the standard value, close the valve by turning its knob clockwise. ULVAC CRYOGENICS INCORPORATED...
  • Page 68 When charging helium or performing helium circuit decontamination, equipments (regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are required. Table 7-2 shows items and devices required for adding helium gas. ULVAC CRYOGENICS INCORPORATED...
  • Page 69 3. Purge the pressure regulator and helium charging hose. 3-1 Turn the pressure regulator handle in clockwise slowly until it becomes hard (*1) to turn. Then turn approximately 1/8 to 1/6 more to slightly open the pressure regulator. ULVAC CRYOGENICS INCORPORATED...

  • Page 70: Regular Maintenance Of Helium Lines, Cooling Water Piping And Electrical Wiring

    Also check that there is no damage in these plumbing. WARNING The following procedure must be undertaken by an authorized electrician familiar with the structure and risk of the product. Failure to observe this warning may result in severe bodily injury or fatal accident. ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Maintenance Parts

    When it is locked by malfunction Maintenance type (*1) S: Scheduled U: Unscheduled NOTE: For more information on planning maintenance, purchasing maintenance parts, diagnosis or servicing, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED...
  • Page 72 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED 7-10...

  • Page 73: Troubleshooting

    Reverse Phase, LPS Low Helium Open Phase, Pressure Low Volt TS2 Over Temperature CP2 Cold Head Trip TS1 Over Temperature OL1 Comp. Over Current TS3 Over Temperature Controller Fault ●→lit up ○→off Figure 8-1 Alarm status table ULVAC CRYOGENICS INCORPORATED...

  • Page 74: Troubleshooting Procedures

    ※ light up. Inverter failure. Inverter malfunction. Call for servicing ※ ※If the problem is not solved, please contact our Service Engineering Division or the nearest customer support center. 2. Troubles during operation ULVAC CRYOGENICS INCORPORATED...
  • Page 75 Refer to Section 2 and Section 4. After power is Longer electric Compressor needs restart interrupted for longer power interruption manually. than 2 seconds, than set time (2 compressor does seconds). not start operation. ULVAC CRYOGENICS INCORPORATED...

  • Page 76: Alarm Code Descriptions

    If the input power supply voltage is low, check the input power line and the user’s power supply that has distributed electric power to the compressor. When there is an open phase(s), all indicators should be blinked or turned off. ULVAC CRYOGENICS INCORPORATED...
  • Page 77 Turn OFF the compressor and check the compressor side, refrigerator cable, and refrigerator motor for evidence of earth fault or short circuit. If there is an earth fault or short circuit in the parts above or no identified cause, Please contact us. ULVAC CRYOGENICS INCORPORATED...
  • Page 78 If the indicator shows the same status after pushing “RST” button and turning OFF and ON the power of the compressor, please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller immediately. ULVAC CRYOGENICS INCORPORATED...

  • Page 79: Control The Inverter

    No.5: Default setting 60Hz (can be changed) No.6: Default setting 55Hz (can be changed) No.7: Default setting 50Hz (can be changed) No.8: Default setting 45Hz (can be changed) ※ The default settings can be changed. We recommend 45Hz or larger for stable use. ULVAC CRYOGENICS INCORPORATED...

  • Page 80: Contact Connections

    9 pin D-SUB Connector Locate 9 pin D-SUB connector on the back of the inverter on top of the compressor unit. The frequency can be adjusted by the external signal (4 wire cable, D-SUB connector is supplied from Ulvac Cryogenics). ULVAC CRYOGENICS INCORPORATED...

  • Page 81: Connector Pin Assignments

    X1, X2 and X3 contact with COM. Refer to Table 9-1 Inverter Frequency Setting for connections. Table 9-2 Pin Assignments of the Inverter Symbol Used Used Symbol Used Used Used ULVAC CRYOGENICS INCORPORATED...

  • Page 82: Frequency Adjustment

    The window displays [C01] ˄ ˅ Use < > and < > buttons to move to C05 - C11. Press <FUNC / DATA> button once to adjust the frequency. <Note> Operation of C01 - C04 are disabled. ULVAC CRYOGENICS INCORPORATED...

  • Page 83: Appendix A Operating Log

    ® COMPRESSOR S/N OPERATING LOG REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure stage stage 【Pa】 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 84 Compressor Unit Instruction Manual This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 85: Appendix C C30Hmvrt-E3 Schematic Diagram

    Appendix C C30HMVRT-E3 Schematic Diagram Appendix C C30HMVRT-E3 Schematic Diagram Schematic diagrams of the C30HMV RT-E1 compressor unit are shown in Figure C-1. Controller setting and connections are shown in Table C-1. Table C-1 Controller settings and connections Refrigerator OL1 set...
  • Page 86 Compressor Unit Instruction Manual Figure C-1 C30HMVRT-E3 Schematic Diagram ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Appendix D Compressor Flow Diagram

    The set pressure of pressure relief valve at the refrigerator is 1.9MPaG. Please ※1 note that the refrigerator pressure relief valve releases gas before the compressor pressure relief valve in actual system. ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Oil heat changer equalization Oil injection filter RETURN Accumulator Low pressure switch Helium filling valve Helium gas flow Helium gas and oil flow Oil flow Cooling water flow Compressor flow diagram Figure D-1 ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Service Network

    ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 90 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 91: Compressor Unit Instruction Manual

    Compressor Unit Instruction Manual Revision History Date Revision No. Contents 2024-11-06 2024.11 First edition. ULVAC CRYOGENICS INCORPORATED...
  • Page 92 Revisions This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

Table of Contents