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COMPRESSOR UNIT
Instruction Manual
C40R
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/s or more fall under row 2(35) of
appended table 1 of Japan's Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take
appropriate
procedures
when
exporting
or
re-exporting those products.
D/N.MD40XR0E, 2023NR11
ULVAC CRYOGENICS INCORPORATED
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Summary of Contents for Ulvac C40R
- Page 1 1 of Japan’s Export Trade Control Order, which is based on international export control regimes. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting re-exporting those products. D/N.MD40XR0E, 2023NR11 ULVAC CRYOGENICS INCORPORATED...
- Page 3 The period of less than one year after installation in your company or your customer’s premises, or a period of less than 18 months (starting from the shipment date) after shipment from ULVAC CRYOGENICS INCORPORATED (hereinafter “UCI”), which is shorter, is selected.
- Page 4 2.2 Exclusion of opportunity loss from warranty liability Regardless of the gratis warranty term, compensation to opportunity losses incurred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under warranty.
- Page 5 After the products are delivered, please fill out the following information in the blanks. In the event of a fault, please contact us. Refer to SERVICE NETWORK at the end of this book, or visit our web site at www.ulvac-cryo.com to locate our business base close by.
- Page 6 When unidentified failure occurs, please contact our Service Engineering Division or the nearest customer support center. Refer to the SERVICE NETWORK at the end of this book or visit our website at www.ulvac-cryo.com for our contact information. 6．General Precautions...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage. Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. ULVAC CRYOGENICS INCORPORATED MZ0F001E 2023JA04...
- Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
- Page 9 3.5 Connecting Electrical Cables･･･････････････････････････ 3-8 3.6 Before Operation･･････････････････････････････････････ 3-10 SECTION 4 Maintenance 4.1 Scheduled and Unscheduled Maintenance･･･････････････ 4-1 4.2 Replacement of Adsorber･･･････････････････････････････ 4-1 4.3 Charging Helium Gas･･････････････････････････････････4-5 SECTION 5 Disconnection and Storage 5.1 Disconnecting Flexible Hose････････････････････････････ 5-1 5.2 Storage･･･････････････････････････････････････････････ 5-2 ULVAC CRYOGENICS INCORPORATED...
- Page 10 3-4 Connecting Flexible Hose･･････････････････････････････････ 3-8 3-5 Remote operation connecting Diagram･･････････････････････ 3-11 4-1 Replacement of Adsorber･･･････････････････････････････････4-3 4-2 Charging Helium Gas･････････････････････････････････････ 4-7 5-1 Disconnecting Flexible Hose･･･････････････････････････････ 5-2 B-1 C40R Circuit Diagram････････････････････････････････････ B-1 D-1 C40R Flow Diagram･･････････････････････････････････････ D-2 TABLES Table 1-1 Compressor Unit Standard Specifications･･･････････････････ 1-2 1-2 Specifications for Connections･･････････････････････････････...
- Page 11 6 times per hour. Do not use startup and shutdown of a compressor unit to control the temperature of the Super Trap. Please contact us when controlling the temperature of super trap is required. ULVAC CRYOGENICS INCORPORATED...
- Page 12 It could lead to a serious accident such as electric shock and/or damage to the equipment. ・ Follow recommended sizes for wires and cables. ・ Power lines and signal lines must be separated by at least 100mm. ULVAC CRYOGENICS INCORPORATED...
- Page 13 Also, parts of inside the compressor unit are still hot just after the compressor has been stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns. ULVAC CRYOGENICS INCORPORATED...
- Page 14 The sealing sticker is located inside the panel of the compressor unit. Figure Example of the sealing sticker pasted on the self-sealing coupling ULVAC CRYOGENICS INCORPORATED...
- Page 15 Remove the coupling to make it visible that the adsorber has been depressurized before proceeding to the next step. We provide Safety Data Sheet (called SDS) of our products upon your request. Please contact us if necessary. ULVAC CRYOGENICS INCORPORATED MDIW001E,2018JE01 IW-1...
- Page 16 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
- Page 17 Dimensions ····························································· 1-4 Components Names and Descriptions ··························· 1-5 Introduction C40R is a product that pursued the high compatibility with C40. The performance (cryopump performance), power consumption and electrical interface are generally the same as C40. Please note that only the refrigerator connector is different from that of C40.
- Page 18 （*1） Power consumption and Operation current values shown above are at steady state of four U8 type cryopumps in multiple operation. During cooling down of the cryopump, until it stabilizes at a low temperature, the electric current value is about 10% larger than the stationary electric current. ULVAC CRYOGENICS INCORPORATED...
- Page 19 Max. 24000h （*1）Please refer to “Section 3.4 Electrical connections” for wire connection of INPUT POWER. （*2）To replace C40 with C40R, compressor harnesses type-U (UC2800-009-18) are needed. Helium Gas Pressure（Room temperature ：20℃） The table below shows examples of helium gas pressure during operation when flexible hoses are standard length (3m).
- Page 20 水温 冷却水流量 ３３℃以上 使用不可 ２６～３２℃ １１Ｌ／ｍｉｎ １６～２５℃ ７Ｌ／ｍｉｎ ５～１５℃ ５．３Ｌ／ｍｉｎ ＷＡＴＥＲ ＯＵＴ 【Side】 【Rear】 Figure 1-1 Dimensions CAUTION Before using crane or forklift to lift or move the compressor, make sure where the center of gravity is. ULVAC CRYOGENICS INCORPORATED...
- Page 21 High Pressure Helium Gass C40R Model Pressure Gauge REMOTE/LOCAL REMOTE E.T.M. ALARM LOCAL WATER CH.1 CH.2 CH.3 CH.4 OPE-PW. OVER TEMP. LOW PRESS. OVER CURRENT ＳＵＰＰＬＹ ＰＲＥＳＳＵＲＥ ヘリウム充てん圧力 ： 1.5MPa（gage） at 20℃ Figure 1-2 Components Names (Front) ULVAC CRYOGENICS INCORPORATED...
- Page 22 ・ They indicates the abnormal stop of the compressor. Alarm Indicators ALARM ・ Please refer to “Appendix A” for troubleshooting. ・ It displays the elapsed time of operation Elapsed Time Meter of the compressor. ULVAC CRYOGENICS INCORPORATED...
- Page 23 冷却水流量 ３３℃以上 使用不可 ２６～３２℃ １１Ｌ／ｍｉｎ １６～２５℃ ７Ｌ／ｍｉｎ ５～１５℃ ５．３Ｌ／ｍｉｎ ＷＡＴＥＲ ＯＵＴ Figure 1-3 Components Names (Rear) Please refer to “Section 3 Compressor installation” for connecting cooling water piping, flexible hoses, remote input/output wires and input power cable. ULVAC CRYOGENICS INCORPORATED...
- Page 24 It is a circuit protector to protect refrigerator motor (cryopump) from overcurrent. It is an input power supply connector for thermal switch, CONNECTOR low-pressure pressure switch and solenoid valve. It is an input power supply terminal for compressor motor. ULVAC CRYOGENICS INCORPORATED...
- Page 25 ◇ Delivered items will be different whether the compressor is purchased as cryopump system or just a compressor alone. To replace C40 with C40R, ①compressor harnesses type-U, listed in “(2) Optional Parts” below, are needed separately. (1) Standard accessories (purchased only compressor unit)
- Page 26 Cables (optional) Cables (optional) Check the cables to ensure that they are intact. Check the cables to ensure that they are intact. ULVAC CRYOGENICS INCORPORATED...
- Page 27 Compressor Unit Instruction Manual 3. INSTALLATION Installation ······························································· 3-1 Connecting Cooling Water Piping ································· 3-1 Cooling Water ·························································· 3-2 Connecting the Compressor Unit to the Cryopump Refrigerator) ···························································· 3-5 Connecting Electrical Cables ······································· 3-8 Before Operation ···················································· 3-10 3.1 Installation 1.The compressor must be installed on a flat floor with an inclination angle of less than 5°.
- Page 28 Industry Association. CAUTION ・ Using low quality water may cause performance degradation of the heat changer water scales. ・ If the water quality doesn’t meet the requirement in Table 3-1, it may shorten life of the heat changer. ULVAC CRYOGENICS INCORPORATED...
- Page 29 Compressor Unit Instruction Manual Table 3-1 Recommended Cooling Water for Compressor Item Unit Allowable Range ※１ 6.5 - 8.0 pH (25℃) ※１ Conductivity (25℃) mS/m < 30 ※１ Chloride Ion, CI mg / L < 50 ※１ Sulfate Ion, mg SO <...
- Page 30 (＊1)The water pressure drop (ΔP) means differential pressure between cooling water inlet and outlet. E.g.) A dashed arrow (→) in the graph shows the minimum required water flow rate (7L/min.) and water pressure drop (0.04MPa) at the water supply temperature of 30 ℃. Figure 3-2 Cooling Water Requirement ULVAC CRYOGENICS INCORPORATED...
- Page 31 ・ Do not forcibly bend flexible hoses. They may be damaged and cause helium leakage. ・ Do not connect or disconnect self-sealing coupling frequently. It may cause gas leakage. xible hose may need a replacement depending on the condition of it. ULVAC CRYOGENICS INCORPORATED...
- Page 32 If the indicated pressure is lower than specified value, add helium gas as described in section 4.3. If there is helium gas leakage, please contact the nearest customer support. 1.60 1.50 1.40 Temperature (℃) Figure 3-3 Static Pressure and Temperature ULVAC CRYOGENICS INCORPORATED...
- Page 33 Tighten self-sealing coupling spanner. with a spanner. ② Tighten the self-se aling coupling using two spanners until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N･m. Figure 3-4 Connecting Flexible Hose ULVAC CRYOGENICS INCORPORATED...
- Page 34 This signal (contact output) will be output when any of the compressors and cryopums are turned on. The timeout time should be set as 6 seconds or longer. If a short power interruption (5 seconds or shorter) occurs, the compressor restarts the ULVAC CRYOGENICS INCORPORATED...
- Page 35 Between the connector terminal A and terminals B,C,D, and E：DC24V MC contact capacity：DC24V 5A / AC240V 8A (resistance load) ALARM contact capacity：DC30V 2A / AC125V 0.5A resistance load) Connector（Product of Japan Aviation Electronics Industry, Limited） ：Plug MS3106B20-27P Figure 3-5 Remote operation connecting Diagram ULVAC CRYOGENICS INCORPORATED...
- Page 36 ・ The helium pressure during operation depends on the length of flexible hoses. Especially with the long flexible hoses, the pressure tends to get higher. If it exceeds 2.3MpaG, release helium gas from the Helium fill fitting and adjust the helium pressure. 3-10 ULVAC CRYOGENICS INCORPORATED...
- Page 37 5. Remove the two jam nuts holding the self-sealing couplings (male). (Figure 4-1 ①) 6. Remove the rear panel from the compressor by unscrewing 7 screws. (Figure 4-1 ②③) 7. Disconnect the flexible hose from the adsorber inlet. (Figure 4-1 ④) ULVAC CRYOGENICS INCORPORATED...
- Page 38 6. Record the accumulated operation time in the adsorber replacement record label on the front panel. As a guide for the next replacement, make a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours (24,000h). ULVAC CRYOGENICS INCORPORATED...
- Page 39 (⑥→③). ＊ Record on the label the elapsed time. ⑤Remove the adsorber mounting volt. ⑥Slide the adsorber outward and remove it from the compressor. Figure 4-1 Replacement of Adsorber ULVAC CRYOGENICS INCORPORATED 4-3/4-4...
- Page 40 3. Connect the helium charging hose as follows: Connect the charging hose to the regulator. Loosely connect the charging hose to the helium fill fitting on the compressor unit. Open the regulator until the outlet pressure reaches 0.1 to 0.2 MPaG. Allow helium gas ULVAC CRYOGENICS INCORPORATED...
- Page 41 However, the pressure relief valve in the compressor unit is set to release the gas at 2.85MPaG. 6. Close the charge valve after charging helium gas. 7. Close the regulator and remove the charging hose from the helium fill fitting. ULVAC CRYOGENICS INCORPORATED...
- Page 42 Compressor Unit Instruction Manual Pressure Relief Valve (2.85MPaG) Front Panel Low pressure High pressure Bottle Charging Hose Valve Regulator Remove the front panel. CRYO-U ® Charging Valve Helium Gas Bottle Flexible Hoses Compressor Figure 4-2 Charging Helium Gas ULVAC CRYOGENICS INCORPORATED...
- Page 43 Maintenance This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
- Page 44 It may cause a helium leakage. ・However, only when carrying out helium circuit decontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors on the compressor unit right after shutdown. ULVAC CRYOGENICS INCORPORATED...
- Page 45 6. Check the pressure gauge of the compressor unit periodically.Contact o ur Service Engineering Division or the nearest customer support center if the pressure keeps lower. There is a possibility that a leakage mig ht have occurred. ULVAC CRYOGENICS INCORPORATED...
- Page 46 ◆ When shipping the compressor unit, pack as it was shipped from us and avoid extreme shock. ULVAC CRYOGENICS INCORPORATED...
- Page 47 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 48 1) Thermal protective switch (TS3) Check that the cooling water is stops after is ON. flowing and its flow rate. (See several minutes’ Fig.3-2) Ⅲ operation. 2) Low pressure switch (LPS) is ON. Add helium gas till the static pressure. ULVAC CRYOGENICS INCORPORATED...
- Page 49 Contact our Service Engineering Division or the nearest CS center. Ⅳ Compressor Helium gas pressure is too high. Check the helium gas pressure. makes unusual The pressure must not exceed noise during 1.54MPaG (at room temperature operation. 20℃). ULVAC CRYOGENICS INCORPORATED...
- Page 50 CRYOPUMP S/N POWER OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
- Page 51 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 52 REAR/SIDE PANEL SV(R) SV(S) (GR2- 2-SND ) 32A Automatic reset ( TK-N2 ) (MY4 N-D2) UL 10 15 1 0AW G UL 10 07 1 8AW G No.1 No.2 No.3 No.4 Figure B-1 C40R Circuit Diagram ULVAC CRYOGENICS INCOPORATED B-1/B-2...
- Page 53 ・ Do not twist a flexible hose especially when making continuously bent connections. ・ Keep away from water and salt to prevent corrosion. Do not place heavy objects on flexible hoses in order to prevent deformation or collapse. ULVAC CRYOGENICS INCORPORATED MD0C001E,2023OR01...
- Page 54 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
- Page 55 Located on the line connecting helium supply Differential and return lines and automatically keeps the Set pressure：1.60MPa Pressure high – low differential pressure under the set regulating valve value. ULVAC CRYOGENICS INCORPORATED...
- Page 56 Differential pressure valve relief valve Oil heat exchanger Oil injection filter RETURN Accumulator Low pressure switch Helium gas charge valve Helium gas flow Helium gas + Oil flow Oil flow Cooling water flow Figure D-1 C40R Flow Diagram ULVAC CRYOGENICS INCORPORATED...
- Page 57 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
- Page 58 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 59 “Safety Instructions” Description on the sealing sticker has been added. 2023-11-07 “Safety Instructions” Description on the adsorber disposal 2023NR11 has been modified. Appendix C A note has been added to flexible hose allowable pressure. Appendix D has been modified. ULVAC CRYOGENICS INCORPORATED...
- Page 60 Revision This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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